JPS5916065U - Mass spectrometry optical system - Google Patents
Mass spectrometry optical systemInfo
- Publication number
- JPS5916065U JPS5916065U JP11100782U JP11100782U JPS5916065U JP S5916065 U JPS5916065 U JP S5916065U JP 11100782 U JP11100782 U JP 11100782U JP 11100782 U JP11100782 U JP 11100782U JP S5916065 U JPS5916065 U JP S5916065U
- Authority
- JP
- Japan
- Prior art keywords
- analyzer
- optical system
- mass spectrometry
- lens
- lenses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Tubes For Measurement (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、電界Ｅと磁場Ｂとを直交させて質量分析を行
なう原理図、第２図は、従来の光学系を′示した基本図
、第３図は、本考案の一実施例の光学系を示した基本図
、第４図は、非点収差が生じる理由を説明する分析器の
断面図、ａ、 ｂそれぞれは、従来と本考案の図面で
ある。
１．２・・・・・・電界Ｅを生じさせる電極、３，４・
・・・・・磁場Ｂを発生させる磁極、５・・・・・・質
量分析用絞り、６．７・・・・・・レンズ、８・・・・
・・試料面。Figure 1 is a diagram of the principle of mass spectrometry with electric field E and magnetic field B orthogonal to each other, Figure 2 is a basic diagram showing a conventional optical system, and Figure 3 is an example of an embodiment of the present invention. FIG. 4 is a basic diagram showing the optical system, and FIG. 4 is a sectional view of the analyzer explaining the reason why astigmatism occurs. FIG. 1.2... Electrode that generates electric field E, 3,4.
...Magnetic pole for generating magnetic field B, 5...Aperture for mass spectrometry, 6.7...Lens, 8...
...Sample surface.
Claims (1)
ズ）と、このイオン線と直交する断面上で電界と磁場と
を直交させて印加し、質量を分析せしめる手段（分析器
）とを具備した装置において、少なくとも２個のレンズ
を用い、レンズ間に分析器を配置せしめ、分析器のイオ
ン源側のレンズの結像位置を分析器内にあるようにせし
めたことを特徴とする質量分析光学系。Equipped with a means (lens) that narrows down the ion beam generated by the ion source, and a means (analyzer) that applies an electric field and a magnetic field orthogonally on a cross section perpendicular to the ion beam to analyze the mass. A mass spectrometry apparatus characterized in that at least two lenses are used, an analyzer is disposed between the lenses, and the imaging position of the lens on the ion source side of the analyzer is located within the analyzer. Optical system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11100782U JPS5916065U (en) | 1982-07-23 | 1982-07-23 | Mass spectrometry optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11100782U JPS5916065U (en) | 1982-07-23 | 1982-07-23 | Mass spectrometry optical system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5916065U true JPS5916065U (en) | 1984-01-31 |
Family
ID=30257937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11100782U Pending JPS5916065U (en) | 1982-07-23 | 1982-07-23 | Mass spectrometry optical system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5916065U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5975550A (en) * | 1982-10-25 | 1984-04-28 | Jeol Ltd | Focusing method for charged particle ray |
-
1982
- 1982-07-23 JP JP11100782U patent/JPS5916065U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5975550A (en) * | 1982-10-25 | 1984-04-28 | Jeol Ltd | Focusing method for charged particle ray |
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