JPS59122920A - 焦電型赤外線センサの製造方法 - Google Patents
焦電型赤外線センサの製造方法Info
- Publication number
- JPS59122920A JPS59122920A JP57231156A JP23115682A JPS59122920A JP S59122920 A JPS59122920 A JP S59122920A JP 57231156 A JP57231156 A JP 57231156A JP 23115682 A JP23115682 A JP 23115682A JP S59122920 A JPS59122920 A JP S59122920A
- Authority
- JP
- Japan
- Prior art keywords
- pyroelectric
- thin film
- substrate
- polarization
- output circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 239000010409 thin film Substances 0.000 claims abstract description 67
- 239000000758 substrate Substances 0.000 claims abstract description 53
- 238000000034 method Methods 0.000 claims abstract description 44
- 230000010287 polarization Effects 0.000 claims description 48
- 239000010408 film Substances 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 12
- 229910052573 porcelain Inorganic materials 0.000 abstract description 7
- XKENYNILAAWPFQ-UHFFFAOYSA-N dioxido(oxo)germane;lead(2+) Chemical compound [Pb+2].[O-][Ge]([O-])=O XKENYNILAAWPFQ-UHFFFAOYSA-N 0.000 abstract description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 4
- 230000005669 field effect Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 238000004891 communication Methods 0.000 description 5
- 238000012858 packaging process Methods 0.000 description 5
- UCHOFYCGAZVYGZ-UHFFFAOYSA-N gold lead Chemical compound [Au].[Pb] UCHOFYCGAZVYGZ-UHFFFAOYSA-N 0.000 description 4
- 239000003921 oil Substances 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 241000084490 Esenbeckia delta Species 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000012925 reference material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57231156A JPS59122920A (ja) | 1982-12-28 | 1982-12-28 | 焦電型赤外線センサの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57231156A JPS59122920A (ja) | 1982-12-28 | 1982-12-28 | 焦電型赤外線センサの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59122920A true JPS59122920A (ja) | 1984-07-16 |
| JPH0311652B2 JPH0311652B2 (enrdf_load_stackoverflow) | 1991-02-18 |
Family
ID=16919171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57231156A Granted JPS59122920A (ja) | 1982-12-28 | 1982-12-28 | 焦電型赤外線センサの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59122920A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02303171A (ja) * | 1989-05-18 | 1990-12-17 | Murata Mfg Co Ltd | 焦電形赤外線検出器 |
| JPH02303170A (ja) * | 1989-05-18 | 1990-12-17 | Murata Mfg Co Ltd | 焦電形赤外線検出器 |
| JP2003133603A (ja) * | 2001-10-26 | 2003-05-09 | Matsushita Electric Works Ltd | 赤外線センサの製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5499684A (en) * | 1978-01-23 | 1979-08-06 | Murata Manufacturing Co | Preparation of pyroelectric type infrared ray detecting element |
-
1982
- 1982-12-28 JP JP57231156A patent/JPS59122920A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5499684A (en) * | 1978-01-23 | 1979-08-06 | Murata Manufacturing Co | Preparation of pyroelectric type infrared ray detecting element |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02303171A (ja) * | 1989-05-18 | 1990-12-17 | Murata Mfg Co Ltd | 焦電形赤外線検出器 |
| JPH02303170A (ja) * | 1989-05-18 | 1990-12-17 | Murata Mfg Co Ltd | 焦電形赤外線検出器 |
| JP2003133603A (ja) * | 2001-10-26 | 2003-05-09 | Matsushita Electric Works Ltd | 赤外線センサの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0311652B2 (enrdf_load_stackoverflow) | 1991-02-18 |
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