JPS5893010A - Production of color filter for solid state image pickup device - Google Patents
Production of color filter for solid state image pickup deviceInfo
- Publication number
- JPS5893010A JPS5893010A JP56191254A JP19125481A JPS5893010A JP S5893010 A JPS5893010 A JP S5893010A JP 56191254 A JP56191254 A JP 56191254A JP 19125481 A JP19125481 A JP 19125481A JP S5893010 A JPS5893010 A JP S5893010A
- Authority
- JP
- Japan
- Prior art keywords
- color
- color filter
- state image
- filter component
- dispersed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000007787 solid Substances 0.000 title abstract 2
- 239000011248 coating agent Substances 0.000 claims abstract description 8
- 238000000576 coating method Methods 0.000 claims abstract description 8
- 239000011347 resin Substances 0.000 claims abstract description 5
- 229920005989 resin Polymers 0.000 claims abstract description 5
- 229920001296 polysiloxane Polymers 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 5
- 239000003086 colorant Substances 0.000 claims description 3
- 239000000975 dye Substances 0.000 abstract description 11
- 238000010438 heat treatment Methods 0.000 abstract description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 4
- 238000001035 drying Methods 0.000 abstract description 4
- 229910052710 silicon Inorganic materials 0.000 abstract description 4
- 239000010703 silicon Substances 0.000 abstract description 4
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 abstract description 2
- 239000008096 xylene Substances 0.000 abstract description 2
- 238000005406 washing Methods 0.000 abstract 1
- 108010010803 Gelatin Proteins 0.000 description 9
- 229920000159 gelatin Polymers 0.000 description 9
- 239000008273 gelatin Substances 0.000 description 9
- 235000019322 gelatine Nutrition 0.000 description 9
- 235000011852 gelatine desserts Nutrition 0.000 description 9
- 239000011241 protective layer Substances 0.000 description 8
- 238000007796 conventional method Methods 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000001045 blue dye Substances 0.000 description 3
- 230000018109 developmental process Effects 0.000 description 3
- 239000001046 green dye Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000001044 red dye Substances 0.000 description 3
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004043 dyeing Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000986 disperse dye Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005562 fading Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Optical Filters (AREA)
- Color Television Image Signal Generators (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、ＣＣＤイメ′−ジセンサーの如き固体撮像素
子のカラーフィルターを製造する方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a color filter for a solid-state imaging device such as a CCD image sensor.
従来、この種のカラーフィルターとしては、ゼラチンや
ポリビニルアルコール（ＰｖＡ）を用い゛た染色形有機
色素フィルタが使用されている。Conventionally, dyed organic dye filters using gelatin or polyvinyl alcohol (PvA) have been used as color filters of this type.
そのような従来のカラーフィルターを製造する方法を、
赤、緑、青の原色型について第１図を参照して説明する
。How to manufacture such conventional color filters,
The primary color types of red, green, and blue will be explained with reference to FIG.
まず、感光性を付与したゼラチン肴をガラ飄基板１上に
塗布し、乾燥させた後、所望のマスクパターンを通して
露光し、現像してゼラチン等の層のパターンを形成し、
このパターンを例えば赤色染料で染色して、同図１１）
の如く第１色目の赤色フィルター成分２を形成する。次
に、同図（２）の如く、基板１及び赤色フィルター成分
２の全表面上に混色防止のために透明な中間保護＠３を
被着する。First, a gelatin paste imparted with photosensitivity is applied onto the glass substrate 1, dried, exposed to light through a desired mask pattern, and developed to form a pattern of a layer of gelatin or the like.
For example, by dyeing this pattern with red dye,
The first color red filter component 2 is formed as follows. Next, as shown in FIG. 2 (2), a transparent intermediate protection @3 is applied on the entire surface of the substrate 1 and the red filter component 2 to prevent color mixing.
次に、同様にしてこの中間保護層３上にゼラチン等を塗
布し、乾燥、パターン露光、現像を経てゼラチン等の層
のパターンを形成し、今度はこのパターンを例えば緑色
染料で染色して、同図（３）の如く第２色目の緑色フィ
ルター成分４を形成した後、再び同様にして同図１４）
の如く、全表面上に混色防止の中間保護層３を被着する
。次に、また同様ニジて、中間保護層３上にゼラチン等
の層のパターンを形成した後、今度はこのパターンを例
えば青色染料で染色して、同図（５）の如く第３色目の
青色フィルター成分５を形成し、最後に同図（６）の如
く、全表面上に表面保護層６を被着して、ガラス基板１
上に形成されたカラーフィルターを得る。Next, in the same manner, gelatin or the like is applied on this intermediate protective layer 3, and a pattern of the layer of gelatin or the like is formed through drying, pattern exposure, and development.This pattern is then dyed with, for example, a green dye. After forming the second color green filter component 4 as shown in (3) of the same figure, the same process is performed again (see (14) of the same figure)
An intermediate protective layer 3 for preventing color mixing is deposited on the entire surface as shown in FIG. Next, in the same way, after forming a pattern of a layer of gelatin or the like on the intermediate protective layer 3, this pattern is dyed with, for example, a blue dye, and as shown in FIG. The filter component 5 is formed, and finally, as shown in FIG. 6, a surface protective layer 6 is deposited on the entire surface, and the glass substrate
Obtain a color filter formed on top.
このようにして形成されたカラーフィルターは固体撮像
素子１個分に切断され、第２図に示すように、その切断
されたカラーフィルター７が固体撮像素子８の画素に対
応するように位置合せされ、接着剤９により固体撮像素
子８上に貼り合せられる。なお、第２図において、１０
は固体撮像素子８に設けられたボンディングパットテ、
アルミニウムワイヤ１１及びセラミックパッケージ１２
上のプリント配線を介してリードピン１３に接続されて
いる。The color filter thus formed is cut into pieces for one solid-state image sensor, and as shown in FIG. 2, the cut color filters 7 are aligned so as to correspond to the pixels of the solid-state image sensor 8. , is bonded onto the solid-state image sensor 8 using an adhesive 9. In addition, in Figure 2, 10
is a bonding pad provided on the solid-state image sensor 8,
Aluminum wire 11 and ceramic package 12
It is connected to the lead pin 13 via the upper printed wiring.
しかしながら、上記の従来方法により製造され゛たカラ
ーフィルターには、次めような問題がある。However, the color filter manufactured by the above conventional method has the following problems.
（１） フィルター形成材料として耐熱性の乏しいゼ
ラチン等を使っているため、カラーフィルターと固体撮
像素子との貼り合せに高温加熱を要する接着剤を使用す
ることができず、またカラーフィルター形成時又は貼り
合せ後のアセンブリ工程で高温の熱処理工程を施すこと
ができμいので、耐熱性のある表面保護層を用いる仁と
ができなかったり、ワイヤボンディングに金を用いるこ
とｈ（できないなど、固体撮像素子特性としても、製造
工程としても制約を受けることになる。さらに、熱によ
りカラーフィルターが退色する。(1) Because gelatin, etc. with poor heat resistance is used as the filter forming material, it is not possible to use adhesives that require high temperature heating to bond the color filter and solid-state image sensor. Because it is difficult to perform a high-temperature heat treatment process in the assembly process after bonding, it is not possible to use a heat-resistant surface protective layer, or to use gold for wire bonding. This imposes restrictions on both device characteristics and the manufacturing process.Furthermore, color filters fade due to heat.
［２１各色のフィルター成分毎に、感光性ゼラチン等の
塗布、パターン露光、現像によるパターン形成、染色、
中間保護層の被着という複雑で面倒な工程を必要とし、
□多色フィルターではこれを複数回繰り返さなければな
らないので、カラーフィルター形成における高い歩留り
の確保と低価格化が困難である。[21 For each filter component of each color, coating of photosensitive gelatin, pattern exposure, pattern formation by development, dyeing,
It requires a complicated and troublesome process of applying an intermediate protective layer,
□For multicolor filters, this process must be repeated multiple times, making it difficult to ensure a high yield and reduce costs in forming color filters.
本発明は、上記従来法の問題に鑑みてなされたものであ
って、予め所門の染料を分散させた紫外線硬化型シリコ
ン・ジャンクション・コーティング・レジン（以下ジャ
ンクション・コーティング・レシンをＪＣＲと称す）を
用いてカラーフィルターを形成することにより、上記問
題を解決することを目的とするものである。The present invention has been made in view of the above-mentioned problems of the conventional method, and consists of an ultraviolet curable silicone junction coating resin (hereinafter referred to as junction coating resin) in which a specific dye is dispersed in advance. The purpose of this invention is to solve the above problem by forming a color filter using the above-mentioned color filter.
本発明で用しくるフィルター形成材料としての紫外線硬
化型シリコンＪＣＲは、無色透明であって、所望の色、
例えば赤、緑又は青色の染料を分きさせたときには赤、
緑又は青色に着色し、紫外線照射と熱処理により硬化し
て着色が固定化されるものである。The ultraviolet curable silicone JCR used as a filter forming material in the present invention is colorless and transparent, and has a desired color.
For example, when red, green or blue dyes are separated, red,
It is colored green or blue and is cured by ultraviolet irradiation and heat treatment to fix the coloring.
以下、実施例により本発明の詳細な説明する。Hereinafter, the present invention will be explained in detail with reference to Examples.
第３図は固体撮像素子のカラーフィルターの製造方法に
係る本発明の一実施例を示す図で、ウェハ一段階で固体
撮像素子上に直接、赤、緑、青からなる原色型カラーフ
ィルターを形成するものである。FIG. 3 is a diagram showing an embodiment of the present invention related to a method for manufacturing a color filter for a solid-state image sensor, in which a primary color type color filter consisting of red, green, and blue is formed directly on the solid-state image sensor in one wafer step. It is something to do.
まず、同図（１）に示すような画素となる受光部１４と
転送部１５とを表面に有する固体撮像素子１６の、ウェ
ハ一段階における表面に、同ｐ（２＋に示すように、予
め所望の色の染料、例えば赤色染料を分散させた紫外線
硬化型シリコンＪＣＲ１７をスピンナーにより全面に塗
布する。次に、この紫外線硬化型シリコンＪＣＲ１７を
所望のマスクパターンを通して高圧水銀灯にて露光し、
キシレン等による超音波洗浄により現像し、２−β℃°
で５プ間乾燥させた後、高圧水銀灯による１０秒間の紫
外線照射と２００℃で１．５時間の熱処理により硬化さ
せ、キシレン又はアセトンによりリンスを行ない、乾燥
させることによって、同図（３）に示す如く第１色目の
赤色のフィルター成分１８を形成する。First, as shown in FIG. An ultraviolet curable silicone JCR17 in which a color dye such as a red dye is dispersed is applied to the entire surface using a spinner. Next, this ultraviolet curable silicone JCR17 is exposed to light through a desired mask pattern using a high pressure mercury lamp.
Developed by ultrasonic cleaning with xylene etc. and heated to 2-β℃°
After drying for 5 minutes at As shown, a first color red filter component 18 is formed.
次に、同図１４）に示す如く、前記の赤色のフィルター
成分１８を含む固体撮像素子の表面全面に、例えば緑色
染料を分散させた紫外線硬化型シリコンＪＣＲ１・９を
塗布し、前記と同様の方法で同図（５）に示す如く第２
色目の緑色のフィルター成分２０を形成する。ここで、
第２色目のフィルター成分を形成するために、第１色目
のフィルター成分１８を含む固体撮像素子表面全面に、
第２色目の染料を分散させた紫外線硬化型シリコンＪＣ
Ｒ１９を塗布しても、第１色目のフィルター成分１８は
十分硬化しているので、第１色目と第２色目とが混色す
ることはない。Next, as shown in FIG. 14), the entire surface of the solid-state image sensor containing the red filter component 18 is coated with, for example, ultraviolet curing silicone JCR1/9 in which green dye is dispersed, and the same method as described above is applied. In the second method, as shown in the same figure (5),
A green filter component 20 is formed. here,
In order to form the second color filter component, on the entire surface of the solid-state image sensor including the first color filter component 18,
UV-curable silicone JC with second color dye dispersed
Even if R19 is applied, the first color filter component 18 is sufficiently cured, so the first color and the second color will not mix.
次に、同図（６）に示す如く、第１色目のフィルター成
分１８及び第２色目のフィルター成分２０を含む固体撮
像素子の表面全面に、第３色目としての例えば青色の染
料を分散させた紫外線硬化型シリコンＪＣＲ２１を塗布
した後、前記と同１ｉこして同図（７）に示す如く、“
第３色目の青色フィルター成分２２を形成する。この場
合も、第３色目の紫外線硬化型シリコンＪＣＲを塗布す
る際には、第１色目のフィルター成分１８及び第２色目
のフィルター成分２０は既に十分硬化しているので、第
３色目が第１色目又は第２色目と混色することはない。Next, as shown in FIG. 6 (6), a third color, for example, a blue dye, is dispersed over the entire surface of the solid-state image sensor including the first color filter component 18 and the second color filter component 20. After applying the ultraviolet curable silicone JCR21, the same method as above was applied, and as shown in the same figure (7), "
A third color blue filter component 22 is formed. In this case as well, when applying the third color UV-curable silicone JCR, the first color filter component 18 and the second color filter component 20 have already been sufficiently cured, so the third color is applied to the first color. It does not mix with other colors or secondary colors.
最後に、同図（８）に示す如く、表面保護膜として、全
フィルター成分１８．２０及び２２を含む固体撮像素子
表面全面に、染料を分散させない無色透明の紫外線硬化
型シリコンＪＣＲ２３をスピンナーにより塗布し、ポン
ディングパッド２４上の部分をパターン露光、現像によ
り除去した後、全面を紫外線照射と熱処理により硬化す
る。このようにして、画素となる受光部１４に赤、緑、
又は青のフィルター成分１８，２０、又は２２を配した
カラーフィルターが、固体撮像素子上に形成される。Finally, as shown in Figure (8), as a surface protective film, colorless and transparent ultraviolet curing silicone JCR23, which does not disperse dye, is applied using a spinner over the entire surface of the solid-state image sensor, including all filter components 18, 20 and 22. After removing the portion above the bonding pad 24 by pattern exposure and development, the entire surface is cured by ultraviolet irradiation and heat treatment. In this way, red, green,
Alternatively, a color filter including the blue filter component 18, 20, or 22 is formed on the solid-state image sensor.
本実施例では、固体撮像素子のウェハ一段階で固体撮像
素子上に直接カラーフィルターを形成しているので、シ
リコンＪＣＲによる周知のパッシベーション及びプロテ
クション効果を得ることもできる。In this embodiment, since the color filter is directly formed on the solid-state image sensor in one step of the wafer of the solid-state image sensor, the well-known passivation and protection effects of silicon JCR can also be obtained.
上記実施例は、固体撮像素子上に直接、赤、緑、青の原
色型カラーフィルターを形成する場合に適用した例であ
るが、本発明は、固体撮像素子に貼り合せる透明基板上
に形成する場合、及び黄色及びシアンを用いた補色型カ
ラーフィルターを形成する場合にも適用できることは勿
論である。The above embodiment is an example in which primary color filters of red, green, and blue are formed directly on a solid-state image sensor, but the present invention is an example in which primary color filters of red, green, and blue are formed on a transparent substrate that is bonded to a solid-state image sensor. Of course, the present invention can also be applied to cases where a complementary color filter using yellow and cyan is formed.
上述した如く、本発明によれば、フィルター形成材料と
してシリコンＪＣＲを用いたので、ゼラチン等を用いた
従来？契う−フィルターに比べて耐熱性の優れた（３０
０℃以上の耐熱性を有する）カラーフィルターを得るこ
とができ、カラーフイ、シタ−形成時、又は形成後のア
センブリ工程における熱処理の制約、及び熱による退色
の問題が解決される。また、予め所望の染料を分散させ
た紫外線硬化型シリコンＪＣＲにより所望の色のパター
ンを形成しているので、従来法のような複雑で面倒な工
程を繰り返す必要もなく、高い歩留りで低価格、高信頼
性のカラーフィルターを提供することができる。As described above, according to the present invention, silicon JCR is used as the filter forming material, which is different from the conventional method using gelatin or the like. - Excellent heat resistance compared to filters (30
It is possible to obtain a color filter (having heat resistance of 0° C. or higher), which solves the problem of heat treatment limitations and color fading due to heat during the formation of color fins and shutters or in the assembly process after formation. In addition, since the desired color pattern is formed using ultraviolet curing silicone JCR in which the desired dye is dispersed in advance, there is no need to repeat the complicated and troublesome processes of conventional methods, resulting in a high yield and low cost. It is possible to provide highly reliable color filters.
第１図（１）〜（６）はカラーフィルターの従来の形成
方法の例を示す断面図、第２図はカラーフィルターを固
体撮像素子に貼り合せた状態を示す断面図、第３図（１
）〜（８）は本発明の一実施例を示す断面図である。
２．１８・・・第１色目のフィルター成分、３・・・中
間保護層、４．２０・・・第２色目のフィルター成分、
５．２２・・・第３色目のフィルター成分、６・・・表
面保護層、７・・・カラーフィルター、８・・・固体撮
像素子、９・・・接着剤、１４・・・受光部、１５・・
・転送部、１７・・・第１色目の染料を分散させた紫外
線硬化型シリコンＪＣＲ被膜、１９・・・第２色目の染
料を分散させた紫外線硬化型シリコンＪＣＲ被膜、２１
・・・第３色目の染料を分散させた紫外線硬化型シリコ
ンＪＣＲ被膜、２３・・・表面保護膜、２４・・・ポン
ディングパッド。
特許出願人 シャープ株式会社Figures 1 (1) to (6) are cross-sectional views showing an example of a conventional method for forming a color filter, Figure 2 is a cross-sectional view showing a color filter bonded to a solid-state image sensor, and Figure 3 (1)
) to (8) are cross-sectional views showing one embodiment of the present invention. 2.18... First color filter component, 3... Intermediate protective layer, 4.20... Second color filter component,
5.22... Third color filter component, 6... Surface protective layer, 7... Color filter, 8... Solid-state image sensor, 9... Adhesive, 14... Light receiving part, 15...
・Transfer part, 17... Ultraviolet curable silicone JCR coating in which first color dye is dispersed, 19... Ultraviolet curable silicone JCR coating in which second color dye is dispersed, 21
. . . Ultraviolet curable silicone JCR film in which third color dye is dispersed, 23 . . . Surface protective film, 24 . . . Ponding pad. Patent applicant Sharp Corporation
Claims (1)
望の染料を分散させた紫外線硬化型シリコン・ジャンク
ション・コーティング・レジンの被膜を形成し、該被膜
を紫外線によりパターン露光し、現像し、得られるパタ
ーンを硬化させて第１色目のフィルター成分を形成し、
同様にしてこの工程を繰り返すことにより第２色目以降
のフィルター成分を形成することを特徴とするカラーフ
ィルターの製造方法。(1) A film of ultraviolet curable silicone junction coating resin in which a desired dye is dispersed is formed on a transparent substrate or one surface of a solid-state image sensor, and the film is pattern-exposed to ultraviolet light and developed. , curing the resulting pattern to form a first color filter component;
A method for manufacturing a color filter, characterized in that filter components of second and subsequent colors are formed by repeating this step in the same manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56191254A JPS5893010A (en) | 1981-11-28 | 1981-11-28 | Production of color filter for solid state image pickup device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56191254A JPS5893010A (en) | 1981-11-28 | 1981-11-28 | Production of color filter for solid state image pickup device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5893010A true JPS5893010A (en) | 1983-06-02 |
Family
ID=16271470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56191254A Pending JPS5893010A (en) | 1981-11-28 | 1981-11-28 | Production of color filter for solid state image pickup device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5893010A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6194004A (en) * | 1984-10-16 | 1986-05-12 | Nec Corp | Production of color filter |
| JPS63213802A (en) * | 1987-03-03 | 1988-09-06 | Fujitsu Ltd | Color filter |
-
1981
- 1981-11-28 JP JP56191254A patent/JPS5893010A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6194004A (en) * | 1984-10-16 | 1986-05-12 | Nec Corp | Production of color filter |
| JPS63213802A (en) * | 1987-03-03 | 1988-09-06 | Fujitsu Ltd | Color filter |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4827118A (en) | Light-sensitive device having color filter and manufacturing method thereof | |
| KR100491434B1 (en) | Manufacturing method of color filter | |
| CA1133614A (en) | Color solid-state imager and method of making the same | |
| JPH05134109A (en) | Manufacture of color filter | |
| JPS5893010A (en) | Production of color filter for solid state image pickup device | |
| JPS5817405A (en) | Multicolored optical filter and its manufacture | |
| JPS6150282B2 (en) | ||
| JP3158466B2 (en) | Method for manufacturing solid-state imaging device | |
| JPS5840507A (en) | Production of color filter for solid-state image pickup element | |
| JP2802733B2 (en) | Color solid-state imaging device and method of manufacturing the same | |
| JPH0250441B2 (en) | ||
| JPS5814074B2 (en) | Manufacturing method of color solid-state image sensor | |
| JPS61203663A (en) | Manufacture of solid-state image pick-up device | |
| JPS6382325A (en) | Light receiving element | |
| JPS5868970A (en) | Color solid-state image sensing element and its manufacture | |
| JP2951942B1 (en) | Method for manufacturing solid-state imaging device | |
| JPH03190168A (en) | Manufacture of solid-state image sensing device | |
| JPH0513736A (en) | Color solid-state image pickup device | |
| JPH0582113B2 (en) | ||
| JPS63143504A (en) | Production of solid state color image pickup device | |
| JPS6333622A (en) | Light receiving element connecting construction and manufacture thereof | |
| JP2697002B2 (en) | Method for manufacturing color solid-state imaging device | |
| JPH0360154A (en) | Solid-state color image sensing device | |
| JPS58154808A (en) | Color filter | |
| JPS6367528A (en) | Photodetector molded with opalescent resin |