JPS59162700U - Charged particle accelerator lens device - Google Patents

Charged particle accelerator lens device

Info

Publication number
JPS59162700U
JPS59162700U JP5726483U JP5726483U JPS59162700U JP S59162700 U JPS59162700 U JP S59162700U JP 5726483 U JP5726483 U JP 5726483U JP 5726483 U JP5726483 U JP 5726483U JP S59162700 U JPS59162700 U JP S59162700U
Authority
JP
Japan
Prior art keywords
charged particle
lens device
particle accelerator
thin film
travels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5726483U
Other languages
Japanese (ja)
Inventor
岩本　英司
Original Assignee
日新ハイボルテ−ジ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日新ハイボルテ−ジ株式会社 filed Critical 日新ハイボルテ−ジ株式会社
Priority to JP5726483U priority Critical patent/JPS59162700U/en
Publication of JPS59162700U publication Critical patent/JPS59162700U/en
Pending legal-status Critical Current

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  • Particle Accelerators (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図および第２図は従来の荷電粒子加速装置のレンズ
装置の電磁型および静電型の各側を示す模式図である。 第３図はこの考案の荷電粒子加速装置のレンズ装置の一
実施例の構成説明図で、イは荷電粒子ビームの進行方向
に直角な方向から見た図、口は荷電粒子ビームの進行方
向から見た図である。第４図はこの考案の荷電粒子加速
装置のレンズ装置の他の一実施例の構成説明図である。 １．１０・・・荷電粒子加速装置のレンズ装置、２゜３
、　１２．　１３．　２２．　２３・・・薄膜アース電
極、４、　５．　１４．　１５．　２４．　２５・・・
高電圧電極、６、　１６．　２６・・・直流高電圧電源
、Ｂ、　Ｂ’　、　Ｂ″・・・荷電粒子ビーム。FIGS. 1 and 2 are schematic diagrams showing electromagnetic and electrostatic types of a lens device of a conventional charged particle accelerator. Figure 3 is an explanatory diagram of the configuration of one embodiment of the lens device of the charged particle accelerator of this invention, where A is a view seen from a direction perpendicular to the direction of movement of the charged particle beam, and the mouth is a view from the direction of movement of the charged particle beam. This is the view. FIG. 4 is an explanatory diagram of another embodiment of the lens device of the charged particle accelerator of this invention. 1.10... Lens device of charged particle accelerator, 2゜3
, 12. 13. 22. 23... Thin film earth electrode, 4, 5. 14. 15. 24. 25...
High voltage electrode, 6, 16. 26...DC high voltage power supply, B, B', B''...Charged particle beam.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ２枚の薄膜アース電極を小間隙をあけて対向して配し、
かつそれら薄膜アース電極の両性側に空間をあけてそれ
ぞれ高電圧電極を対向させて配し、これにより荷電粒子
ビームが、前記小間隙を進行するときには偏向をうけな
いで進行し、かつ前記空間を進行するときには前記薄膜
アース電極へ向けて偏向をうけて進行し、全体として実
束するようにしたことを特徴とする荷電粒子加速装置の
レンズ装置。゛Two thin film earth electrodes are placed facing each other with a small gap,
Furthermore, high voltage electrodes are arranged facing each other with a space left on both sides of the thin film earth electrodes, so that when the charged particle beam travels through the small gap, it travels without being deflected. 1. A lens device for a charged particle accelerator, characterized in that when traveling, the lens device is deflected toward the thin film earth electrode and travels so as to form a solid bundle as a whole.゛
JP5726483U 1983-04-15 1983-04-15 Charged particle accelerator lens device Pending JPS59162700U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5726483U JPS59162700U (en) 1983-04-15 1983-04-15 Charged particle accelerator lens device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5726483U JPS59162700U (en) 1983-04-15 1983-04-15 Charged particle accelerator lens device

Publications (1)

Publication Number Publication Date
JPS59162700U true JPS59162700U (en) 1984-10-31

Family

ID=30187575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5726483U Pending JPS59162700U (en) 1983-04-15 1983-04-15 Charged particle accelerator lens device

Country Status (1)

Country Link
JP (1) JPS59162700U (en)

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