JPS5887530A - 規則性パタ−ンの欠陥検査装置 - Google Patents

規則性パタ−ンの欠陥検査装置

Info

Publication number
JPS5887530A
JPS5887530A JP56186738A JP18673881A JPS5887530A JP S5887530 A JPS5887530 A JP S5887530A JP 56186738 A JP56186738 A JP 56186738A JP 18673881 A JP18673881 A JP 18673881A JP S5887530 A JPS5887530 A JP S5887530A
Authority
JP
Japan
Prior art keywords
pattern
defect
array
photodetector
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56186738A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6410043B2 (enrdf_load_stackoverflow
Inventor
Shunsuke Mukasa
武笠　俊介
Kennosuke Sugizaki
杉崎　堅之助
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP56186738A priority Critical patent/JPS5887530A/ja
Publication of JPS5887530A publication Critical patent/JPS5887530A/ja
Publication of JPS6410043B2 publication Critical patent/JPS6410043B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP56186738A 1981-11-20 1981-11-20 規則性パタ−ンの欠陥検査装置 Granted JPS5887530A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56186738A JPS5887530A (ja) 1981-11-20 1981-11-20 規則性パタ−ンの欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56186738A JPS5887530A (ja) 1981-11-20 1981-11-20 規則性パタ−ンの欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS5887530A true JPS5887530A (ja) 1983-05-25
JPS6410043B2 JPS6410043B2 (enrdf_load_stackoverflow) 1989-02-21

Family

ID=16193779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56186738A Granted JPS5887530A (ja) 1981-11-20 1981-11-20 規則性パタ−ンの欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS5887530A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61179040U (enrdf_load_stackoverflow) * 1985-04-26 1986-11-08
JPH01158308A (ja) * 1987-06-08 1989-06-21 Insyst Inc 欠陥検査方法及び装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61179040U (enrdf_load_stackoverflow) * 1985-04-26 1986-11-08
JPH01158308A (ja) * 1987-06-08 1989-06-21 Insyst Inc 欠陥検査方法及び装置

Also Published As

Publication number Publication date
JPS6410043B2 (enrdf_load_stackoverflow) 1989-02-21

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