JPS5872840U - ワイヤボンデイング装置 - Google Patents
ワイヤボンデイング装置Info
- Publication number
- JPS5872840U JPS5872840U JP1981167351U JP16735181U JPS5872840U JP S5872840 U JPS5872840 U JP S5872840U JP 1981167351 U JP1981167351 U JP 1981167351U JP 16735181 U JP16735181 U JP 16735181U JP S5872840 U JPS5872840 U JP S5872840U
- Authority
- JP
- Japan
- Prior art keywords
- wire bonding
- bonding equipment
- drive source
- rotating shaft
- swinging arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78301—Capillary
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78343—Means for applying energy, e.g. heating means by means of pressure by ultrasonic vibrations
- H01L2224/7835—Stable and mobile yokes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
め要約のデータは記録されません。
Description
図面は本考案の一実施例を示し、第１図は一部断面した
正面図、第２図は平面図、第３図は要部の斜視図である
。 １・・・揺動アーム、７・・・ウオームホイール、８・
・・ウオーム、１１・・・ＤＣモータ（駆動源）、１２
・・・回転軸、２５・・・キャピラリアーム。
正面図、第２図は平面図、第３図は要部の斜視図である
。 １・・・揺動アーム、７・・・ウオームホイール、８・
・・ウオーム、１１・・・ＤＣモータ（駆動源）、１２
・・・回転軸、２５・・・キャピラリアーム。
Claims (1)
- 回転軸を有しこの回転軸が正方向と逆方向に交互に回転
駆動される駆動源と、回転自在に設けられウオームとウ
オームホイールとからなる歯車機構を介して上記駆動源
により揺動駆動される揺動アームと、この揺動アームに
保持されたキャピラリアームとを具備したことを特徴と
するワイヤボンディング装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981167351U JPS5872840U (ja) | 1981-11-10 | 1981-11-10 | ワイヤボンデイング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981167351U JPS5872840U (ja) | 1981-11-10 | 1981-11-10 | ワイヤボンデイング装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5872840U true JPS5872840U (ja) | 1983-05-17 |
Family
ID=29959450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981167351U Pending JPS5872840U (ja) | 1981-11-10 | 1981-11-10 | ワイヤボンデイング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5872840U (ja) |
-
1981
- 1981-11-10 JP JP1981167351U patent/JPS5872840U/ja active Pending
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