JPS5872477A - Heat-sensitive recording head - Google Patents

Heat-sensitive recording head

Info

Publication number
JPS5872477A
JPS5872477A JP56171409A JP17140981A JPS5872477A JP S5872477 A JPS5872477 A JP S5872477A JP 56171409 A JP56171409 A JP 56171409A JP 17140981 A JP17140981 A JP 17140981A JP S5872477 A JPS5872477 A JP S5872477A
Authority
JP
Japan
Prior art keywords
layer
protective layer
thickness
recording head
resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56171409A
Other languages
Japanese (ja)
Inventor
Michiyoshi Kawahito
Akira Yabushita
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56171409A priority Critical patent/JPS5872477A/en
Publication of JPS5872477A publication Critical patent/JPS5872477A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L49/00Solid state devices not provided for in groups H01L27/00 - H01L47/00 and H01L51/00 and not provided for in any other subclass; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L49/02Thin-film or thick-film devices

Abstract

PURPOSE:To obtain a heat-sensitive recording head having a long life and capable of giving excellent-quality printing by providing a substantially non- steped flat protective layer over a resistor layer and a conductor layer provided on the surface of a substrate. CONSTITUTION:On an alumina substrate 1 with a graze layer 2, an undercoat layer 3 and a resistor layer 4 are formed, a wiring conductor layer 6 (Al film of a thickness of about 1mu) is formed through an adhesive layer 5 (Cr film of a thickness of about 1,000Angstrom ) on the layers 3 and 4, and then a resistor protective layer consisting of an oxidation-resistant protective layer 7 (SiO2 film of a thickness of about 3mu) and a wear-resistant protective layer (Ta2O5 film of a thickness of about 4mu) is formed over these layers to manufacture a heat- sensitive recording head. In this case, a step difference between the protective layer part located on the conductor layer 6 and the protective layer part located on the resistor layer 4 is regulated to 5,000Angstrom or less. To implement this, the protective layers are formed by a bias sputtering method in which a bias boltage of 200-1,000V is applied to the substrate.
JP56171409A 1981-10-28 1981-10-28 Heat-sensitive recording head Pending JPS5872477A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56171409A JPS5872477A (en) 1981-10-28 1981-10-28 Heat-sensitive recording head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56171409A JPS5872477A (en) 1981-10-28 1981-10-28 Heat-sensitive recording head

Publications (1)

Publication Number Publication Date
JPS5872477A true JPS5872477A (en) 1983-04-30

Family

ID=15922605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56171409A Pending JPS5872477A (en) 1981-10-28 1981-10-28 Heat-sensitive recording head

Country Status (1)

Country Link
JP (1) JPS5872477A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103946028A (en) * 2011-11-28 2014-07-23 京瓷株式会社 Thermal head and thermal printer provided with same
JP2015006791A (en) * 2013-05-27 2015-01-15 京セラ株式会社 Thermal head and thermal printer including the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103946028A (en) * 2011-11-28 2014-07-23 京瓷株式会社 Thermal head and thermal printer provided with same
US9238376B2 (en) 2011-11-28 2016-01-19 Kyocera Corporation Thermal head and thermal printer equipped with the same
CN103946028B (en) * 2011-11-28 2016-01-20 京瓷株式会社 Thermal head and possess the thermal printer of this thermal head
JP2015006791A (en) * 2013-05-27 2015-01-15 京セラ株式会社 Thermal head and thermal printer including the same

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