JPS58743A - Flaw inspecting device - Google Patents

Flaw inspecting device

Info

Publication number
JPS58743A
JPS58743A JP9832781A JP9832781A JPS58743A JP S58743 A JPS58743 A JP S58743A JP 9832781 A JP9832781 A JP 9832781A JP 9832781 A JP9832781 A JP 9832781A JP S58743 A JPS58743 A JP S58743A
Authority
JP
Japan
Prior art keywords
flaw
circuit
output
rotation
cylindrical object
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9832781A
Other languages
Japanese (ja)
Other versions
JPS6355653B2 (en
Inventor
Kunihiko Edamatsu
枝松 邦彦
Kazue Shimizu
清水 和衛
Tetsuji Kawasaki
哲治 川崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Manufacturing Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP9832781A priority Critical patent/JPS58743A/en
Publication of JPS58743A publication Critical patent/JPS58743A/en
Publication of JPS6355653B2 publication Critical patent/JPS6355653B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To prevent from hasted misjudge that assuming a defective product as a nondefective one, when a body to be inspected is not rotated, by providing a circuit for detecting a rotation in addition to a flaw detecting circuit of the body to be inspected which is rotated and shifted, and executing a decision in accordance with a result of detection by both the circuits. CONSTITUTION:A cylindrical body 4 such as a medicine capsule, etc. is rotated and driven by a rotary roller 5, is illuminated by illuminating devices 2, 3, a reflected ray is photodetected by a photoelectric sensor 1, is converted to an electric signal, and is inputted to a flaw detecting circuit 7 and a rotation detecting circuit 8. The circuit 7 detects whether a flaw exists or not, the circuit 8 detects whether a rotation exists or not, and said each result is inputted to an overall deciding circuit 9. The circuit 9 decides an output of the flaw detecting circuit 7 as effective only wnen a rotation exists, and decides it as a defective when both a rotation and a flaw exist. Therefore, since a part having a flaw is not photodetected when a body to be inspected is not rotated, it is prevented from heated misjudge that assuming a defective product as a non-defective unit.

Description

【発明の詳細な説明】 この発明は、例えば薬剤カプセルの如き円筒物体を光学
的にヘリカルスキヤンして傷の有無を検査する傷検査装
置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a flaw inspection device that optically performs a helical scan on a cylindrical object such as a drug capsule to inspect the presence or absence of flaws.

第1図(1)は正常に動作している従来の傷検査装置を
示す斜視図である。同図において、被検査物体である円
筒物体4は、矢印B方向に回転する回転ロー?5により
回転駆動されながら矢印入方向に送られているものとす
る。一方、円筒物体4に対して照明装置2.3より光が
照射されており、円筒物体4上の成る一点からの反射波
が光電センtlK入力し、そこで電気信号に変換される
。すなわち光電センサlから得られる出力信号は、円筒
物体40周辺をヘリカルスキャンした結果得られた信号
であると云える。
FIG. 1 (1) is a perspective view showing a conventional flaw inspection device operating normally. In the figure, a cylindrical object 4, which is an object to be inspected, is a rotary rotor rotating in the direction of arrow B. 5 and is being sent in the direction indicated by the arrow while being rotationally driven. On the other hand, the cylindrical object 4 is irradiated with light from the illumination device 2.3, and a reflected wave from one point on the cylindrical object 4 is input to the photoelectric center tlK, where it is converted into an electrical signal. That is, it can be said that the output signal obtained from the photoelectric sensor 1 is a signal obtained as a result of helical scanning around the cylindrical object 40.

このよ5Kして光電センf1から得られる出力信号の波
形は、円筒物体40周辺に例えばピンホールのよ5な傷
Pがあったとすると、その部分からの反射光量は他の正
常部分からの反射光量に比して非常に少なくなるので、
第1wA(b)K示す如くなる。すなわち第1図〜)K
おける変化点P′が円筒物体4の傷PK起因する出力変
化を示している。
The waveform of the output signal obtained from the photoelectric sensor f1 after 5K is as follows: If there is a flaw P such as a pinhole around the cylindrical object 40, the amount of light reflected from that part will be the same as the amount of light reflected from other normal parts. Since it is very small compared to the amount of light,
The first wA(b)K becomes as shown. In other words, Fig. 1~)K
A change point P' in FIG. 1 indicates an output change caused by the flaw PK on the cylindrical object 4.

そこで光電セン+1からの出力信号を微分すると、第1
図(C) K示す出力波形が得られ、傷PK対応する信
号変化P′の検出が容易となる。円筒物体40周辺に傷
がなければ、このような信号変化P′は検出されないか
ら、肯該円筒物体は傷のないJ1品と判定される。
Therefore, if we differentiate the output signal from photoelectric sensor +1, we find that the first
An output waveform shown in Figure (C) K is obtained, making it easy to detect the signal change P' corresponding to the flaw PK. If there are no scratches around the cylindrical object 40, such a signal change P' will not be detected, so that the cylindrical object is determined to be a J1 product without any scratches.

所が従来の傷検査装置において、円筒物体を駆動するは
ずの回転ローラ5が、第2図(1)において示すように
、故障のため回転しないか、或いは円筒物体4が異形状
のため回転しない場合には、円筒物体4が矢印入方向に
通過しても、円筒物体の周辺をヘリカルスキャンして全
面検査したことにはならない。
However, in conventional flaw inspection devices, the rotating roller 5 that is supposed to drive the cylindrical object does not rotate due to a malfunction, or the cylindrical object 4 does not rotate because it has an irregular shape, as shown in FIG. 2 (1). In this case, even if the cylindrical object 4 passes in the direction indicated by the arrow, the entire area around the cylindrical object is not inspected by helical scanning.

しかじ光電センサ1の出力信号は第2図(b)に示す如
く異常の見られない平坦な波形となり、従ってその微分
出力も第2図(C) K示す如く信号変化を含まないか
ら、m#円筒物体の周辺を全面検査したわけでもないの
罠、尚諌円筒物体を嵐品と判定してしまう恐れが従来の
傷検査装置にはあった。
However, the output signal of the photoelectric sensor 1 has a flat waveform with no abnormality as shown in FIG. 2(b), and therefore its differential output does not include any signal change as shown in FIG. # The trap of not fully inspecting the periphery of the cylindrical object is that there is a risk that the cylindrical object may be determined to be a defective item with conventional flaw inspection equipment.

この発明は、上述の如き従来の傷検査装置の欠点を除去
するため罠なされたものであり、従ってこの発明の目的
は、回転ローラが回転していないにもかかわらず、被検
査物体である円筒物体を良品と速断することのないよう
Kした傷検査装置を提供することにある。
The present invention has been made to eliminate the drawbacks of the conventional flaw inspection apparatus as described above, and therefore, an object of the present invention is to remove the cylindrical flaw inspection device, which is an object to be inspected, even though the rotating roller is not rotating. To provide a flaw inspection device that does not quickly judge objects as non-defective.

この発明の構成の要点は、被検査物体の傷の有−を検出
する回路のほか、被検査物体の回転の有無を検出する一
路を備え、両崗路の検出結果により被検査物体の良否の
判定を行なう構成とした点にある。
The main point of the configuration of the present invention is that in addition to a circuit for detecting the presence of flaws on the object to be inspected, a circuit for detecting the presence or absence of rotation of the object to be inspected is provided, and the detection results of both sides are used to determine whether the object to be inspected is good or bad. The point is that the structure is configured to perform the determination.

次に図を参照してこの発明の一実施例を説明する。Next, an embodiment of the present invention will be described with reference to the drawings.

第3図はこの発明の一実施例を示すブロック図である。FIG. 3 is a block diagram showing one embodiment of the present invention.

同図において、6は信号増幅用アンプ、7は傷検知回路
、8は回転検知回路、9は総合判定囲路、10は不嵐品
排出部、であり、その他、第11m!、第2HKおける
のと同じi号は同一・物を指す。
In the figure, 6 is a signal amplification amplifier, 7 is a flaw detection circuit, 8 is a rotation detection circuit, 9 is a general judgment enclosure, 10 is a defective product discharge section, and 11th m! , the same i as in the 2nd HK refers to the same thing.

第3図において、被検査物体である円筒物体4は回転ロ
ーラ5によって回転させられながら進む。
In FIG. 3, a cylindrical object 4, which is an object to be inspected, advances while being rotated by a rotating roller 5. As shown in FIG.

円筒物体4は照明装置2,3により照明され、その照明
された個所の明るさの変化な光電センす1によって電気
信号に変換する。この光電センサ1の出力を信号増幅用
アンプ6において増幅し、傷検知回路7と回転検知回路
8に入力する。傷検知回路7は傷の有無を検知してその
llI果を鱒倉判定回路9に出力し、回転検知回路8は
円筒物体40回転の有無を検知してその結果を総会判定
回路9に出力する。Il会判定回路9では、回転検知回
路6からの出力が「回転有」の場合のみ、傷検知回路7
の出力を有効と判晰し、「回転有」で「傷有」の場合に
は不jLI&排出部10へ指令を発してIA咳円筒物体
を不棗品として排出させる。
A cylindrical object 4 is illuminated by illumination devices 2 and 3, and a photoelectric sensor 1 converts changes in brightness at the illuminated area into electrical signals. The output of this photoelectric sensor 1 is amplified by a signal amplification amplifier 6 and inputted to a flaw detection circuit 7 and a rotation detection circuit 8. The flaw detection circuit 7 detects the presence or absence of flaws and outputs the result to the mass storage determination circuit 9, and the rotation detection circuit 8 detects the presence or absence of 40 rotations of the cylindrical object and outputs the result to the general assembly determination circuit 9. . In the Il meeting determination circuit 9, the flaw detection circuit 7 is activated only when the output from the rotation detection circuit 6 is "rotation present".
If the output is "rotated" and "damaged", a command is issued to the LI&discharge unit 10 to discharge the IA cough cylindrical object as a defective product.

第41mは傷検知回路7の構成例を示す回路図、jIs
図は第4図における条部信号のタイ建ングチャート、で
ある。
No. 41m is a circuit diagram showing a configuration example of the flaw detection circuit 7, jIs
The figure is a tie-setting chart of the strip signal in FIG. 4.

第4図において、11は微分器、12.13はそれぞれ
比較器、14は例えば単安定マルチバイブレータの如き
タイff−,15はカウンタ、16はディジタル比較器
、である。
In FIG. 4, 11 is a differentiator, 12 and 13 are comparators, 14 is a tie such as a monostable multivibrator, 15 is a counter, and 16 is a digital comparator.

第4図、第5図を参照して動作を説明する。光電センす
から増幅用アンプを介して送られてくる出力信号■は微
分器11に入力されて微分される。
The operation will be explained with reference to FIGS. 4 and 5. The output signal (2) sent from the photoelectric sensor via the amplification amplifier is input to the differentiator 11 and differentiated.

出力信号■に、[5図において見られるように、傷信号
が含まれていると、その微分出力@は、同じく第5図に
示される如き波形となる。この微分出力@を比較器13
において成る基準電圧T’)−11と比較して2値化す
ると、インバータIを介して、第5図に示す如き立上り
信号θが得られる。他方、微分出力@を比較器12にお
いて他の基準電圧TH!と比較して2値化すると、第5
図に示す如き立下り信号Oが得られる。更にこの立下り
信号Oの立下りエツジで、例えば単安定マルチパイブレ
ー貞から成るタイマー14を動作させると、第5図に示
す如きタイマー出力のが得られる。このタイマー出力の
と立上り信号θの論理積をアンドゲートAから出力する
と、これが第5図に見られる如き傷検知信号θであり、
カウンタ15に入力される、つまり円#愉体に、ピンホ
ールのような傷があると、その個所からは光の反射量が
少なくなるので光電センサの出力が変化するから、この
変化を傷検知回路で検出しているわけである。
If the output signal ■ contains a flaw signal as seen in FIG. 5, its differential output @ will have a waveform as shown in FIG. This differential output @ is sent to the comparator 13
When compared with a reference voltage T')-11 consisting of , and binarized, a rising signal θ as shown in FIG. 5 is obtained via an inverter I. On the other hand, the differential output @ is applied to another reference voltage TH! in the comparator 12. When compared and binarized, the fifth
A falling signal O as shown in the figure is obtained. Furthermore, when a timer 14 made of, for example, a monostable multi-wavelength circuit is operated at the falling edge of the falling signal O, a timer output as shown in FIG. 5 is obtained. When the logical product of this timer output and the rising signal θ is output from the AND gate A, this is the flaw detection signal θ as shown in FIG.
If there is a scratch such as a pinhole on the circle input to the counter 15, the amount of light reflected from that spot will decrease and the output of the photoelectric sensor will change, so this change can be detected as a scratch. It is detected by the circuit.

この傷知信号θをカウンタ15でカウントし、そのカウ
ント結果をディジタル比較器111において成る基準値
と比較し、基準値を越えていれば傷有と判定し、越えて
いなければ偏熱と判定し、その結果を出力する。
This flaw detection signal θ is counted by a counter 15, and the count result is compared with a reference value formed by a digital comparator 111. If it exceeds the reference value, it is determined that there is a flaw, and if it does not exceed the reference value, it is determined that there is an uneven heat. , output the result.

第6図は翻転検知回路8の構成例を示す回路図、111
710は第611における各部信号のタイミングチャー
ト、である。
FIG. 6 is a circuit diagram showing an example of the configuration of the reversal detection circuit 8, 111
710 is a timing chart of each part signal in the 611th part.

禦6図において、17は微分器、18は比較器、19は
単安定マルチバイブレータの如きタイマー、2・はカウ
ンタ、21はディジタル比I!器、である。
In Figure 6, 17 is a differentiator, 18 is a comparator, 19 is a timer such as a monostable multivibrator, 2 is a counter, and 21 is a digital ratio I! It is a vessel.

第6図、第7図を参照して動作を説明する。充電セン量
から増幅用アンプを介して送られてくる出力信号のは微
分i117に入力されて微分される。
The operation will be explained with reference to FIGS. 6 and 7. The output signal sent from the charge sensor amount via the amplification amplifier is input to the differential i117 and differentiated.

この微分出力@は、第7図に見られるように、円筒物体
の側転によるゆらrK起因して1円筒物体の回転周波数
に応じたレベル変動を含んでいる。
As seen in FIG. 7, this differential output @ includes level fluctuations depending on the rotational frequency of one cylindrical object due to the sway rK due to cartwheeling of the cylindrical object.

この微分出力@を比較器18において成る基準値VTH
と比較して2値化すると、インバータIを介して第7図
に示す如き比較器出力θが得られる。
This differential output @ is converted into a reference value VTH by the comparator 18.
When compared with and binarized, a comparator output θ as shown in FIG. 7 is obtained via an inverter I.

この比IIRII出力θは、円筒体の回転周波数に応じ
た繰り返し周波数をもつパルス列信号となる。比較器出
力θの各パルスの立下りエツジで、例えばモノTルチバ
イブレータからなるタイマー19を動作させると、第7
図に示す如きタイマー出力@が得られる。タイマー出力
Oと比較器出力θの論理積出力をアンドゲートAから出
力し、カウンタ20への入力のを第7mK示す如く得る
。カウンタ20ではこの人力信号をカウントし、カウン
ト結果はディジタル比較1121において成る基準値と
比較され、基準値を越えていれば円筒物体の回転有、越
えていなければ回転無と判定し、判定結果が出力される
This ratio IIRII output θ becomes a pulse train signal having a repetition frequency corresponding to the rotational frequency of the cylinder. When a timer 19 consisting of, for example, a mono T multivibrator is operated at the falling edge of each pulse of the comparator output θ, the seventh
A timer output @ as shown in the figure is obtained. The logical AND output of the timer output O and the comparator output θ is output from the AND gate A, and the input to the counter 20 is obtained as shown in the 7th mK. The counter 20 counts this human power signal, and the count result is compared with a reference value formed by a digital comparison 1121. If the reference value is exceeded, it is determined that the cylindrical object is rotating, and if it is not, it is determined that there is no rotation. Output.

以上説明したように1本発llKよる傷検査装置におい
ては、円筒体の傷検知と回転検知を行ない、傷を検出せ
ず回転検知した場合のみ被検査物体を嵐晶と判定する。
As explained above, in the flaw inspection device using a single shot, flaw detection and rotation detection are performed on the cylindrical body, and only when no flaw is detected and rotation is detected, the object to be inspected is determined to be storm crystal.

それ以外は不良であると判定し、不良品排出部10で不
良側へ排出する。
Others are determined to be defective and are discharged to the defective side by the defective article discharging section 10.

この発明によれば、傷検知回路に回転検知回路を組み合
わせた構成としたために1正常に回転しない円筒物体は
、不良であると判定できるようになった。つまり、円筒
物体がつぶれてうまく回転しない時でも回転検知回路で
回転を検知できないので不良と判定できる。
According to this invention, since the rotation detection circuit is combined with the flaw detection circuit, a cylindrical object that does not rotate normally can be determined to be defective. In other words, even if the cylindrical object is crushed and does not rotate properly, the rotation detection circuit cannot detect the rotation, so it can be determined that the object is defective.

今までの説明は、反射光センサを用いて不透明な物質か
ら成る円筒物体を検査する場合について述べたが、遣嘴
な物質から成る円筒物体でも岡じよ5に検査できる。透
明な円筒物体の場合は、傷検知回路の構成が着干異なり
、立上り信号でタイマーを作動してゲート信号を作り、
立下り信号との論理積で傷検知信号をつくる。つまり透
明な円筒物体に大がおいていると穴のふちでのみ光が反
射してきてこの信号をつかまえることになる。また、透
過光センサでも同じような考え方で検査性能を上げるこ
とができる。
The explanation so far has been about the case where a cylindrical object made of an opaque material is inspected using a reflected light sensor, but a cylindrical object made of a transparent material can also be inspected with ease. In the case of a transparent cylindrical object, the structure of the flaw detection circuit is quite different, and the rising signal activates a timer to create a gate signal.
A flaw detection signal is created by ANDing with the falling signal. In other words, if a large object is placed in a transparent cylindrical object, the light will be reflected only at the edge of the hole, and this signal will be captured. Inspection performance of transmitted light sensors can also be improved using a similar approach.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(及)は正常に動作している従来の傷検査装置を
示す斜視図、同図(b)は同図(りKおける光電センサ
の出力波形図、同図(C)は同出力波形の微分波形図、
露2図(Jl)は回転ローラが停止した場合の従来の傷
検査装置を示す斜視図、第2図(b)は第2図(1)K
おける光電センサの出力波形図、第2図(C)は同出力
波形の微分波形図、第3図はこの発明の一実施例を示す
ブロック図、第4図は第3図における傷検知回路7の構
成例を示す回路図、第5図は第4図における各部償号の
タイミングチャート、第6図は嬉3図における回転検知
回路8の構成例を示す回路図、第7図は第6図における
各部信号のタイミングチャート、である。 符号説明 1・・・光電センす、2,3・・・照明装置、4・・・
円筒物体、5・・・回転ローラ、6・・・信号増幅用ア
ンプ、7・・・傷検知回路、8・・・回転検知回路、9
・・・総会判定回路、10・・・不良品排出部、11,
17°°“微分器、12,13.18・・・比@5.1
4.19・・・りイマー、15,20・・・カウンタ、
1.6 、21・・・ディジタル比較器 代理人 弁理士 並 木 昭 夫 代理人 弁理士 根 崎   清 第1図 ((1) (b) ρ′ (C) 第2図 (G) (b) (C)
Figure 1 (and) is a perspective view showing a conventional flaw inspection device operating normally, Figure 1 (b) is an output waveform diagram of the photoelectric sensor in Figure 1 (C), and Figure 1 (C) is the same output waveform. Differential waveform diagram of the waveform,
Figure 2 (Jl) is a perspective view showing the conventional flaw inspection device when the rotating roller has stopped, and Figure 2 (b) is Figure 2 (1) K.
2(C) is a differential waveform diagram of the output waveform, FIG. 3 is a block diagram showing an embodiment of the present invention, and FIG. 4 is a flaw detection circuit 7 in FIG. 3. 5 is a timing chart of each component in FIG. 4, FIG. 6 is a circuit diagram showing an example of the configuration of the rotation detection circuit 8 in Figure 3, and FIG. 2 is a timing chart of various signals in FIG. Code explanation 1... Photoelectric sensor, 2, 3... Lighting device, 4...
Cylindrical object, 5... Rotating roller, 6... Signal amplification amplifier, 7... Flaw detection circuit, 8... Rotation detection circuit, 9
... General meeting judgment circuit, 10 ... Defective product discharge section, 11,
17°°“Differentiator, 12, 13.18...Ratio @5.1
4.19... timer, 15,20... counter,
1.6, 21... Digital comparator representative Patent attorney Akio Namiki Patent attorney Kiyoshi Nezaki Figure 1 ((1) (b) ρ' (C) Figure 2 (G) (b) (C)

Claims (1)

【特許請求の範囲】[Claims] 1)回転しながら送られる円筒物体に光を照射すること
Kより皺物体**をヘリカルスキャンし、その反射光な
光電センサにより電気信号に変換して出力し、該出力液
形を処理することによって前記円筒物体表両の傷の有無
を判定する傷検査装置であって、センナ出力を微分する
微分回路と、微分出力を第4および第2の各しきい値に
よりスライスして得られる第1および第2の出力の連続
発生タイオングから傷の有無を検出する第1の検出回路
と、前記微分出力を第3のし館い値によりスライスして
得られる第3の出力におけるパルス列の周期性から円筒
物体の回転の有無を検出する第2の検出回路とを有して
成り、前記第1の検出回路により傷を検出せず、第2の
検出回路により回転有を検出したときのみ、円筒物体を
東品と判定するようにしたことを特徴とする傷検査装置
1) Irradiating light onto a cylindrical object that is being sent while rotating Helically scans the wrinkled object** from K, converts the reflected light into an electrical signal using a photoelectric sensor, and outputs it, and processes the output liquid form. The flaw inspection device determines the presence or absence of flaws on both surfaces of the cylindrical object by: a differentiation circuit that differentiates the senna output; and a first detection circuit that detects the presence or absence of a flaw from the continuously generated tie-on of the second output, and from the periodicity of the pulse train in the third output obtained by slicing the differential output by a third threshold value. and a second detection circuit for detecting the presence or absence of rotation of the cylindrical object, and only when the first detection circuit does not detect a flaw and the second detection circuit detects rotation, the cylindrical object is detected. A flaw inspection device characterized in that it determines that it is Tohin.
JP9832781A 1981-06-26 1981-06-26 Flaw inspecting device Granted JPS58743A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9832781A JPS58743A (en) 1981-06-26 1981-06-26 Flaw inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9832781A JPS58743A (en) 1981-06-26 1981-06-26 Flaw inspecting device

Publications (2)

Publication Number Publication Date
JPS58743A true JPS58743A (en) 1983-01-05
JPS6355653B2 JPS6355653B2 (en) 1988-11-04

Family

ID=14216803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9832781A Granted JPS58743A (en) 1981-06-26 1981-06-26 Flaw inspecting device

Country Status (1)

Country Link
JP (1) JPS58743A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59226974A (en) * 1983-06-09 1984-12-20 Fuji Electric Co Ltd Inspecting device for external appearance

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59226974A (en) * 1983-06-09 1984-12-20 Fuji Electric Co Ltd Inspecting device for external appearance
JPH0145024B2 (en) * 1983-06-09 1989-10-02 Fuji Electric Co Ltd

Also Published As

Publication number Publication date
JPS6355653B2 (en) 1988-11-04

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