JPS5888113U - Optical displacement measuring device - Google Patents
Optical displacement measuring deviceInfo
- Publication number
- JPS5888113U JPS5888113U JP18338681U JP18338681U JPS5888113U JP S5888113 U JPS5888113 U JP S5888113U JP 18338681 U JP18338681 U JP 18338681U JP 18338681 U JP18338681 U JP 18338681U JP S5888113 U JPS5888113 U JP S5888113U
- Authority
- JP
- Japan
- Prior art keywords
- measuring device
- displacement measuring
- optical displacement
- optical
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は光学式変位測定装置の一例を示す構成図、第２
図その動作を説明するための波形図、第３図は測定物体
の変位Ｘと光スポットの変位との関係を示す線図、第４
図は、本考案に係る装置に用いられている光センサアレ
イの構成斜視図、第 ５図は第４図に示す光センサア
レ−イにおいて、光スポットの変位と光センサ素子の位
置との関係を示す線図である。
１・・・・・・光源、２・・・・・・測定物体、４・・
・・・・光センサアレイ、４１．４２，４３．４４・・
・・・・光センサ素子。Figure 1 is a configuration diagram showing an example of an optical displacement measuring device, Figure 2
Figure 3 is a waveform diagram to explain the operation; Figure 3 is a line diagram showing the relationship between displacement X of the measuring object and displacement of the light spot;
The figure is a perspective view of the structure of a photosensor array used in the device according to the present invention, and FIG. 5 shows the relationship between the displacement of the light spot and the position of the photosensor elements in the photosensor array shown in FIG. FIG. 1...Light source, 2...Measurement object, 4...
...Photo sensor array, 41.42, 43.44...
...Optical sensor element.
Claims (1)
される光センサアレイを有し、前記光センサアレイから
得られる信号のピーク位置から測定物体の変位位置を知
るようにした装置において、前記センサアレイ上に配列
する複数個の光センサの配列ピッチを所定関数で変化す
る不等間隔としたことを特徴とする光学式変位測定装置
。In the apparatus, the device has an optical sensor array that projects a light spot at a position corresponding to a displacement position of the measurement object, and the displacement position of the measurement object is known from the peak position of a signal obtained from the optical sensor array. An optical displacement measuring device characterized in that the arrangement pitch of a plurality of optical sensors arranged on an array is set at unequal intervals that vary according to a predetermined function.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18338681U JPS5888113U (en) | 1981-12-09 | 1981-12-09 | Optical displacement measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18338681U JPS5888113U (en) | 1981-12-09 | 1981-12-09 | Optical displacement measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5888113U true JPS5888113U (en) | 1983-06-15 |
Family
ID=29982599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18338681U Pending JPS5888113U (en) | 1981-12-09 | 1981-12-09 | Optical displacement measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5888113U (en) |
-
1981
- 1981-12-09 JP JP18338681U patent/JPS5888113U/en active Pending
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