JPS5871444A - 電子線回折装置 - Google Patents

電子線回折装置

Info

Publication number
JPS5871444A
JPS5871444A JP56169559A JP16955981A JPS5871444A JP S5871444 A JPS5871444 A JP S5871444A JP 56169559 A JP56169559 A JP 56169559A JP 16955981 A JP16955981 A JP 16955981A JP S5871444 A JPS5871444 A JP S5871444A
Authority
JP
Japan
Prior art keywords
electron beam
sample
angle
length
diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56169559A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0571903B2 (enrdf_load_stackoverflow
Inventor
Seiichi Nakagawa
中川　清一
Setsuo Norioka
節雄 則岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP56169559A priority Critical patent/JPS5871444A/ja
Publication of JPS5871444A publication Critical patent/JPS5871444A/ja
Publication of JPH0571903B2 publication Critical patent/JPH0571903B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20058—Measuring diffraction of electrons, e.g. low energy electron diffraction [LEED] method or reflection high energy electron diffraction [RHEED] method

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP56169559A 1981-10-23 1981-10-23 電子線回折装置 Granted JPS5871444A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56169559A JPS5871444A (ja) 1981-10-23 1981-10-23 電子線回折装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56169559A JPS5871444A (ja) 1981-10-23 1981-10-23 電子線回折装置

Publications (2)

Publication Number Publication Date
JPS5871444A true JPS5871444A (ja) 1983-04-28
JPH0571903B2 JPH0571903B2 (enrdf_load_stackoverflow) 1993-10-08

Family

ID=15888702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56169559A Granted JPS5871444A (ja) 1981-10-23 1981-10-23 電子線回折装置

Country Status (1)

Country Link
JP (1) JPS5871444A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143749A (ja) * 1983-12-29 1985-07-30 Kawasaki Steel Corp 電子線回折像自動測定装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4721345A (enrdf_load_stackoverflow) * 1971-03-13 1972-10-03
JPS55166854A (en) * 1979-06-15 1980-12-26 Hitachi Ltd Scanning electron microscope and magnification display unit in its simulator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4721345A (enrdf_load_stackoverflow) * 1971-03-13 1972-10-03
JPS55166854A (en) * 1979-06-15 1980-12-26 Hitachi Ltd Scanning electron microscope and magnification display unit in its simulator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143749A (ja) * 1983-12-29 1985-07-30 Kawasaki Steel Corp 電子線回折像自動測定装置

Also Published As

Publication number Publication date
JPH0571903B2 (enrdf_load_stackoverflow) 1993-10-08

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