JPS59113318A - Mobile table device - Google Patents
Mobile table deviceInfo
- Publication number
- JPS59113318A JPS59113318A JP22190182A JP22190182A JPS59113318A JP S59113318 A JPS59113318 A JP S59113318A JP 22190182 A JP22190182 A JP 22190182A JP 22190182 A JP22190182 A JP 22190182A JP S59113318 A JPS59113318 A JP S59113318A
- Authority
- JP
- Japan
- Prior art keywords
- mobile
- plane
- fixed
- moving
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の属する技術分野〕
本発明はオーディオ及びビデオディスク、超ＬＳＩ等の
微細加工装置の試料台として組込む（二好追な移動＄’
＋ｆ就の高い移動テーブル装置（二関する。[Detailed description of the invention] [Technical field to which the invention pertains] The present invention is incorporated as a sample stage in microfabrication equipment for audio and video disks, ultra-LSIs, etc.
+Moving table device with high f-speed (2 related).
オーディオ及びビデオディスク、超ＬＳＩ等の微細パタ
ーン加工装置（二組込まれる移動テーブル装置では、一
般（＝試料を載置したテーブルを横方向（二連続移動さ
せながら、あるいは定位置（二位髄決めして試料（二微
細加工している。この場合、テーブルの移動が円滑（＝
且つ高精度（＝行われなければパターンの加工精度の大
幅な劣化を招く問題がちる。Micro pattern processing equipment for audio and video disks, VLSIs, etc. (2) In general, the table on which the sample is mounted is moved horizontally (2 times) or in a fixed position (2 positions). The sample (two micro-machined) is used. In this case, the movement of the table is smooth (=
In addition, if high precision (= high precision) is not carried out, there is a problem of significant deterioration of pattern processing precision.
しかしながら、従来の移動テーブル装置（−あっては以
下に示す問題があった。従来からこのような目的（二使
用される移動テーブル装置として多くの場合ころがシあ
るいはすベシの直線案内軸受を用いた９、静圧空気軸受
を用いたシしていた。ころがりあるいはすべりの場合は
某内面が金属接触であるため（ニスティックスリップ運
動（二よる移動積度劣化の問題があった。However, conventional movable table devices (-) have had the following problems. 9, a static air bearing was used.In the case of rolling or sliding, there was a problem of deterioration of the displacement due to a certain inner surface being in metal contact (nistic slip motion).
また第１図乃至第３図（二示すような静圧空気軸受を用
いた移動テーブル装置であっては、移動体１を貫通して
移動案内軸２があシ、移動案内軸２の両端は固定金具３
で固定されていて、移動体１の内周と移動案内軸２の外
周は静圧空気軸受として精度よく加工された面を有し、
かつ双方の面は静圧空気を導入すること（＝よって空気
軸受すきま４を保持していて、この状態で移動体１に移
動方向の外力が作用すると移動体１は左右（二移動が可
能であるが、しかし移動（二伴なう０．１μｍ程度の不
規則運動が生じ、上記の微細加工にとって無視できない
ことがわかってきた。In addition, in a movable table device using a static pressure air bearing as shown in FIGS. Fixing bracket 3
The inner periphery of the moving body 1 and the outer periphery of the moving guide shaft 2 have surfaces precisely machined as hydrostatic air bearings,
In addition, static pressure air is introduced into both surfaces (=therefore, the air bearing gap 4 is maintained, and in this state, when an external force in the direction of movement is applied to the moving body 1, the moving body 1 can move left and right (two movements are possible). However, it has been found that irregular movements of about 0.1 μm occur, which cannot be ignored for the above-mentioned microfabrication.
本発明は上記事情を考慮して、従来装置の欠点を改良し
たもので、その目的とするところはテーブルの移動精度
が高く、且つ簡単な構成で微細加工装置に組込むに好適
な実用性の高い高精度な移動テーブル装置を提供するに
ある。The present invention takes the above circumstances into account and improves the drawbacks of conventional devices.The purpose of the present invention is to provide high table movement accuracy, a simple configuration, and high practicality suitable for incorporating into microfabrication devices. The purpose of the present invention is to provide a highly accurate moving table device.
本発明は静圧空気軸受を用いた移動テーブル装置におい
て、テーブルの移動体の側面（二移動案内軸と平行な移
動平面を具備し、更（＝これらと対向させて固定側（＝
固定平面を具備し、これら対向面同志は微小間隙を保持
して設置されておシ、この微小間隙に油を満して移動案
内面を構成したものである。The present invention provides a movable table device using a hydrostatic air bearing, in which the movable body of the table has two movable planes parallel to the movable guide shafts, and a fixed side (=
A fixed plane is provided, and these opposing surfaces are installed with a minute gap between them, and this minute gap is filled with oil to form a moving guide surface.
静圧空気軸受の移動案内による移動テーブル装置の側面
に油を伴った、しかも非金属接触の移動案内を構成する
ことによって、従来の静圧空気軸受の移動案内による移
動テーブル装置では無視できなかった０、１μｍ程度の
不規則運動を油の粘性（二よって最小（二抑制する効果
を得ることができた。By configuring the movement guide with oil on the side of the moving table device using static pressure air bearings for movement guidance and with non-metallic contact, it is impossible to ignore the movement guide device using conventional static pressure air bearings for movement guidance. It was possible to obtain the effect of suppressing irregular movements of about 0.1 μm to a minimum due to the viscosity of the oil.
この高精度な移動テーブルを組込むことによって、０．
１μｍ程度のパターンさ６度を必要とする微細加工装置
に適用ができた。By incorporating this highly accurate moving table, 0.
It was possible to apply it to a microfabrication device that requires a pattern width of about 1 μm by 6 degrees.
第４図乃至第６図は本発明の一実施例を示す高’Ａ’ｒ
７度移動テーブル装置ｄである。移動体１１と移動案内
軸１２と固定金具」３は第１図乃至第３図で示した従来
装置と同等である。移動体１１の側方（二移動平面体１
５をその平面が移動方向と平行であるように付加する。4 to 6 show an embodiment of the present invention.
This is a 7 degree moving table device d. The movable body 11, the movable guide shaft 12, and the fixture 3 are the same as those of the conventional device shown in FIGS. 1 to 3. Side of the moving body 11 (two moving plane bodies 1
5 such that its plane is parallel to the direction of movement.
更（二移動平面体１５の外側方に固定平面体１６を付加
する。移動平面体１５は移動体１１と同一運動を行い、
固定平面体１６は固定されていて動かない。そしてこれ
らの両平面は一定のすきまが確保されるよう（二装置す
る。従って移動体１１が移動しても両平面は固体接触す
ることはない。更に確保された一定のすきまに油を充満
させる。油はすきまが適当であれば表面張力によシすき
ま内に常に保持されるとと（二なる。Furthermore, a fixed plane body 16 is added to the outer side of the movable plane body 15.The movable plane body 15 makes the same movement as the movable body 11,
The fixed plane body 16 is fixed and does not move. Then, two devices are installed to ensure a certain gap between these two planes.Therefore, even if the moving body 11 moves, the two planes will not come into solid contact.Furthermore, the ensured certain gap is filled with oil. If the gap is appropriate, oil will always be held within the gap due to surface tension (2).
このようにして得られた高精度移動テーブル装置では、
油の適当な粘性Ｃ二よって静圧空気軸受で発生していた
０、１μｍ程度の不規則運動を最小Ｃ二抑制することが
できた。この高精度移動テーブルを組み込むことによっ
て０．１μｍ程度のパターン精度を必要とする微細加工
装置を得ることができた。In the high-precision moving table device obtained in this way,
Due to the appropriate viscosity C2 of the oil, it was possible to suppress the irregular movement of about 0.1 μm that occurs in a static air bearing to a minimum C2. By incorporating this high-precision moving table, it was possible to obtain a microfabrication device that requires pattern accuracy of about 0.1 μm.
尚、本発明は上記実施例にのみ限定されるものではない
。たとえば移動案内軸の断面が角形以外□の静圧空気軸
受であっても、また、静圧空気軸受ユニットを複数配置
したりして、静圧空気軸受の構成が異っていても、更に
一対の移動平面体と固定平面体が片側方だけであっても
、上部、あるいは下部にあっても本発明の効果は変らな
い。Note that the present invention is not limited only to the above embodiments. For example, even if the moving guide shaft is a static air bearing with a cross section other than square, or even if multiple static air bearing units are arranged and the configuration of the static air bearing is different, one pair of static air bearings may be used. The effect of the present invention does not change even if the movable plane body and the fixed plane body are located only on one side, the upper part, or the lower part.
更にはオーディオ及びビデオディスク、超ＬＳＩ以外の
機器（二組込むことも可能である。要するに本発明はそ
の要旨を逸脱しない範囲で種々変形して実施することが
可能である。Furthermore, it is also possible to incorporate devices other than audio and video disks and VLSIs.In short, the present invention can be implemented with various modifications without departing from its gist.
第１図は従来技術の一例で静圧空気軸受を用いた移動テ
ーブル装置の平面図、第２図はその正面図、第３図へは
その断面図、第４図は本発明の一実施例を示す高精度な
移動テーブル装置を示す平面図、第５図はその正面図、
第６図はその断面図である。
１・・・移動体 ２・・・移動案内軸３・・
・固定金具 ４・・・空気軸受すきま１１・・
・移動体 １２・・・移動案内軸１３・・・
固定金具 １４・・・空気軸受すきま１５・・
・移動平面体 １６・・・固定平面体１７・・・
油膜
代理人 弁理士 則 近 憲 佑（ほか１名）第 １
図
第 ２ 図
り
第４図
第 ５ 図
第３図
第６図
ｔｔ ｔｓ ｉｔ ｔｚ ／ＪFig. 1 is a plan view of a movable table device using a static air bearing as an example of the prior art, Fig. 2 is a front view thereof, Fig. 3 is a sectional view thereof, and Fig. 4 is an embodiment of the present invention. A plan view showing a high-precision moving table device, FIG. 5 is a front view thereof,
FIG. 6 is a sectional view thereof. 1... Moving body 2... Moving guide shaft 3...
・Fixing bracket 4...Air bearing clearance 11...
- Moving body 12...Moving guide shaft 13...
Fixing bracket 14...Air bearing clearance 15...
・Moving plane body 16...Fixed plane body 17...
Oil Slick Agent Patent Attorney Kensuke Chika (and 1 other person) No. 1
Figure 2 Figure 4 Figure 5 Figure 3 Figure 6 tt ts it tz /J
Claims (1)
ル装置において、テーブルの移動体の側面に移動案内軸
と平行な移動平面を具備し、更（−これらと対向させて
、しかも対向面同志は微小間隙を保持して同定側に固定
平面を具備し、前記微小間隙（′″−油を満して移動の
案内としたことを特徴とする移動テーブル装置。Axial movement guide (2) In a moving table device using a static pressure air bearing, a moving plane parallel to the movement guide axis is provided on the side surface of the moving body of the table, and A movable table device characterized in that the surfaces maintain a minute gap between each other, and a fixed plane is provided on the identification side, and the minute gap ('''--filled with oil serves as a guide for movement).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22190182A JPS59113318A (en) | 1982-12-20 | 1982-12-20 | Mobile table device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22190182A JPS59113318A (en) | 1982-12-20 | 1982-12-20 | Mobile table device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59113318A true JPS59113318A (en) | 1984-06-30 |
| JPS6319296B2 JPS6319296B2 (en) | 1988-04-22 |
Family
ID=16773927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22190182A Granted JPS59113318A (en) | 1982-12-20 | 1982-12-20 | Mobile table device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59113318A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6181829U (en) * | 1984-11-06 | 1986-05-30 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5123111U (en) * | 1974-08-09 | 1976-02-20 | ||
| JPS52116245U (en) * | 1976-02-28 | 1977-09-03 |
-
1982
- 1982-12-20 JP JP22190182A patent/JPS59113318A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5123111U (en) * | 1974-08-09 | 1976-02-20 | ||
| JPS52116245U (en) * | 1976-02-28 | 1977-09-03 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6181829U (en) * | 1984-11-06 | 1986-05-30 | ||
| JPH0347803Y2 (en) * | 1984-11-06 | 1991-10-11 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6319296B2 (en) | 1988-04-22 |
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