JPS5895679A - Surface coating reacted sintered silicon nitride - Google Patents
Surface coating reacted sintered silicon nitrideInfo
- Publication number
- JPS5895679A JPS5895679A JP19245781A JP19245781A JPS5895679A JP S5895679 A JPS5895679 A JP S5895679A JP 19245781 A JP19245781 A JP 19245781A JP 19245781 A JP19245781 A JP 19245781A JP S5895679 A JPS5895679 A JP S5895679A
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- sintered silicon
- surface coating
- sintered body
- coating reacted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Ceramic Products (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
本発明は安定した耐熱性被覆層を有する反応焼結窒化珪
素に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a reactively sintered silicon nitride having a stable, heat-resistant coating.
窒化珪素の反応焼結体は媒溶剤を含有しなくとも焼結可
能であるため高温において軟化することが少ないが、焼
結体内部に１５〜３０ｖｏｌ％の連結気孔が存在するた
め、９００〜１１００℃の中温域の大気中においては酸
化が内部においても起こることが高温構造材料として重
要な問題であった。これを解決するため反応焼結体を１
３００℃前後の酸化処理により表面にＳｉ３Ｎ４の酸化
による被覆層を設ける方法があった。併し、この時生じ
るＳｉＯ２はクリストバライトであるため２２０℃でα
型からβ型に変る変態点が存在し、急激な体積変化を起
こし、熱サイクルにおいてクラックを発生する原因とな
っていた。The reaction sintered body of silicon nitride can be sintered without containing a solvent, so it is less likely to soften at high temperatures. Oxidation also occurs internally in the atmosphere at a medium temperature range of ℃, which is an important problem for high-temperature structural materials. To solve this problem, a reaction sintered body of 1
There is a method of providing a coating layer by oxidizing Si3N4 on the surface by oxidation treatment at around 300°C. However, since the SiO2 produced at this time is cristobalite, α
There is a transformation point where the type changes to the β type, causing a rapid volume change and causing cracks to occur during thermal cycles.
本発明はこれを改良するためになされたもので特許請求
の範囲のとおりを要旨とするもので、表面のＳｉＯ２を
主体とする被覆層はＦｅ、Ｃｒ、Ｃｏ、Ｎｉ、Ｃｕの酸
化物を含有するために、結晶型はトリヂマイト主体であ
り、クリストバライトのような大きな体積変化を起こさ
ないので熱サイクルに対し安定なガラス相であり、室温
−１２００℃の温度サイクルによってもクラックを生ぜ
ず安定した耐酸化性を有するものである。The present invention has been made to improve this, and the gist is as set forth in the claims.The surface coating layer mainly composed of SiO2 contains oxides of Fe, Cr, Co, Ni, and Cu. Therefore, the crystal type is mainly tridymite, which does not undergo large volume changes like cristobalite, so it is a glass phase that is stable against thermal cycles, and has stable acid resistance without cracking even during temperature cycles from room temperature to 1200°C. It has the property of being chemically oxidized.
以下実施例により具体的に説明する。This will be explained in detail below using Examples.
実施例
２５％の気孔率を有する窒化珪素の反応焼結体の表面に
第１表に示す組成の被覆層を真空蒸着または電子ビーム
蒸着または塩類溶液のコーティングによって０．０５〜
０．１ｉｕの厚さに設け、大気中の加熱によって焼結体
表面にコーティング成分とＳｉ３Ｎ４の酸化によるＳｉ
Ｏ２とよりなるガラスの被覆層を設けた後、酸化特性及
び１２００℃と室温とのくり返しによる熱サイクル１０
回後のクラックの発生の有無を顕微鏡で調べた。Example 2 A coating layer having the composition shown in Table 1 was applied to the surface of a reactive sintered body of silicon nitride having a porosity of 0.05 to 5% by vacuum evaporation, electron beam evaporation, or salt solution coating.
The sintered body is coated with a thickness of 0.1 iu and heated in the atmosphere to form a coating component and Si due to the oxidation of Si3N4.
After providing a glass coating layer consisting of O2, oxidation properties and thermal cycles 10 by repeating 1200°C and room temperature
The presence or absence of cracks after cycling was examined using a microscope.
Claims (2)
または２種以上の金属の酸化物の混合物とＳｒＯ２とよ
りなるガラス相を表面に有する表面被覆反応焼結窒化珪
素。(1) A surface-coated reactive sintered silicon nitride having a glass phase on its surface consisting of a mixture of oxides of one or more metals selected from Fe, Cr, Co, Ni, and Cu and SrO2.
Ｎｉ、Ｃｕより選ばれた１種または２種以上の金属また
は金属化合物をコーティングした後、酸化可能雰囲気で
加熱処理することにより該焼結体表面に安定なガラス相
を形成することを特徴とする表面被覆反応焼結窒化珪素
の製造法。(2) Fe, Cr, Co, etc. on the surface of the silicon nitride reaction sintered body.
A stable glass phase is formed on the surface of the sintered body by coating it with one or more metals or metal compounds selected from Ni and Cu and then heat-treating it in an oxidizing atmosphere. A method for producing surface-coated reactive sintered silicon nitride.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19245781A JPS5895679A (en) | 1981-11-30 | 1981-11-30 | Surface coating reacted sintered silicon nitride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19245781A JPS5895679A (en) | 1981-11-30 | 1981-11-30 | Surface coating reacted sintered silicon nitride |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5895679A true JPS5895679A (en) | 1983-06-07 |
| JPS621354B2 JPS621354B2 (en) | 1987-01-13 |
Family
ID=16291614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19245781A Granted JPS5895679A (en) | 1981-11-30 | 1981-11-30 | Surface coating reacted sintered silicon nitride |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5895679A (en) |
-
1981
- 1981-11-30 JP JP19245781A patent/JPS5895679A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS621354B2 (en) | 1987-01-13 |
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