JPS5886506U

JPS5886506U - Capacitive film thickness meter

Info

Publication number: JPS5886506U
Application number: JP18176081U
Authority: JP
Inventors: 滝口　英雄; 高浜　禎造
Original assignee: 富士電機株式会社
Priority date: 1981-12-08
Filing date: 1981-12-08
Publication date: 1983-06-11

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１Ａ図は静電容量式膜厚計の従来例を示す平゛面図、
第１Ｂ図は第１Ａ図の線Ａ−Ａ’に沿う断面図、第２図
は実際に製作され、実験に供された膜厚計を示す平面図
、第３図は第２図の膜厚計による実験結果を示すグラフ
、第４図は吸着機構を用いてフィルムを吸着した状態を
示す説明図、第５Ａ図はこの考案の実施例を示す平面図
、第５Ｂ図は第５Ａ図の線Ａ−Ａ’に沿う断面図、第６
図はこの考案による膜厚計において吸着機構を用いてフ
ィルムを吸着した状態を示す説明図、第７Ａ図はこの考
案の他の実施例を示す平面図、第７Ｂ図はその断面図で
ある。符号説明、１・・・フィルム、２ａ、２ｂ・・・電極、
２ａ′、２ｂ′・・・引き出し電極、３・・・絶縁体、
Ｍ・・・膜厚計、Ｆ・・・吸着機構、ｖ、　ｖ’・・・
負圧、Ｈ・・・吸着口、ＴＨ・・・スルーホール。Figure 1A is a top view showing a conventional example of a capacitive film thickness meter;
Figure 1B is a cross-sectional view taken along line A-A' in Figure 1A, Figure 2 is a plan view showing the film thickness meter that was actually manufactured and used in the experiment, and Figure 3 is the film thickness shown in Figure 2. Fig. 4 is an explanatory diagram showing the state in which the film is adsorbed using the adsorption mechanism, Fig. 5A is a plan view showing an embodiment of this invention, and Fig. 5B is the line of Fig. 5A. Sectional view along A-A', No. 6
The figure is an explanatory diagram showing a state in which a film is sucked using the suction mechanism in the film thickness meter according to this invention, FIG. 7A is a plan view showing another embodiment of this invention, and FIG. 7B is a sectional view thereof. Explanation of symbols, 1... Film, 2a, 2b... Electrode,
2a', 2b'... Extraction electrode, 3... Insulator,
M...Film thickness meter, F...Adsorption mechanism, v, v'...
Negative pressure, H... suction port, TH... through hole.

Claims

[Scope of utility model registration request]

comprising a counter electrode held by an insulator and forming a capacitor, and a pair of extraction electrodes for respectively deriving the output from each electrode, one side of a measurement film made of a dielectric is brought into contact with the counter electrode, The capacitance type film thickness meter measures the film thickness of the film from a capacitance change of the capacitor detected through the pair of lead-out electrodes at the time of contact, the capacitance-type film thickness meter measuring the thickness of the film from the capacitance change detected through the pair of lead-out electrodes. A capacitive film thickness meter characterized in that contact surfaces of the extraction electrodes with the film are formed so as to form the same plane S.