JPS5872923A - Liquid crystal display element - Google Patents

Liquid crystal display element

Info

Publication number
JPS5872923A
JPS5872923A JP56171406A JP17140681A JPS5872923A JP S5872923 A JPS5872923 A JP S5872923A JP 56171406 A JP56171406 A JP 56171406A JP 17140681 A JP17140681 A JP 17140681A JP S5872923 A JPS5872923 A JP S5872923A
Authority
JP
Japan
Prior art keywords
liquid crystal
film
alkyl group
chain alkyl
long
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56171406A
Other languages
Japanese (ja)
Inventor
Hiroaki Miwa
広明 三輪
Takeshi Watanabe
渡辺 猛志
Ryoichi Sudo
須藤 亮一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56171406A priority Critical patent/JPS5872923A/en
Publication of JPS5872923A publication Critical patent/JPS5872923A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133711Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films

Abstract

PURPOSE:To obtain an oriented film which is superior in stability at a high temperature and in life, by applying the mixture of an alkyl alkoxysilane having a long chain alkyl group and a methyl hydrogen polysiloxane onto a film and heating it to perform the orientation treatment in respect to the oriented film where liquid crystal molecules are oriented vertically. CONSTITUTION:A transparent conductive film 2 is provided on a glass substrate 1, and an orientation control film 3 is formed on this film 2, and a liquid crystal layer 4 where liquid crystal molecules are preliminarily oriented vertically is held between these substrates 1, thus obtaining a liquid crystal display element. A toluene mixed liquid of a long-chain alkyl alkoxy silane and a methyl hydrogen polysiloxane is applied to orientation control films 3 brought into contact with the liquid crystal layer 4 to perform the orientation treatment. Heat-treated films 5 are provided by heating at 150-200 deg.C. By these films 6, various liquid crystals are oriented very well in comparison with the use of conventional Na<+> ion barrier layers 6 used on the surface of an SiO2 film.

Description

【発明の詳細な説明】 本発f!Jは、液晶分子をあらかじめ−1配向状態とし
ておき、電界、磁界、熱等の強度を変化させることによ
ル生ずる液晶分子の配向変形を利用する液晶表示素子に
係シ、特に液晶表示素子の配向膜に関する。
[Detailed description of the invention] This f! J is concerned with liquid crystal display elements that utilize alignment deformation of liquid crystal molecules that is caused by setting liquid crystal molecules in a −1 orientation state in advance and changing the intensity of electric field, magnetic field, heat, etc. Regarding alignment film.

従来、液晶分子t−垂直配向させる方式とじては、レシ
チンあるいはヘキサデシルトリメチルアンモニウムブロ
マイドなどの界面活性剤等を基板に!11布するかある
いは液晶材料に混合する方法が知られている。しかしな
がらこの方式では、配向処理剤が遊離しやすいため、液
晶配向性の高温安定性および寿命の面で問題がある。
Conventionally, the method of aligning liquid crystal molecules t-vertically uses a surfactant such as lecithin or hexadecyltrimethylammonium bromide as a substrate. 11, or mixing it with a liquid crystal material is known. However, in this method, the alignment treatment agent is likely to be liberated, so there are problems in terms of high-temperature stability of liquid crystal alignment and longevity.

上記の他に、従来シランカップリング剤あるbは有機ク
ロム錯体等を基板に塗布反応させて。
In addition to the above, there are conventional silane coupling agents b, which are made by coating an organic chromium complex on a substrate and causing a reaction.

液晶分子t−垂厘配向せしめる方法も知られている。こ
の方法は上記の界面活性剤を用いる方法よシも素子とし
ての安定性の面で有利であるが。
A method of causing liquid crystal molecules to be t-oriented is also known. This method is more advantageous than the above-mentioned method using a surfactant in terms of stability as an element.

次の(I)(If)(至)のような欠点がある。There are drawbacks such as the following (I) (If) (To).

(1)  良好な配向膜を得るためKは、上記の処理剤
を基板面に単層にのみ付着させる必要があシ、塗布条件
に制約が多く、再現性が悪い。
(1) In order to obtain a good alignment film, K requires the above-mentioned processing agent to be deposited only in a single layer on the substrate surface, there are many restrictions on coating conditions, and reproducibility is poor.

(2層以上の付着があると配向性が低下すも)ω) ク
ロム錯体は、公害面の問題が残されている。
(Although the orientation deteriorates if two or more layers are attached) ω) Chromium complexes still have problems in terms of pollution.

上記問題のうち、(1)項における問題点の解決策と思
える方法に、シランカップリング剤にテトラアルコキシ
シランを添加する方法が提示されている。しかし、この
方法を用いた場合、液の安定性や、膜の単分子化などK
よシ、配向性の否決性が患い。
Among the above problems, a method of adding tetraalkoxysilane to the silane coupling agent has been proposed as a method that seems to be a solution to the problem in item (1). However, when using this method, K
Well, I'm suffering from the negativity of orientation.

am*子の寿命特性でリーク電流の増大を防ぐため忙、
7ツ化マグネシウム、酸化タンタルなどを蒸着しなけれ
ばならない、エステル系液晶を用いた素子には特に必要
である。そのため置型性に劣る。
In order to prevent an increase in leakage current due to the life characteristics of the am* child,
This is especially necessary for devices using ester-based liquid crystals, which require vapor deposition of magnesium septate, tantalum oxide, etc. Therefore, the moldability is poor.

本発明の目的は、上記した従来技術の欠点をなくし1m
布性が優れ、セル組立時の加熱工程で、配向能が低下せ
ず、各種の液晶に対して優れた配向性を有し、素子寿命
においても長時間のウェザ−試験、加湿試験でのリーク
電流増加がほとんどない信頼性の高い配向膜を提供する
ことにある。
The purpose of the present invention is to eliminate the above-mentioned drawbacks of the prior art and to
It has excellent fabric properties, does not lose its alignment ability during the heating process during cell assembly, has excellent alignment properties for various liquid crystals, and has no leakage during long weather tests and humidification tests even during the device life. The object of the present invention is to provide a highly reliable alignment film with almost no increase in current.

本発明は、かかる点に関しなされたもので液晶と接する
基板面に対し、配向処理剤として。
The present invention has been made in this regard, and is applied as an alignment treatment agent for a substrate surface that comes into contact with liquid crystal.

長鎖アルキル基を有するアルキルアルコキシシラン(A
S)ト、メチルハイドロジェンボリシロキをンCH5)
又はポリシルメチレン化合物(AlI3)との混合物を
塗布し、150℃以上の加熱処理をした配向膜を用いた
ことを特徴とする。
Alkylalkoxysilane having a long chain alkyl group (A
S) Methyl hydrogen polysiloxane CH5)
Alternatively, it is characterized by using an alignment film coated with a mixture with a polysilmethylene compound (AlI3) and heat-treated at 150° C. or higher.

上記に示し九配向処理剤において、長鎖アルキルアルコ
キシシラン(As )下記の一般式の構造Rs : C
2t〜C24のノルマルアルキル基R1e Rs : 
Ct〜C4のアルキル基メチルハイドロジエンポリシロ
キサン(H5)カ÷5i−0÷   ・・・・・・廂・
曲(2)1 n:自然数、Cのましく d 1oooo以下また。ポ
リシルメチレン化合物(MS)が下記−R,:C1〜C
4のアルキル基又はフェニル基rlL=自然数、このま
しくは10000以下なお、上記(1)式の化合物は単
層で使用しても、二ate以上混合して使用する。上記
(2)、(3)式の化合物についても同様である。
In the nine alignment treatment agents shown above, long-chain alkyl alkoxysilane (As) has the following general formula structure Rs: C
2t to C24 normal alkyl group R1e Rs:
Ct~C4 alkyl group methylhydrodienepolysiloxane (H5) Ka÷5i-0÷ ・・・・・・・
Song (2) 1 n: Natural number, C's meaning d 1oooo or less. The polysylmethylene compound (MS) is the following -R,:C1-C
The alkyl group or phenyl group of 4 rlL = natural number, preferably 10,000 or less.The compound of formula (1) may be used in a single layer or in a mixture of two or more ates. The same applies to the compounds of formulas (2) and (3) above.

上記(1)式で示されるアルコキシシランと、上記(8
)式で示されるメチルハイドロジエンポリシロキサンと
の混合物、もしくは上記(1)式で示されるアルコキシ
シランと上記(3)式で示されるポリシルメチレンとの
混合物の混合比は、si原子比”t” Si CES)
/Si CAS) : Q、1〜8 ト、 SiCMS
VSi CAS>:0.2〜10の範囲が、液晶配向性
からみて良好である。なお、上記範囲外の液晶配向性は
、!1iIl配向が得られないため良好でなり。
The alkoxysilane represented by the above formula (1) and the above (8
) or the mixture of the alkoxysilane represented by the above formula (1) and the polysylmethylene represented by the above formula (3), the si atomic ratio "t" ”SiCES)
/Si CAS): Q, 1 to 8, SiCMS
VSi CAS>: A range of 0.2 to 10 is good in terms of liquid crystal orientation. In addition, liquid crystal orientation outside the above range is ! This is not good because the 1iIl orientation cannot be obtained.

上記本発明に係る組成物の溶剤は、アルコキシシランと
メチルハイドロジエンポリシロキサン又はポリシルメチ
レンを同時に溶解すれば特に限定はないが1例えばトル
エン、キシレンなどの芳香族系溶剤、ルーデシルアルコ
ール、トリデカノールなどのアルコール類、エチルセロ
ソルブ、ブチルセロソルブなどの多価アルコール誘導体
などが溶解性と塗布性が優れ有用である、なお溶剤と前
記(11、(21式の混合物、前記(3)(4)の混合
物の配合割合は、塗布性及び液晶配向性がそこなわれな
い範囲が良く、一般には、前者80〜99.9wt%、
後者20〜r:J1wt% テある。
The solvent for the composition according to the present invention is not particularly limited as long as the alkoxysilane and methylhydrodiene polysiloxane or polysilmethylene are dissolved at the same time; Alcohols such as ethyl cellosolve, polyhydric alcohol derivatives such as butyl cellosolve, and the like are useful because of their excellent solubility and coating properties. The blending ratio of the former is preferably within a range that does not impair coating properties and liquid crystal orientation, and generally the former is 80 to 99.9 wt%,
The latter 20~r: J1wt%.

なお、配向処理剤をディップ、スピンナ、スプレー法な
どの塗布法によシ基板に簡布し、150℃以上、配向安
定性の点で望ましくは、150℃〜250’Cの乾燥雰
囲気で加熱処理することによシ、配向膜を得られるが、
それは下記のような反応によ上記塗膜は、印刷法等の低
コストの手法により形成可能であ夛、かつ各種の液晶に
対し、非常に良好な配向を示し、寿命においても非常に
良好である。
Note that the alignment treatment agent is applied onto the substrate by a coating method such as a dip, spinner, or spray method, and then heat-treated in a dry atmosphere at 150° C. or higher, preferably 150° C. to 250° C. from the viewpoint of alignment stability. By doing so, an alignment film can be obtained, but
This is due to the reaction described below.The coating film described above can be formed by low-cost methods such as printing, shows very good alignment with various liquid crystals, and has a very good lifespan. be.

以下、本発明を実施例によシ説明する。The present invention will be explained below using examples.

実施例1 鮮1表に示すように、長鎖アルキルアルコキシシランと
分子量約1000のメチルハイドロジエンポリシロキサ
ンを組み合わせた。トルエンを溶剤とし、長鎖フルキル
アルコキシシランとメffi、、ハイドロジエンポリシ
aキサンの和の溶剤に対する量は、2wt%である。こ
の液を用い第1図のように例えば酸化インジウム等の透
明導電H2が選択的に形成され九ガラス基板1にスピン
塗布する。これを200CI時間加熱処理して配向膜3
とする。この配向膜の膜厚は約αOOSμmである。そ
の後、基板の間隔を8^mに維持して。
Example 1 As shown in Table 1, a long chain alkyl alkoxysilane and a methylhydrodiene polysiloxane having a molecular weight of about 1000 were combined. Using toluene as a solvent, the amount of the sum of long-chain fulkylalkoxysilane and meffi, hydrogen polyaxane relative to the solvent is 2 wt%. Using this solution, a transparent conductive layer H2 of, for example, indium oxide is selectively formed and spin-coated onto a glass substrate 1, as shown in FIG. This was heat-treated for 200 CI hours to form an alignment film 3.
shall be. The thickness of this alignment film is approximately αOOS μm. After that, maintain the distance between the boards at 8^m.

液晶4t−接着剤5で封止する。この基板は、各種のネ
マチック液晶に対し良好なホメオトロピック配向が得ら
れた。各種のコレステリック液晶を用いた場合も、良好
表ホメオトロピック配。
Liquid crystal 4t-sealed with adhesive 5. This substrate provided good homeotropic alignment for various nematic liquid crystals. Even when various cholesteric liquid crystals are used, good homeotropic distribution is achieved.

向が得られた。direction was obtained.

この配向効果は、エポキシ系接着剤を用いた150℃2
時間の素子組立プロセス後も維持された。
This orientation effect can be achieved by using epoxy adhesive at 150°C2.
The time was maintained even after the device assembly process.

上記基板を用いた素子の寿命は、ウェザ−試験と70℃
95%肪の加湿試験で約200時間経過後もリーク電流
の増加がほとんどなく良好であった。
The life of the device using the above substrate is determined by weather test and 70°C.
Even after about 200 hours in the 95% fat humidification test, there was almost no increase in leakage current, which was good.

第1−表 液晶垂直配向性 ○:良好 △:やや不良実施例2 第2表に示すように、長鎖アルキルアルコキシシランと
分子量約800のメチルポリシルメチレンを組み合わせ
た。トルエンtU剤とし、長鎖アルキルアルコキシシラ
ンとメチルポリシルメチレンの和の溶剤に対する量は、
2wt%である。
Table 1 - Vertical alignment of liquid crystal ◯: Good △: Slightly poor Example 2 As shown in Table 2, a long chain alkyl alkoxysilane and methylpolysilmethylene having a molecular weight of about 800 were combined. Using toluene as a tU agent, the amount of the sum of long-chain alkyl alkoxysilane and methylpolysylmethylene relative to the solvent is:
It is 2wt%.

この液を実施例1と同様に素子を組み立て検討を行い、
実施例1と同様な結果を得た。
Using this solution, assemble and examine the device in the same manner as in Example 1.
Similar results as in Example 1 were obtained.

液晶垂直配向性 ○:良好 Δ:やや不良*:メチルポ
リシルメチレンと長鎖アルキルア(#S) ルコ命ジシランCAS )の混合物 実施例3 第3表に示すように長鎖アルキルアルコキシシランと分
子量約160’Oのフェニルポリシルメチレンを組み合
せた。トルエンを溶剤とし、長鎖アルキルアルコキシシ
ランと7エニルポリシルメチレンの和の溶剤に対する量
は2wt%である。
Liquid crystal vertical alignment ○: Good Δ: Slightly poor*: Mixture of methylpolysylmethylene and long-chain alkyl alkoxysilane (#S) CAS 160'O phenylpolysilmethylene was combined. Toluene is used as a solvent, and the amount of the sum of long-chain alkyl alkoxysilane and 7-enylpolysylmethylene is 2 wt% relative to the solvent.

この液を実施例1と同様に素子を組み立てて検肘を行い
、実施例1と同様な結果を得た。
Using this liquid, an element was assembled in the same manner as in Example 1 and an elbow test was performed, and the same results as in Example 1 were obtained.

液晶垂直配向性 O:良好 Δ:やや不良*:フェニル
ポリシルメチレン(MS)と長鎖アルキルアルコキシ(
As)シランの混合物ここで各種の液晶とは、シッフベ
ース系液晶。
Liquid crystal vertical alignment O: Good Δ: Slightly poor*: Phenylpolysylmethylene (MS) and long chain alkyl alkoxy (
As) Mixture of silanes The various liquid crystals here include Schiff base liquid crystals.

ビフェニル系液晶アゾオキシ系液晶、アゾ系液晶、エス
テル系液晶、フェニルシクロヘキサン系液晶、フェニル
ピリジン系液晶および上記ネマチック液晶に光学活性物
質を添加したコレステリック液晶であ夛、さらに二色性
色素等の液晶でない物質を添加した混合液晶も含む、こ
れら液晶には、@電率の異方性が正のものと負のものが
あるがその両方について検討した。
Biphenyl liquid crystal Azooxy liquid crystal, azo liquid crystal, ester liquid crystal, phenylcyclohexane liquid crystal, phenylpyridine liquid crystal, and cholesteric liquid crystal obtained by adding an optically active substance to the above nematic liquid crystal.Furthermore, there is no liquid crystal such as dichroic dye. These liquid crystals, including mixed liquid crystals to which substances have been added, include those with positive and negative anisotropy of electric conductivity, and both were investigated.

本発明に°よれば、配向性と表示性能が優れ寿命特性が
良い実用レベルの1直配向膜が得られ。
According to the present invention, it is possible to obtain a practical-level single-direction alignment film that is excellent in orientation and display performance and has good life characteristics.

カラー表示など新機能を有する液晶表示素子の製作が可
能となる。
It becomes possible to produce liquid crystal display elements with new functions such as color display.

なお、良質な龜厘配向を必要とする液晶表示素子として
は、コレステリック・ネマチック転移製二色表示方式を
はじめ、フレブリックス屋(ll起複屈折電界効果製)
表示方式、ハイブリッド配向誘起複屈折電界効果型表示
方式、動的散乱製表示方式、配向振動型表示方式等があ
る。
Liquid crystal display elements that require high-quality alignment include two-color display systems manufactured by cholesteric-nematic transition, and Flex-Ya (manufactured by birefringence field effect).
There are display methods such as a hybrid orientation-induced birefringence field effect display method, a dynamic scattering display method, and an orientation vibration display method.

しかしながら本発明が有効であるのは、これら表示方式
に限らず初期状III(未励起状。N14)で器厘配向
を必要とする全ての方式であることは他言をまたない、
%にコレステリ、り、ネ、チ。
However, it goes without saying that the present invention is effective not only in these display systems but also in all systems that require a strong orientation in the initial state III (unexcited state, N14).
Cholesteri, ri, ne, chi in %.

り転移型二色表示方式は、現在主流のツィステッドネマ
チック電界効果型表示方式に較べ偏光板が不要であシ製
品コストが低い、二色性色素によシ任意の色表示が可能
であるという利点があシ、今後主流になる可能性が太き
^方式であるが、この方式において未励起状態で液晶分
子t−!に−1配向状態にしておくことは、液晶分子を
ホモジニアス配向状態にしておく場合に較べ駆動電圧を
低くできるとbう利点がある。
Compared to the currently mainstream twisted nematic field effect display system, the transition type two-color display system requires no polarizing plate, has lower product costs, and can display any color using dichroic dyes. This method has some advantages and is likely to become mainstream in the future, but in this method, liquid crystal molecules t-! Keeping the liquid crystal molecules in the -1 alignment state has the advantage that the driving voltage can be lowered compared to the case where the liquid crystal molecules are kept in the homogeneous alignment state.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の液晶配向膜を用いた上記素子の基本
構成、第2図、第3図は、ガラス基板の液晶と接する側
の表面に5dJ2等の全編酸化物よシなるNα+イオン
バリヤ層を設け、配向能をより高めた素子の断面図であ
る。 1・・・ガラス基板    2・・・透明導電膜5・・
・配向制御膜    4・・・液晶層5・・・接着剤 6・・・Na+イオンバリヤ層
FIG. 1 shows the basic configuration of the above-mentioned device using the liquid crystal alignment film of the present invention, and FIGS. 2 and 3 show Nα+ ions formed entirely by oxides such as 5dJ2 on the surface of the glass substrate in contact with the liquid crystal. FIG. 2 is a cross-sectional view of an element in which a barrier layer is provided to further enhance alignment ability. 1...Glass substrate 2...Transparent conductive film 5...
・Orientation control film 4...Liquid crystal layer 5...Adhesive 6...Na+ ion barrier layer

Claims (1)

【特許請求の範囲】 t 液晶を挾持して液晶挾持素子を構成する液晶挟持基
板におりて、上記基板の液晶と接する側に長鎖アルキル
基を有するアルキルアルコキシシランとメチルハイドロ
ジエンポリシロキサンとの混合物、もしくは長鎖アルキ
ル基を有するアルキルアルコキシシランとポリシルメチ
レンとの混合物t−m布し、150℃ 〜200℃で加
熱して得た加熱処理膜が設けられている仁とを特徴とす
る液晶表示素子。 2 長鎖アルキル基を有するアルキルアルコキシシラン
が、下記の一般式(1)の構造のものでRt : に’
11〜Cやのノルミルアルキル基R,,R,:C,〜C
4のアルキル基 メチルハイドiジエンポリシロキサンが、下記一般式伐
)の構造のものであ夛。 ポリシルメチレン化合物が、下記一般式(3)の構造の
ものであることを特徴とする特許請求範囲第一項記載の
液晶表示素子。 基 m:自然数
[Scope of Claims] t. A liquid crystal sandwiching substrate that sandwiches a liquid crystal to form a liquid crystal holding element, comprising an alkyl alkoxysilane having a long-chain alkyl group on the side of the substrate in contact with the liquid crystal and a methylhydrodiene polysiloxane. A mixture or a mixture of an alkyl alkoxysilane having a long-chain alkyl group and polysylmethylene is coated with a heat-treated film obtained by heating the mixture at 150°C to 200°C. Liquid crystal display element. 2. The alkylalkoxysilane having a long-chain alkyl group has the structure of the following general formula (1) and Rt: '
11~C normyl alkyl group R,,R,:C,~C
The alkyl group methyl hydride i-diene polysiloxane of No. 4 has the structure shown in the following general formula. The liquid crystal display element according to claim 1, wherein the polysylmethylene compound has a structure represented by the following general formula (3). Base m: natural number
JP56171406A 1981-10-28 1981-10-28 Liquid crystal display element Pending JPS5872923A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56171406A JPS5872923A (en) 1981-10-28 1981-10-28 Liquid crystal display element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56171406A JPS5872923A (en) 1981-10-28 1981-10-28 Liquid crystal display element

Publications (1)

Publication Number Publication Date
JPS5872923A true JPS5872923A (en) 1983-05-02

Family

ID=15922553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56171406A Pending JPS5872923A (en) 1981-10-28 1981-10-28 Liquid crystal display element

Country Status (1)

Country Link
JP (1) JPS5872923A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6126023A (en) * 1984-07-16 1986-02-05 Sanyo Electric Co Ltd Production of substrate for liquid crystal display device
JP2002284998A (en) * 2001-03-23 2002-10-03 Fujitsu Ltd Silicon-based composition, low dielectric constant film, semiconductor apparatus and method for low dielectric constant film production
US7528207B2 (en) * 2004-01-16 2009-05-05 Jsr Corporation Method for producing polymer, polymer, composition for forming insulating film, method for producing insulating film, and insulating film
DE102017221678A1 (en) 2016-12-06 2018-06-07 Fanuc Corporation Advanced Reality Simulation Device and Advanced Reality Simulation Program
DE102018201210A1 (en) 2017-02-07 2018-08-09 Fanuc Corporation Coordinate Information Conversion Device and Coordinate Information Conversion Program
DE102018210261A1 (en) 2017-06-29 2019-01-03 Fanuc Corporation Display system for virtual objects

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6126023A (en) * 1984-07-16 1986-02-05 Sanyo Electric Co Ltd Production of substrate for liquid crystal display device
JP2002284998A (en) * 2001-03-23 2002-10-03 Fujitsu Ltd Silicon-based composition, low dielectric constant film, semiconductor apparatus and method for low dielectric constant film production
JP4545973B2 (en) * 2001-03-23 2010-09-15 富士通株式会社 Silicon-based composition, low dielectric constant film, semiconductor device, and method of manufacturing low dielectric constant film
US7528207B2 (en) * 2004-01-16 2009-05-05 Jsr Corporation Method for producing polymer, polymer, composition for forming insulating film, method for producing insulating film, and insulating film
DE102017221678A1 (en) 2016-12-06 2018-06-07 Fanuc Corporation Advanced Reality Simulation Device and Advanced Reality Simulation Program
US10424122B2 (en) 2016-12-06 2019-09-24 Fanuc Corporation Augmented reality simulation device which displays a virtual object on a machine tool and computer-readable medium
DE102018201210A1 (en) 2017-02-07 2018-08-09 Fanuc Corporation Coordinate Information Conversion Device and Coordinate Information Conversion Program
DE102018210261A1 (en) 2017-06-29 2019-01-03 Fanuc Corporation Display system for virtual objects

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