JPS5888999A - Ultrasonic wave transmitter and receiver - Google Patents

Ultrasonic wave transmitter and receiver

Info

Publication number
JPS5888999A
JPS5888999A JP18755781A JP18755781A JPS5888999A JP S5888999 A JPS5888999 A JP S5888999A JP 18755781 A JP18755781 A JP 18755781A JP 18755781 A JP18755781 A JP 18755781A JP S5888999 A JPS5888999 A JP S5888999A
Authority
JP
Japan
Prior art keywords
diaphragm
thin plate
case
ultrasonic transducer
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18755781A
Other languages
Japanese (ja)
Other versions
JPS642320B2 (en
Inventor
Ryoichi Takayama
良一 高山
Akira Tokushima
晃 徳島
Nozomi Ueshiba
上芝 望
Yukihiko Ise
伊勢 悠紀彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP18755781A priority Critical patent/JPS5888999A/en
Priority to US06/439,549 priority patent/US4607186A/en
Priority to DE8282110290T priority patent/DE3272470D1/en
Priority to EP82110290A priority patent/EP0080100B1/en
Priority to CA000415697A priority patent/CA1202112A/en
Publication of JPS5888999A publication Critical patent/JPS5888999A/en
Publication of JPS642320B2 publication Critical patent/JPS642320B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/02Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators
    • G10K11/025Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators horns for impedance matching
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00Piezoelectric transducers; Electrostrictive transducers
    • H04R17/10Resonant transducers, i.e. adapted to produce maximum output at a predetermined frequency

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

PURPOSE:To obtain a sharp directivity and an excellent pulse characteristics, by providing a diaphragm at the center of a sticked type piezoelectric element, elastically fixing the surrounding of a diaphragm to a case with a buffer member and providing a thin plate having an opening in the front and a horn. CONSTITUTION:A diaphragm 13 is fitted to a coupling shaft 12 arranged at the center of a sticked type piezoelectric element 11. The surrounding of the diaphragm 13 is elastically fixed to the inside of a cylindrical case 17 via a buffer member 20 such as an elastic rubber formed in a circular ring. A sound absorbing member 21 is sticked at the bottom of the case 17. A circular opening 22 taking a straight line through the shaft 12 as a center, and a thin plate 23 having another opening 22' provided concentrically with the opening 22 are provided in front of the diaphragm 13, and the case 17 and the thin plate 23 are inserted to the bottle neck of a parabolic horn 24. Leads 19, 19' electrically connect the element 11 and terminals 16, 16'. Through the constitution of an ultrasonic wave transmitter/receiver like this, a sharp directivity and an excellent pulse characteristic can be obtained and accurate measuring information can be obtained in a short time interval.

Description

【発明の詳細な説明】 本発明は、尖鋭な指向特性を有し、パルス特性3ページ を改善した超音波送受波器に関するものである。[Detailed description of the invention] The present invention has sharp directional characteristics, and has pulse characteristics on page 3. This invention relates to an ultrasonic transducer that has been improved.

空気中での超音波の送受波器は、圧電セラミクスの貼り
合せ型圧電素子が多く用いられており、上記貼り合せ型
圧電素子の撓み振動の共振点9反共振点で使用するよう
に作られている。また、媒体となる空気の機械的インピ
ーダンスは圧電セラミクスのそれと比して著しく小さい
ため、貼り合せ型圧電素子を振動板と結合させて機械的
インピーダンスの低下を図っている。
A bonded piezoelectric element made of piezoelectric ceramics is often used as a transducer for ultrasonic waves in the air. ing. Furthermore, since the mechanical impedance of air as a medium is significantly smaller than that of piezoelectric ceramics, the bonded piezoelectric element is coupled to the diaphragm to reduce the mechanical impedance.

従来の超音波送受波器の構造を第1図に示す。The structure of a conventional ultrasonic transducer is shown in FIG.

これは、貼り合せ型圧電素子1の中心部に結合軸2を貫
通固定し、この結合軸2に振動板3を取付けるとともに
、貼り合せ型圧電素子1の振動の節部を支持台4の先端
に弾性接着剤5をもって固定したものであった。6,6
′は端子、7は貼り合せ型圧電素子等を覆うケース、8
はケース7の上部に形成された透孔に取り付けられた保
護用メツシュ、9,9′は貼り合せ型圧電素子1と端子
6,6′を電気的に接続しているリード線である。
This involves penetrating and fixing a coupling shaft 2 to the center of the bonded piezoelectric element 1, attaching a diaphragm 3 to the coupling shaft 2, and directing the vibration nodes of the bonded piezoelectric element 1 to the tip of the support base 4. It was fixed with an elastic adhesive 5. 6,6
' is a terminal, 7 is a case that covers the bonded piezoelectric element, etc., 8
9 and 9' are lead wires electrically connecting the bonded piezoelectric element 1 and the terminals 6 and 6'.

第2図は、上記構造の超音波送受波器のパルス特性を示
したもので、複数個の・(ルスで駆動したときの送信波
形である。圧電セラミケースの機械的Qが高いことによ
り、立上り・立下り時間が遅く2ミリ秒以上にも及ぶも
のであった。
Figure 2 shows the pulse characteristics of the ultrasonic transducer with the above structure, and shows the transmitted waveform when driven by multiple . The rise and fall times were slow, reaching more than 2 milliseconds.

たとえば移動物体の距離測定のとき、このような従来の
超音波送受波器を用いると、短い時間間隔で測定情報を
得る必要がある場合、立上り・立下り時間がきわめて長
いために、受信信号がピーク値になるまでの時間がかか
る。あるいは受信信号が立下る前に次の信号が受信され
混信して、正確な測定情報が得られなかった。
For example, when measuring the distance of a moving object, when using such a conventional ultrasonic transducer, it is necessary to obtain measurement information at short time intervals, and the rise and fall times are extremely long, so the received signal is It takes time to reach the peak value. Alternatively, the next signal was received before the received signal fell, causing interference and making it impossible to obtain accurate measurement information.

また、送受波を単体の素子で行なわせる場合、送波させ
てただちに受信可能な状態になるまで、かなりの時間を
要し、その間、測定情報を得ることはできなかった。
Furthermore, when transmitting and receiving waves using a single element, it takes a considerable amount of time to transmit waves and become ready for reception immediately, and during that time, measurement information cannot be obtained.

さらに測定対象と寿る物体に対して分解能を上げようと
すると、尖゛鋭な指向特性が要求される。
Furthermore, in order to increase the resolution of the object to be measured, sharp directional characteristics are required.

尖鋭な指向特性は、公知のように音源の大きさを増大さ
せ、使用周波数を高くすることにより実現゛されるが、
使用周波数を高くすると音の減衰は著5ページ しく増大するので、高くすることに限界があり、音源を
大きくする必要がある。
As is well known, sharp directional characteristics can be achieved by increasing the size of the sound source and increasing the frequency used.
As the frequency used increases, the attenuation of the sound increases by a significant amount, so there is a limit to how high the frequency can be raised, and it is necessary to make the sound source larger.

圧電セラミクスを用いた超音波送受波器に尖鋭な指向特
性を要求すると、振動板、貼り合せ型圧電素子および貼
り合せ型圧電素子を支持する支持台が著しく大きくなる
という欠点があった。たとえ大きな振動板を用いても、
均一なピストン振動を実現させることはきわめて困難で
あり、音源を大きくする割には概して指向特性:を尖鋭
にならなかった。
When ultrasonic transducers using piezoelectric ceramics are required to have sharp directivity characteristics, there is a drawback that the diaphragm, the bonded piezoelectric element, and the support base that supports the bonded piezoelectric element become significantly large. Even if a large diaphragm is used,
It was extremely difficult to achieve uniform piston vibration, and although the sound source was made larger, the directional characteristics were generally not sharp.

一方、ホーンを用いて指向特性を尖鋭にしようとする場
合、従来の超音波送受器にホーンを付加して、機械的Q
を低下させてパルス特性を改善することは容易に実現で
きることではなかった。
On the other hand, when trying to sharpen the directional characteristics by using a horn, a horn is added to a conventional ultrasonic transceiver and the mechanical Q
It has not been easy to improve the pulse characteristics by reducing the

そこで、本発明は、貼り合せ型圧電素子の中心部に振動
板を設け、かつ機械的振動を抑制するように前記振動板
の周囲を弾性ゴム等の弾性材でケースに弾性的に固定す
るとともに、この前方に開口部を設けた薄板およびホー
ンを付加して、尖鋭な指向特性と良好な・パルス特性を
有する超音波送受波器を提供するものである。
Therefore, the present invention provides a diaphragm at the center of a bonded piezoelectric element, and elastically fixes the periphery of the diaphragm to a case with an elastic material such as elastic rubber so as to suppress mechanical vibration. By adding a thin plate with an opening in the front and a horn, an ultrasonic transducer with sharp directional characteristics and good pulse characteristics is provided.

以下、本発明の一実施例を図面にもとづいて説明する。Hereinafter, one embodiment of the present invention will be described based on the drawings.

第3図はこの実施例の断面図である。FIG. 3 is a sectional view of this embodiment.

貼り合せ型圧電素子11の中心部に配した結合軸12に
金属あるいは樹脂より形成された振動板13を取り付け
る。前記振動板13の周辺部は、機械的振動を抑制する
ように円環状に形成された弾性ゴム等の緩衝材2oを介
して、円筒状のケース17の内側面に弾性的に固定され
ている。ケース17の底部には吸音材21が取り付けで
ある。
A diaphragm 13 made of metal or resin is attached to a coupling shaft 12 arranged at the center of the bonded piezoelectric element 11. The peripheral portion of the diaphragm 13 is elastically fixed to the inner surface of the cylindrical case 17 via a cushioning material 2o such as elastic rubber formed in an annular shape so as to suppress mechanical vibrations. . A sound absorbing material 21 is attached to the bottom of the case 17.

振動板13の前方には、結合軸12を通過する直線を中
心にした円状の開口部22と、開口部22と同心円周上
に設けた他の開口部22′を有する薄板23を設置し、
ケース17と薄板23を放物面ホーン24の喉部に嵌入
する。19.19’は貼り合せ型圧電素子11と端子1
6.16’を電気的に接続しているリード線である。
A thin plate 23 is installed in front of the diaphragm 13, and has a circular opening 22 centered on a straight line passing through the coupling shaft 12, and another opening 22' provided on a circumference concentric with the opening 22. ,
The case 17 and the thin plate 23 are fitted into the throat of the parabolic horn 24. 19.19' is the bonded piezoelectric element 11 and terminal 1
This is a lead wire that electrically connects 6.16'.

上記薄板23の開口部22 、22’は、貼り合せ型圧
電素子11の大きさや振動板13の大きさ、緩衝材2o
の内径等により、形状が変化するが、7 ページ その代表的な形状を第4図ないし第16図に示す。
The openings 22 and 22' of the thin plate 23 are determined by the size of the bonded piezoelectric element 11, the size of the diaphragm 13, and the cushioning material 2o.
Although the shape changes depending on the inner diameter of the tube, typical shapes are shown in FIGS. 4 to 16.

いずれの図においても、aは平面図、bは断面図である
In both figures, a is a plan view and b is a sectional view.

次に上記本発明の構造による超音波送受波器のパルス特
性を第17図に示す。これから明らかなパルスの立上り
・立下り時間は、0.3ミリ秒以下を示すようになった
Next, FIG. 17 shows the pulse characteristics of the ultrasonic transducer having the structure of the present invention. It is clear from this that the pulse rise and fall times are less than 0.3 milliseconds.

第番図は上記緩衝材2oの内径を変化させたとき、音圧
半減角、送波感度および立上り時間の変化をそれぞれ示
している。緩衝材2oの内径の洟少に伴ない立上り時間
が減少するが、音圧半減角は少し増大し、送波感度も減
少する。さらに内径を小さくすると、サイドロープも増
大してくる(図示せず)。しだがって緩衝材20の内径
は、貼り合せ型圧電素子11および振動板13の大きさ
や厚さが決まれば、最適値が存在することがわかる。な
お、貼り合せ型圧電素子11の直径は9.1鰭、厚さは
約0.6111、振動板13は底面の直径が17n程度
のコニカル形、ホーン24の直径は約66鰭、薄板23
は第7図のもののときの実験値である。
Figure No. 4 shows changes in the half-decrease angle of sound pressure, wave transmission sensitivity, and rise time when the inner diameter of the buffer material 2o is changed. As the inner diameter of the buffer material 2o decreases, the rise time decreases, but the sound pressure half-reduction angle increases slightly and the wave transmission sensitivity also decreases. If the inner diameter is further reduced, the side ropes will also increase (not shown). Therefore, it can be seen that the inner diameter of the cushioning material 20 has an optimum value once the sizes and thicknesses of the bonded piezoelectric element 11 and the diaphragm 13 are determined. The bonded piezoelectric element 11 has a diameter of 9.1 fins and a thickness of about 0.6111 mm, the diaphragm 13 has a conical shape with a bottom diameter of about 17 nm, and the horn 24 has a diameter of about 66 fins, and the thin plate 23 has a diameter of about 66 fins.
is an experimental value for the one shown in FIG.

第19図は、貼り合せ型圧電素子11の直径が約9.1
闘で、厚さを変化させたとき、音圧半減角、送波感度、
立上り時間および駆動周波数(感度最大になる周波数)
の変化をそれぞれ示している。
In FIG. 19, the diameter of the bonded piezoelectric element 11 is approximately 9.1 mm.
When changing the thickness, the sound pressure half-reduction angle, transmission sensitivity,
Rise time and drive frequency (frequency with maximum sensitivity)
This shows the changes in each.

貼り合せ型圧電素子11の厚さを増大するに伴ない、駆
動周波数が高くなり、音圧半減角が小さくなるが、送波
感度は減少し立上り時間も長くなる。
As the thickness of the bonded piezoelectric element 11 increases, the drive frequency increases and the half-reduction angle of sound pressure decreases, but the wave transmission sensitivity decreases and the rise time also increases.

振動板23の直径を大きくするにつれて送波感度は増大
するが、立上り時間も長くなるので、用途に応じてその
直径を定めればよい。空間的(たとえば上下左右で)均
一な指向性が必要なときは、振動板13はコニカル形、
ラッパ形、おわん形等がよい。
As the diameter of the diaphragm 23 increases, the wave transmission sensitivity increases, but the rise time also increases, so the diameter may be determined depending on the application. When spatially uniform directivity (for example, vertically and horizontally) is required, the diaphragm 13 is of a conical shape,
A trumpet shape, a bowl shape, etc. are good.

第20図+IL)は、振動板13の前方に薄板23を設
置したときの本発明製電の指向特性を示している。同図
(blはその設置前の指向特性を示している。
FIG. 20+IL) shows the directivity characteristics of the electrical production according to the present invention when the thin plate 23 is installed in front of the diaphragm 13. In the figure (bl indicates the directional characteristics before installation).

これから本発明によればサイドロープが大きく減少して
いるのがわかる。空間的にほぼ均一な指向特性が得られ
るようになった。
It can be seen that according to the present invention, the side ropes are greatly reduced. Almost spatially uniform directional characteristics can now be obtained.

9べ−7・ また、ケース17と薄板23を一体化することにより一
゛一層空間的に均一な指向特性が得られるようになった
ばかりでなく、特性のばらつきが減少し、組立てが容易
に々す、量産しやすぐなった。
9B-7・In addition, by integrating the case 17 and the thin plate 23, it is not only possible to obtain even more spatially uniform directivity characteristics, but also the variation in characteristics is reduced, making assembly easier. Mass production is coming soon.

さらに一体形成したケース17と薄板23とを導電性の
ものにしてアースに接続すると耐ノイズ性が向上した。
Furthermore, noise resistance was improved by making the integrally formed case 17 and thin plate 23 conductive and connecting them to ground.

以上のように本発明によれば、尖鋭な指向特性と良好な
パルス特性を有し、短い時間間隔で正確な測定情報を得
ることが可能となった。したがって本発明の超音波送受
波器は、音波を用いた距離計等、尖鋭な指向特性が要求
される超音波応用計測にはきわめて有用なものである。
As described above, according to the present invention, it has sharp directivity characteristics and good pulse characteristics, and it has become possible to obtain accurate measurement information at short time intervals. Therefore, the ultrasonic transducer of the present invention is extremely useful for ultrasonic applied measurements that require sharp directional characteristics, such as distance meters using sound waves.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の超音波送受波器の一例を示す断面図、第
2図はそのパルス特性を示す図である。 第3図は本発明の超音波送受波器の一実施例の断面図、
第4図から第16図まではその薄板の代表例の構造を示
し、それら−の図+IL)は正面図、同(blは断面図
、第17図は本発明の超音波送受波器のパ1゜ ルス特性の一例を示す図、第18図は本発明の超音波送
受波器の緩衝材の内径と音圧半減角、送波感度、立上り
時間との関係を示す図、第19図は同じく貼り合せ型圧
電素子の厚さと音圧半減角、送波感度、立上り時間、駆
動周波数との関係を示す図、第20図は同じく薄板の効
果を示す図である。 11・・・・・・貼り合せ型圧電素子、13・・・・・
・振動板、17・・・・・・ケース、20・・・・・・
緩衝材、21・・・・・・吸音材、22 、22’・・
・・・・開口部、23・・・・・・薄板、24・・・・
・・ホーン。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
図 第2図 第3図 i6 /2’1116” 特開U#58−88:]99’a 第5図 第6図 第7図 第8図 第9図 第10図 第11図 第12図 第13図 第14図 第15図 第17図 −1Cミ対す 第18図 第19図 第20図
FIG. 1 is a sectional view showing an example of a conventional ultrasonic transducer, and FIG. 2 is a diagram showing its pulse characteristics. FIG. 3 is a sectional view of an embodiment of the ultrasonic transducer of the present invention;
FIGS. 4 to 16 show the structure of typical examples of the thin plate, and those (-) are front views, FIG. 17 is a cross-sectional view of the ultrasonic transducer of the present invention. FIG. 18 is a diagram showing an example of the 1° las characteristic, FIG. 18 is a diagram showing the relationship between the inner diameter of the buffer material of the ultrasonic transducer of the present invention, the half-decrease angle of sound pressure, the wave transmission sensitivity, and the rise time. Similarly, FIG. 20 is a diagram showing the relationship between the thickness of the bonded piezoelectric element, sound pressure half angle, wave transmission sensitivity, rise time, and drive frequency, and FIG. 20 is a diagram also showing the effect of the thin plate. 11...・Bonded piezoelectric element, 13...
・Diaphragm, 17... Case, 20...
Cushioning material, 21...Sound absorbing material, 22, 22'...
...Opening, 23...Thin plate, 24...
··Horn. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2 Figure 3 Figure 13 Figure 14 Figure 15 Figure 17 - 1C vs. Figure 18 Figure 19 Figure 20

Claims (1)

【特許請求の範囲】 (1)中心部に振動板を設けた貼り合せ型圧電素子、前
記貼り合せ型圧電素子を封入するケース、前記振動板の
周辺部と前記ケースの内側面とに接触するように携り付
けた緩衝材、前記貼り合せ型圧電素子の前方に設置した
開口部を設けた薄板、および、前記ケースと前記薄板を
封入し固定するホーンを少なくとも有し、前記緩衝材に
より前記振動板を前記ケースに弾性的に固定してなるこ
とを特徴とする超音波送受波器。 (2)貼り合せ型圧電素子が円板形であり、その中心部
に円錐状の振動板を有することを特徴とする特許請求の
範囲第1項記載の超音波送受波器。 (3)  ケースの内部に吸音材を取り付けたことを特
徴とする特許請求の範囲第1項記載の超音波送受波器。 (4)薄板が複数個の開口部を有することを特徴とする
特許請求の範囲第1項記載の超音波送受波器0 (5)中心部と同心円周上に開口部を有する薄板が円板
形であることを特徴とする特許請求の範囲第2項記載の
超音波送受波器。 (6)薄板の開口部に傾斜をつけることを特徴とする特
許請求の範囲第5項記載の超音波送受波器。 (刀 薄板の中心部と周辺部の厚さが異なることを特徴
とする特許請求の範囲第5項記載の超音波送受波器。 斡)薄板とケースを一体形成したことを特徴とする特許
請求の範囲第1項記載の超音波送受波器。 (9)薄板とケースを導電性のものにしてアースに接続
したことを特徴とする特許請求の範囲第1項記載の超音
波送受波器。 (1o)薄板、ケースおよびホーンを一体形成したこと
を特徴とする特許請求の範囲第1項記載の超音波送受波
器。
[Claims] (1) A bonded piezoelectric element with a diaphragm provided in the center, a case enclosing the bonded piezoelectric element, and a periphery of the diaphragm and an inner surface of the case. a thin plate with an opening installed in front of the bonded piezoelectric element; and a horn for enclosing and fixing the case and the thin plate; An ultrasonic transducer characterized in that a diaphragm is elastically fixed to the case. (2) The ultrasonic transducer according to claim 1, wherein the bonded piezoelectric element is disk-shaped and has a conical diaphragm in the center thereof. (3) The ultrasonic transducer according to claim 1, characterized in that a sound absorbing material is attached inside the case. (4) The ultrasonic transducer 0 according to claim 1, wherein the thin plate has a plurality of openings. (5) The thin plate having an opening on a circumference concentric with the center is a disk. 3. The ultrasonic transducer according to claim 2, wherein the ultrasonic transducer has a shape. (6) The ultrasonic transducer according to claim 5, wherein the opening of the thin plate is sloped. (Katana) An ultrasonic transducer according to claim 5, characterized in that the thickness of the thin plate is different from the thickness of the center part and the peripheral part. The ultrasonic transducer according to item 1. (9) The ultrasonic transducer according to claim 1, wherein the thin plate and the case are made conductive and connected to earth. (1o) The ultrasonic transducer according to claim 1, characterized in that the thin plate, the case, and the horn are integrally formed.
JP18755781A 1981-11-17 1981-11-20 Ultrasonic wave transmitter and receiver Granted JPS5888999A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP18755781A JPS5888999A (en) 1981-11-20 1981-11-20 Ultrasonic wave transmitter and receiver
US06/439,549 US4607186A (en) 1981-11-17 1982-11-05 Ultrasonic transducer with a piezoelectric element
DE8282110290T DE3272470D1 (en) 1981-11-17 1982-11-08 Ultrasonic transducer
EP82110290A EP0080100B1 (en) 1981-11-17 1982-11-08 Ultrasonic transducer
CA000415697A CA1202112A (en) 1981-11-17 1982-11-16 Ultrasonic transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18755781A JPS5888999A (en) 1981-11-20 1981-11-20 Ultrasonic wave transmitter and receiver

Publications (2)

Publication Number Publication Date
JPS5888999A true JPS5888999A (en) 1983-05-27
JPS642320B2 JPS642320B2 (en) 1989-01-17

Family

ID=16208156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18755781A Granted JPS5888999A (en) 1981-11-17 1981-11-20 Ultrasonic wave transmitter and receiver

Country Status (1)

Country Link
JP (1) JPS5888999A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60212097A (en) * 1984-04-04 1985-10-24 West Electric Co Ltd Ultrasonic wave transmitter-receiver
JPH069308U (en) * 1992-07-08 1994-02-04 日東工業株式会社 Air conditioner for electronic equipment cabinet

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60212097A (en) * 1984-04-04 1985-10-24 West Electric Co Ltd Ultrasonic wave transmitter-receiver
JPH069308U (en) * 1992-07-08 1994-02-04 日東工業株式会社 Air conditioner for electronic equipment cabinet

Also Published As

Publication number Publication date
JPS642320B2 (en) 1989-01-17

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