JPS59111230A - イオン発生装置 - Google Patents
イオン発生装置Info
- Publication number
- JPS59111230A JPS59111230A JP57218309A JP21830982A JPS59111230A JP S59111230 A JPS59111230 A JP S59111230A JP 57218309 A JP57218309 A JP 57218309A JP 21830982 A JP21830982 A JP 21830982A JP S59111230 A JPS59111230 A JP S59111230A
- Authority
- JP
- Japan
- Prior art keywords
- anode
- cathode
- ion
- potential
- ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 62
- 238000004544 sputter deposition Methods 0.000 description 7
- 238000010884 ion-beam technique Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000005315 distribution function Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000009954 braiding Methods 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 150000001793 charged compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- -1 hydrogen ions Chemical class 0.000 description 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000005658 nuclear physics Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/04—Ion sources; Ion guns using reflex discharge, e.g. Penning ion sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Tubes For Measurement (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57218309A JPS59111230A (ja) | 1982-12-15 | 1982-12-15 | イオン発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57218309A JPS59111230A (ja) | 1982-12-15 | 1982-12-15 | イオン発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59111230A true JPS59111230A (ja) | 1984-06-27 |
| JPH043056B2 JPH043056B2 (enrdf_load_stackoverflow) | 1992-01-21 |
Family
ID=16717818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57218309A Granted JPS59111230A (ja) | 1982-12-15 | 1982-12-15 | イオン発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59111230A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5150010A (en) * | 1990-03-14 | 1992-09-22 | Kabushiki Kaisha Toshiba | Discharge-in-magnetic-field type ion generating apparatus |
| WO2006115172A1 (ja) * | 2005-04-22 | 2006-11-02 | Masanobu Nunogaki | 固体イオン源 |
-
1982
- 1982-12-15 JP JP57218309A patent/JPS59111230A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5150010A (en) * | 1990-03-14 | 1992-09-22 | Kabushiki Kaisha Toshiba | Discharge-in-magnetic-field type ion generating apparatus |
| WO2006115172A1 (ja) * | 2005-04-22 | 2006-11-02 | Masanobu Nunogaki | 固体イオン源 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH043056B2 (enrdf_load_stackoverflow) | 1992-01-21 |
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