JPS5873948A - イオン銃 - Google Patents

イオン銃

Info

Publication number
JPS5873948A
JPS5873948A JP56171190A JP17119081A JPS5873948A JP S5873948 A JPS5873948 A JP S5873948A JP 56171190 A JP56171190 A JP 56171190A JP 17119081 A JP17119081 A JP 17119081A JP S5873948 A JPS5873948 A JP S5873948A
Authority
JP
Japan
Prior art keywords
ampoule
ion gun
moving
needle
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56171190A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6331889B2 (enExample
Inventor
Ryuzo Aihara
相原　龍三
Norimichi Anazawa
穴沢　紀道
Masahiko Okunuki
昌彦 奥貫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP56171190A priority Critical patent/JPS5873948A/ja
Publication of JPS5873948A publication Critical patent/JPS5873948A/ja
Publication of JPS6331889B2 publication Critical patent/JPS6331889B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP56171190A 1981-10-26 1981-10-26 イオン銃 Granted JPS5873948A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56171190A JPS5873948A (ja) 1981-10-26 1981-10-26 イオン銃

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56171190A JPS5873948A (ja) 1981-10-26 1981-10-26 イオン銃

Publications (2)

Publication Number Publication Date
JPS5873948A true JPS5873948A (ja) 1983-05-04
JPS6331889B2 JPS6331889B2 (enExample) 1988-06-27

Family

ID=15918670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56171190A Granted JPS5873948A (ja) 1981-10-26 1981-10-26 イオン銃

Country Status (1)

Country Link
JP (1) JPS5873948A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63502384A (ja) * 1986-04-09 1988-09-08 エアー・プロダクツ・アンド・ケミカルズ・インコーポレーテッド エバポレータ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS581952A (ja) * 1981-06-02 1983-01-07 イオン　ビーム　システムズ　リミテッド イオン源の金属蒸気供給装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS581952A (ja) * 1981-06-02 1983-01-07 イオン　ビーム　システムズ　リミテッド イオン源の金属蒸気供給装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63502384A (ja) * 1986-04-09 1988-09-08 エアー・プロダクツ・アンド・ケミカルズ・インコーポレーテッド エバポレータ

Also Published As

Publication number Publication date
JPS6331889B2 (enExample) 1988-06-27

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