JPS5885344U - Carrier for semiconductor substrate - Google Patents
Carrier for semiconductor substrateInfo
- Publication number
- JPS5885344U JPS5885344U JP18038781U JP18038781U JPS5885344U JP S5885344 U JPS5885344 U JP S5885344U JP 18038781 U JP18038781 U JP 18038781U JP 18038781 U JP18038781 U JP 18038781U JP S5885344 U JPS5885344 U JP S5885344U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- semiconductor substrate
- locations
- screw
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例の斜視図、第２図は、第１図
のＸ−Ｘ部の断面図である。
尚、各図において、１・・・・・・キャリア、２・・・
・・・アジャスター、３・・・・・・止めネジ、４・・
・−・・・ステージである。FIG. 1 is a perspective view of an embodiment of the present invention, and FIG. 2 is a sectional view taken along line XX in FIG. In each figure, 1...carrier, 2...
... Adjuster, 3... Set screw, 4...
...It's a stage.
Claims (1)
ャリアにおいて、前記キャリア下部の少なくとも３ケ所
以上にスクリュー形状部材によるアジャスターが具備さ
れていることを特徴とする半導体基板用キャリア。What is claimed is: 1. A carrier for storing semiconductor substrates used in a semiconductor substrate manufacturing apparatus, characterized in that adjusters made of screw-shaped members are provided at at least three locations in the lower part of the carrier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18038781U JPS5885344U (en) | 1981-12-03 | 1981-12-03 | Carrier for semiconductor substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18038781U JPS5885344U (en) | 1981-12-03 | 1981-12-03 | Carrier for semiconductor substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5885344U true JPS5885344U (en) | 1983-06-09 |
Family
ID=29976934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18038781U Pending JPS5885344U (en) | 1981-12-03 | 1981-12-03 | Carrier for semiconductor substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5885344U (en) |
-
1981
- 1981-12-03 JP JP18038781U patent/JPS5885344U/en active Pending
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