JPS59106039U - Gas leak detector attached to the valve of vacuum equipment - Google Patents

Gas leak detector attached to the valve of vacuum equipment

Info

Publication number
JPS59106039U
JPS59106039U JP183U JP183U JPS59106039U JP S59106039 U JPS59106039 U JP S59106039U JP 183 U JP183 U JP 183U JP 183 U JP183 U JP 183U JP S59106039 U JPS59106039 U JP S59106039U
Authority
JP
Japan
Prior art keywords
valve
gas leak
leak detector
detector attached
vacuum equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP183U
Other languages
Japanese (ja)
Inventor
桜井正夫
朝来野邦弘
福地孝之
Original Assignee
日本ドライケミカル株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本ドライケミカル株式会社 filed Critical 日本ドライケミカル株式会社
Priority to JP183U priority Critical patent/JPS59106039U/en
Publication of JPS59106039U publication Critical patent/JPS59106039U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の気体漏れ検出器の説明図、第２図は本考
案の気体漏れ検出器の配置を示す説明図、第３図は本考
案に用いる圧電素子の一例の作動状況を示す説明図、第
４図は本考案の一実施態様の構造の説明図。 １・・・・・・真空ポンプ、３，３ａ・・・・・・弁、
１１・・・・・・音波検出体。Fig. 1 is an explanatory diagram of a conventional gas leak detector, Fig. 2 is an explanatory diagram showing the arrangement of the gas leak detector of the present invention, and Fig. 3 is an explanatory diagram showing the operating status of an example of the piezoelectric element used in the present invention. 4 are explanatory diagrams of the structure of one embodiment of the present invention. 1... Vacuum pump, 3, 3a... Valve,
11... Sound wave detector.

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）真空ポンプ、真空タンク及び真空配管等の真空装
置に付設される弁の近傍の圧力側配管内に圧電素子を設
けたことを特徴とする真空装置の弁に付設される気体漏
れ検出器。(1) A gas leak detector attached to the valve of a vacuum device, characterized in that a piezoelectric element is provided in the pressure side piping near the valve attached to the vacuum device such as a vacuum pump, vacuum tank, and vacuum piping. . （２）圧電素子を２個のスプリングで挾み宙吊りにした
ことを特徴とする実用新案登録請求の範囲第１項記載の
真空装置の弁に付設される気体漏れ検出器。(2) A gas leak detector attached to a valve of a vacuum device according to claim 1, characterized in that a piezoelectric element is suspended between two springs.
JP183U 1983-01-04 1983-01-04 Gas leak detector attached to the valve of vacuum equipment Pending JPS59106039U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP183U JPS59106039U (en) 1983-01-04 1983-01-04 Gas leak detector attached to the valve of vacuum equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP183U JPS59106039U (en) 1983-01-04 1983-01-04 Gas leak detector attached to the valve of vacuum equipment

Publications (1)

Publication Number Publication Date
JPS59106039U true JPS59106039U (en) 1984-07-17

Family

ID=30131742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP183U Pending JPS59106039U (en) 1983-01-04 1983-01-04 Gas leak detector attached to the valve of vacuum equipment

Country Status (1)

Country Link
JP (1) JPS59106039U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020525720A (en) * 2017-06-30 2020-08-27 バット ホールディング アーゲー Vacuum valve with acoustic sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5395687A (en) * 1977-02-02 1978-08-22 Fuji Rousui Chiyousa Sentaa Detecting method and apparatus for location of liquid leakage in liquid guide tube

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5395687A (en) * 1977-02-02 1978-08-22 Fuji Rousui Chiyousa Sentaa Detecting method and apparatus for location of liquid leakage in liquid guide tube

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020525720A (en) * 2017-06-30 2020-08-27 バット ホールディング アーゲー Vacuum valve with acoustic sensor
US11460125B2 (en) 2017-06-30 2022-10-04 Vat Holding Ag Vacuum valve with acoustic sensor

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