JPS59109060U - Twin beam secondary ion mass spectrometer - Google Patents
Twin beam secondary ion mass spectrometerInfo
- Publication number
- JPS59109060U JPS59109060U JP306083U JP306083U JPS59109060U JP S59109060 U JPS59109060 U JP S59109060U JP 306083 U JP306083 U JP 306083U JP 306083 U JP306083 U JP 306083U JP S59109060 U JPS59109060 U JP S59109060U
- Authority
- JP
- Japan
- Prior art keywords
- mass spectrometer
- secondary ion
- ion mass
- ion
- twin beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図面は、本考案による分析装置を示す回路構成図である
。
１・・・・・・矩形波発生器、２・・・・・・ブランキ
ング電極、３・・・・・・インバータ、４・・・・・・
ゲート回路、４ａ・・・・・・ゲート回路４の制御端子
、５・・・・・・ブランキング電極、６・・・・・・ガ
リウム液体金属イオン源、７・・・・・・ガリウムイオ
ンビーム、８・・・・・・酸素ガスイオン源、９・・・
・・・酸素イオンビーム、１０・・・・・・試料、１１
・・・・・・２次イオン、１２・・・・・・質量分析器
、１３−・・・・・記録計、１４・・・・・・イオン光
学系、１５・・・・・・イオン光学系、である。The drawing is a circuit configuration diagram showing an analysis device according to the present invention. 1... Square wave generator, 2... Blanking electrode, 3... Inverter, 4...
Gate circuit, 4a...Control terminal of gate circuit 4, 5...Blanking electrode, 6...Gallium liquid metal ion source, 7...Gallium ion Beam, 8...Oxygen gas ion source, 9...
... Oxygen ion beam, 10 ... Sample, 11
...Secondary ion, 12...Mass spectrometer, 13-...Recorder, 14...Ion optical system, 15...Ion It is an optical system.
Claims (1)
る加速エネルギーを持つ２系統のイオンビームを発生さ
せる二つのイオンビーム発生手段と、それぞれのイオン
ビームを時間的に交互にブランキングする手段と、ビー
ムのブランキングに同期させ、特定の片一方のビームが
出ている時だけ、二次イオン検出器からの信号を出すよ
うにしたゲート回路を有することを特長とするツインビ
ーム二次イオン質量分析装置。A secondary ion mass spectrometer includes two ion beam generating means for generating two systems of ion beams each having different acceleration energies, a means for temporally alternately blanking each ion beam, and a beam blanking means. A twin beam secondary ion mass spectrometer characterized by having a gate circuit that is synchronized with ranking and outputs a signal from a secondary ion detector only when one specific beam is emitted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP306083U JPS59109060U (en) | 1983-01-13 | 1983-01-13 | Twin beam secondary ion mass spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP306083U JPS59109060U (en) | 1983-01-13 | 1983-01-13 | Twin beam secondary ion mass spectrometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59109060U true JPS59109060U (en) | 1984-07-23 |
Family
ID=30134691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP306083U Pending JPS59109060U (en) | 1983-01-13 | 1983-01-13 | Twin beam secondary ion mass spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59109060U (en) |
-
1983
- 1983-01-13 JP JP306083U patent/JPS59109060U/en active Pending
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