JPS5882843U - 標準ガス発生装置 - Google Patents

標準ガス発生装置

Info

Publication number
JPS5882843U
JPS5882843U JP17417581U JP17417581U JPS5882843U JP S5882843 U JPS5882843 U JP S5882843U JP 17417581 U JP17417581 U JP 17417581U JP 17417581 U JP17417581 U JP 17417581U JP S5882843 U JPS5882843 U JP S5882843U
Authority
JP
Japan
Prior art keywords
flow rate
raw material
gas
adjustment valve
material gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17417581U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6321318Y2 (OSRAM
Inventor
隆 小松
Original Assignee
株式会社ガステツク
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社ガステツク filed Critical 株式会社ガステツク
Priority to JP17417581U priority Critical patent/JPS5882843U/ja
Publication of JPS5882843U publication Critical patent/JPS5882843U/ja
Application granted granted Critical
Publication of JPS6321318Y2 publication Critical patent/JPS6321318Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP17417581U 1981-11-25 1981-11-25 標準ガス発生装置 Granted JPS5882843U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17417581U JPS5882843U (ja) 1981-11-25 1981-11-25 標準ガス発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17417581U JPS5882843U (ja) 1981-11-25 1981-11-25 標準ガス発生装置

Publications (2)

Publication Number Publication Date
JPS5882843U true JPS5882843U (ja) 1983-06-04
JPS6321318Y2 JPS6321318Y2 (OSRAM) 1988-06-13

Family

ID=29966137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17417581U Granted JPS5882843U (ja) 1981-11-25 1981-11-25 標準ガス発生装置

Country Status (1)

Country Link
JP (1) JPS5882843U (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021067561A (ja) * 2019-10-24 2021-04-30 株式会社島津製作所 ガス発生装置およびガス発生方法
JP2022074256A (ja) * 2020-11-04 2022-05-18 理研計器株式会社 溶剤気化装置および溶剤気化方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004309497A (ja) * 2004-06-04 2004-11-04 Nippon Api Corp 標準ガス発生用液体試料容器及び標準ガス発生装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5317385A (en) * 1976-07-31 1978-02-17 Agency Of Ind Science & Technol Preparation of standard gas
JPS54128974A (en) * 1978-03-31 1979-10-05 Yokogawa Electric Works Ltd Standard gas generator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5317385A (en) * 1976-07-31 1978-02-17 Agency Of Ind Science & Technol Preparation of standard gas
JPS54128974A (en) * 1978-03-31 1979-10-05 Yokogawa Electric Works Ltd Standard gas generator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021067561A (ja) * 2019-10-24 2021-04-30 株式会社島津製作所 ガス発生装置およびガス発生方法
JP2022074256A (ja) * 2020-11-04 2022-05-18 理研計器株式会社 溶剤気化装置および溶剤気化方法

Also Published As

Publication number Publication date
JPS6321318Y2 (OSRAM) 1988-06-13

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