JPS59102581A - ワ−クステ−シヨン - Google Patents

ワ−クステ−シヨン

Info

Publication number
JPS59102581A
JPS59102581A JP21176782A JP21176782A JPS59102581A JP S59102581 A JPS59102581 A JP S59102581A JP 21176782 A JP21176782 A JP 21176782A JP 21176782 A JP21176782 A JP 21176782A JP S59102581 A JPS59102581 A JP S59102581A
Authority
JP
Japan
Prior art keywords
work table
manipulator
turntable
air purification
purification box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21176782A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6224238B2 (enExample
Inventor
今橋　一成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP21176782A priority Critical patent/JPS59102581A/ja
Publication of JPS59102581A publication Critical patent/JPS59102581A/ja
Publication of JPS6224238B2 publication Critical patent/JPS6224238B2/ja
Granted legal-status Critical Current

Links

JP21176782A 1982-12-01 1982-12-01 ワ−クステ−シヨン Granted JPS59102581A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21176782A JPS59102581A (ja) 1982-12-01 1982-12-01 ワ−クステ−シヨン

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21176782A JPS59102581A (ja) 1982-12-01 1982-12-01 ワ−クステ−シヨン

Publications (2)

Publication Number Publication Date
JPS59102581A true JPS59102581A (ja) 1984-06-13
JPS6224238B2 JPS6224238B2 (enExample) 1987-05-27

Family

ID=16611242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21176782A Granted JPS59102581A (ja) 1982-12-01 1982-12-01 ワ−クステ−シヨン

Country Status (1)

Country Link
JP (1) JPS59102581A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62277284A (ja) * 1986-05-23 1987-12-02 東京エレクトロン株式会社 無塵室用搬送ロボットによる搬送方法
US4986715A (en) * 1988-07-13 1991-01-22 Tokyo Electron Limited Stock unit for storing carriers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62277284A (ja) * 1986-05-23 1987-12-02 東京エレクトロン株式会社 無塵室用搬送ロボットによる搬送方法
US4986715A (en) * 1988-07-13 1991-01-22 Tokyo Electron Limited Stock unit for storing carriers

Also Published As

Publication number Publication date
JPS6224238B2 (enExample) 1987-05-27

Similar Documents

Publication Publication Date Title
KR950001099B1 (ko) 반도체웨이퍼용 이송로보트
JP4975238B2 (ja) 基板を移送するためのシステム
US4808059A (en) Apparatus and method for transferring workpieces
JP6760386B2 (ja) 天井搬送システム、及び天井搬送車
EP0238751A2 (en) Semiconductor processing system
JP2003533015A (ja) モジュールソーター
CN2720781Y (zh) 芯片载入埠的搬运装置
JPS63211645A (ja) ウエハーを装着及び離脱する方法及び装置
JP2005510055A (ja) マイクロエレクトロニクス基板の自動処理用の低減フットプリントツール
JP2013251432A (ja) 搬送ロボットおよび搬送ロボットを備えた局所クリーン装置
KR20140060347A (ko) 베어 워크피스 스토커용 컨테이너 스토리지 애드-온
TW200940287A (en) Conveyance robot, locally cleaned housing with the conveyance robot, and semiconductor manufacturing device with the housing
US12237196B2 (en) Docking device with moveable frame and sealing component
JPH03116731A (ja) 半導体ウエハ用移送装置
JPS59102581A (ja) ワ−クステ−シヨン
JP2010082742A (ja) ウェーハ搬送ロボット及びウェーハ搬送装置
CN223926754U (zh) 光罩盒储存装置
JP2747269B2 (ja) 箱体搬送装置
KR102811816B1 (ko) 로봇 및 이를 구비한 기판 반송 시스템
CN109979845A (zh) 一种foup盒用夹持装置、foup装置及固定方法
JP2010153687A (ja) 基板搬送ロボットおよび基板搬送装置
CN114280891A (zh) 光刻设备
CN211359883U (zh) 一种陶瓷泥坯的除尘装置
JPH0247045U (enExample)
TWI897140B (zh) 光罩盒儲存裝置