JPS59102177U - Rotary coating device - Google Patents

Rotary coating device

Info

Publication number
JPS59102177U
JPS59102177U JP19513082U JP19513082U JPS59102177U JP S59102177 U JPS59102177 U JP S59102177U JP 19513082 U JP19513082 U JP 19513082U JP 19513082 U JP19513082 U JP 19513082U JP S59102177 U JPS59102177 U JP S59102177U
Authority
JP
Japan
Prior art keywords
coated
tube
coating
coating liquid
coating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19513082U
Other languages
Japanese (ja)
Inventor
圭一 柴田
Original Assignee
株式会社東芝
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社東芝 filed Critical 株式会社東芝
Priority to JP19513082U priority Critical patent/JPS59102177U/en
Publication of JPS59102177U publication Critical patent/JPS59102177U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来例の要部を示す断面図、第２図は本考案の
一実施例の要部を断面して示す正面図、第３図は本実施
例における走査速度説明図、第４図は他の走査速度の説
明図である。 ４：被塗布部材、４Ｃ：塗布面、２５：回転テーブル、
２８二回転駆動機構、３５：塗布液回転装置、３６：管
体走査機構、３７：制御装置、４１：塗布液、４３：管
体、４８：開口。Fig. 1 is a sectional view showing the main part of the conventional example, Fig. 2 is a front view showing the main part in cross section of an embodiment of the present invention, Fig. 3 is an explanatory diagram of the scanning speed in this embodiment, and Fig. 4 The figure is an explanatory diagram of other scanning speeds. 4: Part to be coated, 4C: Coated surface, 25: Rotary table,
28 two-rotation drive mechanism, 35: coating liquid rotating device, 36: tube body scanning mechanism, 37: control device, 41: coating liquid, 43: tube body, 48: opening.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 円板状の被塗布部材をその中心を通る軸線を回転軸線と
して回転自在に支持する回転テーブルと、上記回転テー
ブルを回転する回転駆動機構と、上記被塗布部材の塗布
面に塗布液を導く管体を有し上記塗布面に上記塗布液を
供給する塗布液供給装置と、上記管体を保持し上記被塗
布部材の中心から外側の間上記管体の開口を走査させる
管体走査機構と、上記開口の走査速度を制御する制御装
置とを具備したことを特徴とする回転塗布装置。A rotary table that rotatably supports a disk-shaped member to be coated with an axis passing through its center as a rotation axis, a rotational drive mechanism that rotates the rotary table, and a pipe that guides a coating liquid to the coating surface of the member to be coated. a coating liquid supply device having a body and supplying the coating liquid to the coating surface; a tube scanning mechanism that holds the tube and scans the opening of the tube between the center and the outer side of the member to be coated; A rotary coating device comprising: a control device for controlling the scanning speed of the aperture.
JP19513082U 1982-12-24 1982-12-24 Rotary coating device Pending JPS59102177U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19513082U JPS59102177U (en) 1982-12-24 1982-12-24 Rotary coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19513082U JPS59102177U (en) 1982-12-24 1982-12-24 Rotary coating device

Publications (1)

Publication Number Publication Date
JPS59102177U true JPS59102177U (en) 1984-07-10

Family

ID=30419193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19513082U Pending JPS59102177U (en) 1982-12-24 1982-12-24 Rotary coating device

Country Status (1)

Country Link
JP (1) JPS59102177U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS581144A (en) * 1981-06-25 1983-01-06 Fujitsu Ltd Method for coating photoresist

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS581144A (en) * 1981-06-25 1983-01-06 Fujitsu Ltd Method for coating photoresist

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