JPS59113318A - 移動テ−ブル装置 - Google Patents

移動テ−ブル装置

Info

Publication number
JPS59113318A
JPS59113318A JP22190182A JP22190182A JPS59113318A JP S59113318 A JPS59113318 A JP S59113318A JP 22190182 A JP22190182 A JP 22190182A JP 22190182 A JP22190182 A JP 22190182A JP S59113318 A JPS59113318 A JP S59113318A
Authority
JP
Japan
Prior art keywords
mobile
plane
fixed
moving
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22190182A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6319296B2 (enExample
Inventor
Kohei Hori
堀　光平
Akira Kudo
工藤　章
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP22190182A priority Critical patent/JPS59113318A/ja
Publication of JPS59113318A publication Critical patent/JPS59113318A/ja
Publication of JPS6319296B2 publication Critical patent/JPS6319296B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP22190182A 1982-12-20 1982-12-20 移動テ−ブル装置 Granted JPS59113318A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22190182A JPS59113318A (ja) 1982-12-20 1982-12-20 移動テ−ブル装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22190182A JPS59113318A (ja) 1982-12-20 1982-12-20 移動テ−ブル装置

Publications (2)

Publication Number Publication Date
JPS59113318A true JPS59113318A (ja) 1984-06-30
JPS6319296B2 JPS6319296B2 (enExample) 1988-04-22

Family

ID=16773927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22190182A Granted JPS59113318A (ja) 1982-12-20 1982-12-20 移動テ−ブル装置

Country Status (1)

Country Link
JP (1) JPS59113318A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6181829U (enExample) * 1984-11-06 1986-05-30

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123111U (enExample) * 1974-08-09 1976-02-20
JPS52116245U (enExample) * 1976-02-28 1977-09-03

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123111U (enExample) * 1974-08-09 1976-02-20
JPS52116245U (enExample) * 1976-02-28 1977-09-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6181829U (enExample) * 1984-11-06 1986-05-30

Also Published As

Publication number Publication date
JPS6319296B2 (enExample) 1988-04-22

Similar Documents

Publication Publication Date Title
US3155383A (en) Precision positioning apparatus
US4610442A (en) Positioning table
JPS6163028A (ja) 移動案内装置
US4590380A (en) Means for locating an ultra-precision positioning of a table
US5106343A (en) Constant velocity joint
JPS5887442A (ja) 摺動ミクロト−ム
KR940015307A (ko) 정속 유니버설 조인트
KR910008528A (ko) 위치결정 장치
US3231319A (en) Precision slide
US4444069A (en) Play-free precision drive apparatus
JPH08506389A (ja) 変形ロール殻用可調整軸受
US3973810A (en) Hydrostatic gas bearing systems
JPS6319296B2 (enExample)
US3218108A (en) Precision positioning apparatus
JP2000130687A (ja) 電気粘性流体を使用した潤滑特性制御装置及び制御方法
ES554946A0 (es) Aparato de cojinete y eje de movimiento lineal
JP2952137B2 (ja) ころがり案内装置
JPS61239307A (ja) 位置決め装置
JPS59110527A (ja) 移動テ−ブル装置
JPH0516167B2 (enExample)
RU2222725C2 (ru) Способ бесконтактного перемещения подвижного элемента
JPS59115139A (ja) 移動テ−ブル装置
Brecher et al. Evaluation of an internally spring preloaded four contact-points bearing for spindle units
JPS6397911A (ja) 望遠鏡用アクチユエ−タ
JPS61149666A (ja) 精密送り装置