JPS589414A - Production of reed screen type converter of surface acoustic wave - Google Patents
Production of reed screen type converter of surface acoustic waveInfo
- Publication number
- JPS589414A JPS589414A JP10642281A JP10642281A JPS589414A JP S589414 A JPS589414 A JP S589414A JP 10642281 A JP10642281 A JP 10642281A JP 10642281 A JP10642281 A JP 10642281A JP S589414 A JPS589414 A JP S589414A
- Authority
- JP
- Japan
- Prior art keywords
- spacer
- acoustic wave
- surface acoustic
- electrode
- screen type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、すだれ状電極部に立体交差を有する弾性表面
波すだれ状変換器の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a surface acoustic wave interdigital transducer having a three-dimensional intersection in an interdigital transducer.
すだれ状変換器は、圧電基板を用いてフィルターや遅延
線などの弾性表面波素子を実現するために必要欠くべか
らざる構成要素である。これを用いた弾性表面波素子は
小型化−ＩＣ化・（１）
無調整化が容易な新しい電気通信回路米子として近年実
用化の努力が盛んに行なわれている。Interdigital transducers are essential components for realizing surface acoustic wave devices such as filters and delay lines using piezoelectric substrates. In recent years, efforts have been made to commercialize a surface acoustic wave device using this as a new telecommunications circuit that can be miniaturized and integrated into an IC (1) without any adjustment.
以下では、代表的な弾性表面波素子としてフィルターを
例にとって説明する。In the following, a filter will be explained as an example of a typical surface acoustic wave element.
フィルター性能でまず第一に必要な特性は挿入損失の小
さいことである。このため、単方向性すだね状変換器が
考案さｈている。この変換器は一波長あたり３本の電極
指を持っている。この３組の電極に３相の電気信号を供
給するためには立体交差が必要である。即ち一波長内の
３本の電極指のうちの２本は弾性表面波の進行方向の画
側に引き出し、残ヤの１本は立体交差によシ上記２本全
またいで外部取出し用電極と接続する必要がある。The first characteristic required for filter performance is low insertion loss. For this reason, unidirectional transducers have been devised. This transducer has three electrode fingers per wavelength. A three-dimensional intersection is required to supply three-phase electrical signals to these three sets of electrodes. In other words, two of the three electrode fingers within one wavelength are pulled out to the image side in the direction of propagation of the surface acoustic wave, and the remaining one is placed across the three-dimensional intersection and used as an electrode for external extraction. Need to connect.
このような立体交差を有するすだれ状変換器の従来の製
造方法を工程説明平面図を用いて説明する。A conventional manufacturing method of a comb-shaped transducer having such a three-dimensional intersection will be explained using process explanatory plan views.
（１）圧電基板１の上にアルミニウム電極２を形成する
。を極相３，４．５は一波長内の３組の電極である。電
極指３はポンディングパッド６と接続さり、ており、電
極指４Ｖｉ対向するポンディ（２）
ングパッド（図では省略している）に接続されテイル。(1) Form an aluminum electrode 2 on a piezoelectric substrate 1. The poles 3 and 4.5 are three sets of electrodes within one wavelength. The electrode finger 3 is connected to the bonding pad 6, and the electrode finger 4Vi is connected to the opposing bonding pad (not shown) in the tail.
第三の電極指５は上記二つのポンディングパッドには接
続されておらず、おのおの電気的に絶縁されている。The third electrode finger 5 is not connected to the two bonding pads and is electrically insulated from each other.
（２）全面にスペーサー７として酸化亜鉛膜を被着し、
しかる後第三の電極指５の橋かけ部８とポンディングパ
ッド部に開口９ 、１０ ’ｉ影形成、アルミニウム電
極を露出せしめる。(2) A zinc oxide film is deposited on the entire surface as a spacer 7,
Thereafter, openings 9 and 10'i are formed in the bridging portion 8 and the bonding pad portion of the third electrode finger 5 to expose the aluminum electrode.
（３） 全面にフォトレジスト１１を途布し、しかる
後第三の電極とポンディングパッドパターンに従って開
口１２．１３を形成する。第三電極の開口１２において
、第三の電極指５のアルミニウムは露出しているが、電
極指３のアルミニウムは酸化亜鉛膜のスペーサー７があ
るため露出していない０
（４）上記開口に金電極１４ 、１５を形成する。しか
る後、フォトレジストを除去し、スペーサを除去するこ
とＫより立体交差１６を形成する。(3) Distribute photoresist 11 over the entire surface, and then form openings 12 and 13 according to the third electrode and bonding pad pattern. In the opening 12 of the third electrode, the aluminum of the third electrode finger 5 is exposed, but the aluminum of the electrode finger 3 is not exposed because of the spacer 7 of the zinc oxide film. Electrodes 14 and 15 are formed. Thereafter, the photoresist is removed and the spacers are removed to form a three-dimensional intersection 16.
従来、立体交差を形成するだめのスペーサとして酸化亜
鉛膜を用いておシ、この除去のために酸を（３）
用いていた。このため、超高周波弾性表面波素子用の薄
いアルミニウム電極が破損し、高歩留りの素子生産に問
題があった。Conventionally, a zinc oxide film has been used as a spacer to form a three-dimensional intersection, and acid has been used to remove the film (3). As a result, thin aluminum electrodes for ultra-high frequency surface acoustic wave devices are damaged, posing a problem in producing high-yield devices.
本発明の目的は立体交差を有する弾性表面波すだれ状変
換器を高歩留りで製造する方法を提供することにある。SUMMARY OF THE INVENTION It is an object of the present invention to provide a method for manufacturing a surface acoustic wave transducer having a three-dimensional intersection with a high yield.
本発明はすだｈ状電極部に立体交差を有する弾性表面波
すだれ状変換器の製造方法において、上記立体交差部を
形成するためのスペーサーとして有機物膜を用いること
により得らｔＩ、る。The present invention provides a method for manufacturing a surface acoustic wave transducer having a three-dimensional intersection in a transverse electrode portion, in which an organic material film is used as a spacer for forming the three-dimensional intersection.
以下本発明の弾性表匍波すだれ状変換器の製造方法につ
いて説明する。Hereinafter, a method for manufacturing the elastic surface interdigital transducer of the present invention will be explained.
図の工程（２）においてスペーサ７として有機物膜例え
ばポリイミド樹脂を用いる。全面にポリイミドを塗布し
た後１２０℃でペイ２する。この上に７オトレジストＡ
Ｚ１３５０を塗布し、Ｍ元し、次ＫＡＺ現像液と水との
混合液によりレジストパターンを現像するとともにボリ
イくド膜のエツチングをも行ない開口９，１０を形成す
る。しかる後、１３０℃以上のペイ２を行ないポリイミ
ドをアセトンに対（４）
して不溶化させた後、フォトレジス）Ｙアセトンで除去
する。In step (2) in the figure, an organic film such as polyimide resin is used as the spacer 7. After coating the entire surface with polyimide, it was heated to 120°C. 7 Otoresist A on top of this
Z1350 is coated, M-etched, and then the resist pattern is developed with a mixture of KAZ developer and water, and the resin film is also etched to form openings 9 and 10. Thereafter, the polyimide is insolubilized in acetone (4) by performing a step 2 at 130° C. or higher, and then the photoresist is removed with Y acetone.
工程（４）のスペーサーの除去に酸素プラズマを用いる
ことによりアルミニウム電極が破損されるととｋく、立
体交差を有する弾性表面波すだれ状変換器が製造される
。When the aluminum electrode is damaged by using oxygen plasma to remove the spacer in step (4), a surface acoustic wave interdigital transducer with a three-dimensional intersection is produced.
以上述べたように、本発明によれば歩留り良く立体交差
を有する弾性表面波すだれ状変換器を製造することが可
能となる。As described above, according to the present invention, it is possible to manufacture a surface acoustic wave transducer having a three-dimensional intersection with high yield.
図は立体交差を有する弾性表面波すだれ状変換器の製造
方法を説明するための工程平面図で、（１）はアルミニ
ウムの電極を形成した状態、（２）はその上にスペーサ
ーを形成した状態、（３）は７ｔトレジスト膜に第三の
電極及びポンプイングツくクドパターンの開口を形成し
た状態、（４）はスペーサーが除去され、立体交差が形
成された状態を表わす。
図において、１け圧電基板、２．３．４．５．６゜（５
）
８はアルミニウム電極、７はスペーサー、９．１０ハス
ヘーサーの開口、１１Ｆｉフオトレジス） 、 １２゜
１３はフォトレジストの開口、１４ 、１５は金Ｎ極、
１６は立体交差を表わす。
（６）The figure is a process plan view for explaining the manufacturing method of a surface acoustic wave interdigital transducer with three-dimensional intersection. (1) is a state in which aluminum electrodes are formed, and (2) is a state in which a spacer is formed thereon. , (3) shows a state in which a third electrode and a cross pattern opening for pumping are formed in the 7T resist film, and (4) shows a state in which a spacer is removed and a three-dimensional intersection is formed. In the figure, one piezoelectric substrate, 2.3.4.5.6° (5
) 8 is an aluminum electrode, 7 is a spacer, 9. 10 hash heather opening, 11 Fi photoresist), 12° 13 is a photoresist opening, 14 and 15 are gold N electrodes,
16 represents a grade crossing. (6)
Claims (1)
変換器の製造方法において、上記立体交差部を形成する
ためのスペーサーとして有機物膜を用いることを特徴と
する弾性表面波すだれ状変換器の製造方法。A method for manufacturing a surface acoustic wave transducer having a three-dimensional intersection in the interdigital electrode section, characterized in that an organic film is used as a spacer for forming the three-dimensional intersection. Method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10642281A JPS589414A (en) | 1981-07-08 | 1981-07-08 | Production of reed screen type converter of surface acoustic wave |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10642281A JPS589414A (en) | 1981-07-08 | 1981-07-08 | Production of reed screen type converter of surface acoustic wave |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS589414A true JPS589414A (en) | 1983-01-19 |
| JPH0245361B2 JPH0245361B2 (en) | 1990-10-09 |
Family
ID=14433220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10642281A Granted JPS589414A (en) | 1981-07-08 | 1981-07-08 | Production of reed screen type converter of surface acoustic wave |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS589414A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0316309A (en) * | 1989-03-28 | 1991-01-24 | Kazuhiko Yamanouchi | 3-dimensional wiring method using anodic oxidation |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5085873A (en) * | 1973-12-03 | 1975-07-10 | ||
| JPS5131185A (en) * | 1974-09-10 | 1976-03-17 | Nippon Electric Co | DENKAIKOKAHANDOTAISOCHI |
-
1981
- 1981-07-08 JP JP10642281A patent/JPS589414A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5085873A (en) * | 1973-12-03 | 1975-07-10 | ||
| JPS5131185A (en) * | 1974-09-10 | 1976-03-17 | Nippon Electric Co | DENKAIKOKAHANDOTAISOCHI |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0316309A (en) * | 1989-03-28 | 1991-01-24 | Kazuhiko Yamanouchi | 3-dimensional wiring method using anodic oxidation |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0245361B2 (en) | 1990-10-09 |
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