JPS5893631U - 超音波霧化装置 - Google Patents

超音波霧化装置

Info

Publication number
JPS5893631U
JPS5893631U JP18864781U JP18864781U JPS5893631U JP S5893631 U JPS5893631 U JP S5893631U JP 18864781 U JP18864781 U JP 18864781U JP 18864781 U JP18864781 U JP 18864781U JP S5893631 U JPS5893631 U JP S5893631U
Authority
JP
Japan
Prior art keywords
face
ultrasonic
coupler
large end
resonant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18864781U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6338951Y2 (enrdf_load_stackoverflow
Inventor
実 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP18864781U priority Critical patent/JPS5893631U/ja
Publication of JPS5893631U publication Critical patent/JPS5893631U/ja
Application granted granted Critical
Publication of JPS6338951Y2 publication Critical patent/JPS6338951Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure-Spray And Ultrasonic-Wave- Spray Burners (AREA)
  • Special Spraying Apparatus (AREA)
JP18864781U 1981-12-19 1981-12-19 超音波霧化装置 Granted JPS5893631U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18864781U JPS5893631U (ja) 1981-12-19 1981-12-19 超音波霧化装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18864781U JPS5893631U (ja) 1981-12-19 1981-12-19 超音波霧化装置

Publications (2)

Publication Number Publication Date
JPS5893631U true JPS5893631U (ja) 1983-06-24
JPS6338951Y2 JPS6338951Y2 (enrdf_load_stackoverflow) 1988-10-13

Family

ID=29992377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18864781U Granted JPS5893631U (ja) 1981-12-19 1981-12-19 超音波霧化装置

Country Status (1)

Country Link
JP (1) JPS5893631U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02259070A (ja) * 1989-03-31 1990-10-19 Matsushita Electric Ind Co Ltd スパッタ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02259070A (ja) * 1989-03-31 1990-10-19 Matsushita Electric Ind Co Ltd スパッタ装置

Also Published As

Publication number Publication date
JPS6338951Y2 (enrdf_load_stackoverflow) 1988-10-13

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