JPS5868651A - Tester for surface of photosensitive film - Google Patents

Tester for surface of photosensitive film

Info

Publication number
JPS5868651A
JPS5868651A JP16645081A JP16645081A JPS5868651A JP S5868651 A JPS5868651 A JP S5868651A JP 16645081 A JP16645081 A JP 16645081A JP 16645081 A JP16645081 A JP 16645081A JP S5868651 A JPS5868651 A JP S5868651A
Authority
JP
Japan
Prior art keywords
defect
photosensitive film
place
light
detecting part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16645081A
Other languages
Japanese (ja)
Inventor
Tokuji Takahashi
高橋 徳治
Kazumi Furuta
和三 古田
Shigeo Nishi
西 茂男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Priority to JP16645081A priority Critical patent/JPS5868651A/en
Publication of JPS5868651A publication Critical patent/JPS5868651A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To enable to perform an easy detection of the presence and a place of a defect on a surface, by a method wherein infrared light by reflected light or transmitted light from a surface to be inspected of a photosensitive film is collected by a detecting part via a detecting lens. CONSTITUTION:In a tester, an infrared transmitting filter is used as a filter 2, and arrayed solid photographing element consisting of, for example, CCD, photo diode element, which are aligned rectilinearly, are used as a detecting part 12. A video signal, proportioning a light volume from the photographing elements, is fetched from the detecting part 12, and a defect is detected using a detecting circuit to display it in a display mechanism. The alignment in parallel of a number of the elements permits the accurate finding of a place of a defect on a film surface and enables the easy detection of the presence and the place of the defect on the surface.

Description

【発明の詳細な説明】 本発明は感光性フィルムの表面検査装置、特にその検出
部にアレイ状固体撮像素子を用いた感光性フィルムの1
1面検査装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a photosensitive film surface inspection device, and particularly to a photosensitive film surface inspection device using an arrayed solid-state image pickup device in its detection section.
The present invention relates to a one-sided inspection device.

従来感光性フィルムの表面検査装置としてはH・−N・
レーザー等Oft、flKと回転多面鏡を用いた7ツイ
ンダスポツト法によるものが用いられているがこのよう
なものはその発光波長からパンクロ系の感光性フィルム
にかぶりを与えるおそれがあるO ま九、フライングスポット法は回転多面鏡を高速回転す
るという機械的移動を伴うのでそのメンテナンスが大変
で故障の問題もあり、回転多面鏡では面の傾斜の不揃い
又Fi回転軸のガタ、倒れKより精度の高い検査が得ら
れず、傾斜度合の差による受光部のバラツキを救済する
ため大型と。なる等の欠陥があった。
Conventional photosensitive film surface inspection equipment is H・-N・
A 7-twin dust spot method using a laser, etc., and a rotating polygon mirror is used, but such a method may cause fogging on panchromatic photosensitive films due to its emission wavelength. Since the flying spot method involves mechanical movement of the rotating polygon mirror by rotating it at high speed, maintenance is difficult and there are problems with breakdowns. It was difficult to obtain a high level of inspection, and the large size was chosen to compensate for variations in the light receiving area due to differences in the degree of inclination. There were some flaws such as:

更にネガフィルムのように拡大プリントするもの、又は
リバーサルフィルムのように拡大投映されるものけ非常
に小さな欠陥の発生まで実技上問題となる。
Furthermore, when printing in an enlarged manner such as a negative film or enlarging and projecting a film such as a reversal film, even the occurrence of very small defects poses a practical problem.

本発明の目的はこのような従来の欠点を除去した感光性
フィルムの表面検査装置を提供するにある。
An object of the present invention is to provide a photosensitive film surface inspection device that eliminates the above-mentioned conventional drawbacks.

本発明の感光性フィルムの表面検査装置は、感光性フィ
ルムの被検査面よりの反射光または透過光による赤外光
を検出レンズを介して検出部により受光せしめると共に
、前記検出部をアレイ状固体撮像素子によって形成せし
め、このアレイ状固体撮像素子から得たビデオ信号を表
示機構にょって表示する:う構成し九ことを特徴とする
The surface inspection device for a photosensitive film of the present invention causes a detection unit to receive infrared light reflected or transmitted from a surface to be inspected of a photosensitive film through a detection lens, and connects the detection unit to an array-shaped solid state. The video signal is formed by an image sensor, and a video signal obtained from the arrayed solid-state image sensor is displayed by a display mechanism.

以下図面にぶって本発明の詳細な説明する。The present invention will be described in detail below with reference to the drawings.

第1図において1は被検体を照明するタングステン2ン
プ、ハロゲンランプ等の光源、2は感光性フィルムに感
光しない光を得るためのフィルターで3は第1コンデン
サレンズ、4はシリンドリカルレンズ、5は第2コンデ
ンサレンズ、6は感光性フィルム7を搬送するロール、
9は1個の光源による感光性フィルム7の表面の被検査
域、10はフィルム表面の傷等の欠陥、11は検出レン
ズ、12は検出部を示し、本発明においてはフィルター
2として赤外透過フィルターを用いると共に、検出部1
2として直線状に並役し九例えばCOD、7オトダイオ
ードエレメント等よ抄成るアレイ状固体撮偉素子を用い
、こO撮像素子から光量に比例したビデオ信号を検出部
12から取り出し検出回路を用いて欠陥を見い出しこれ
を表示機構(図示せず)に表示せしめるようにする。
In Figure 1, 1 is a light source such as a tungsten lamp or halogen lamp that illuminates the subject, 2 is a filter to obtain light that is not sensitive to the photosensitive film, 3 is the first condenser lens, 4 is a cylindrical lens, and 5 is a cylindrical lens. a second condenser lens; 6 a roll for conveying the photosensitive film 7;
Reference numeral 9 indicates an area to be inspected on the surface of the photosensitive film 7 by one light source, 10 indicates a defect such as a scratch on the film surface, 11 indicates a detection lens, and 12 indicates a detection section. In addition to using a filter, the detection unit 1
As 2, an array-like solid-state sensor consisting of 9 linearly arranged elements such as COD, 7 Otodiode elements, etc. is used, and a video signal proportional to the amount of light is taken out from the detection unit 12 from the O image sensor and a detection circuit is used. A display mechanism (not shown) is used to find defects and display them on a display mechanism (not shown).

本発明装置によれば検出部12から得られ九ビデオ信号
は第2図に示すように同期パルス13゜13間に欠陥表
示パルス14が生じた形のものとなりフィルム7の表面
の傷の有無及び場所を容易に検知できるようになる。
According to the apparatus of the present invention, the nine video signals obtained from the detection section 12 are of the form in which the defect indication pulse 14 is generated between the synchronization pulses 13 and 13, as shown in FIG. Locations can be easily detected.

ま九CCD、フォトダイオードアレイを構成する各撮像
素子の幅は10数μ程度ときわめて小さいなめ解像力が
高く検出レンズの倍率を特に大きくしなくても非常に小
さな欠陥まで検出することが可能であり特に感光性フィ
ルムの検出部として優れている。
The width of each image sensor that makes up the CCD and photodiode array is extremely small, around 10 microns, and has high resolving power, making it possible to detect even the smallest defects without particularly increasing the magnification of the detection lens. It is particularly excellent as a detection part for photosensitive films.

更に本発明において検出部として用いたアレイ状固体撮
儂素子は長手方向、高速搬送に対する適用性に優れ、然
も感光性フィルム等の感光性物質に対して未感光の光を
用いることができ、各素子を多数並列に配置することに
よりフィルム面の欠陥の場所を適確にとらえることがで
き、後処理における感光性フィルムの裁断に際して情報
を取シ入れ欠陥場所を容易に除去することができる。
Furthermore, the arrayed solid-state imaging device used as the detection section in the present invention has excellent applicability in the longitudinal direction and high-speed conveyance, and can also use unsensitized light for photosensitive materials such as photosensitive films. By arranging a large number of each element in parallel, it is possible to accurately identify the location of a defect on the film surface, and the information can be captured and the defect location easily removed when cutting the photosensitive film in post-processing.

尚フィルム表面の傷は一般にフィルム搬送方向に細長く
形成されることが多いため本発明の検出部12を構成す
る各素子12′は@3図に示すように縦方向に長い長方
形のものとすればS/Nを高めると共にその検出出力を
大きくできるので好ましいO また本発明においては第4図に示すように照明系15を
多数並設して用い、これに対応して検出部12も水平方
向に連続して同一直線状に設は幅広のフィルムを一時に
検査することも可能である。
Incidentally, since scratches on the film surface are generally formed in a long and narrow manner in the film transport direction, each element 12' constituting the detection section 12 of the present invention may be a rectangular element that is long in the vertical direction as shown in Figure @3. This is preferable since the S/N can be increased and the detection output can be increased. In addition, in the present invention, as shown in FIG. It is also possible to inspect a wide film at the same time by installing it continuously in the same straight line.

本発明装置においては従来のフライングスポットあるい
はガルバノミラ−を用いたフライングイメージ法のよう
に機械的に動く部分が全くなく信頼性が極めて高い。こ
のことは感光性フィルム製造工場のように工程内が暗黒
で、製造中に検査機の調整が行えないことを考えると大
変重要なファクターである。
The device of the present invention has extremely high reliability as there are no mechanically moving parts unlike the conventional flying spot or flying image method using a galvano mirror. This is a very important factor considering that the process is dark, such as in a photosensitive film manufacturing factory, and inspection equipment cannot be adjusted during production.

又検出部にビジコン等の撮儂管を用いる場合に問題とな
る残儂効果が全くなく、オンライン検査に適している。
Furthermore, there is no residual effect, which is a problem when using a camera tube such as a vidicon in the detection section, making it suitable for on-line inspection.

更にフライングスポット方式で赤外レーザーを用いると
その光学調整が峻しくなるが、本発明においては光源1
としてタングステンランプに赤外フィルターをかけたも
のでよく、一時的にフィルターをはずせば光学調整も容
易である等大きな利益がある。
Furthermore, if an infrared laser is used in the flying spot method, its optical adjustment becomes difficult, but in the present invention, the light source 1
A tungsten lamp fitted with an infrared filter can be used as an infrared lamp, and it has great advantages such as the ease of optical adjustment by temporarily removing the filter.

【図面の簡単な説明】[Brief explanation of drawings]

@1図は本発明装置の説明図、@2図はその検出ビデオ
信号の波形図、第3図はその検出部の詳細図、第4図は
本発明装置の他の実施例説明図である。 l・・・光源、2・・・フィルター、3・・・第1コン
テンサレンズ、4・・・シリンドリカルレンズ、5・・
・第2コンデンサレンズ、6・・・ロール、7・・・感
光性フィルム、9・・・被検査域、lO・・・欠陥箇所
、11・・・検出レンズ、12・・・検出部、12′・
・・素子、13・・・同期パルス、14・・・欠陥表示
パルス、15・・・照明系。 +1圓 +20 十30 12′ 弗40 2
Figure @1 is an explanatory diagram of the apparatus of the present invention, Figure @2 is a waveform diagram of the detected video signal, Figure 3 is a detailed diagram of the detection section, and Figure 4 is an explanatory diagram of another embodiment of the apparatus of the present invention. . l...Light source, 2...Filter, 3...First condenser lens, 4...Cylindrical lens, 5...
- Second condenser lens, 6... Roll, 7... Photosensitive film, 9... Inspection area, 1O... Defect location, 11... Detection lens, 12... Detection section, 12 ′・
... Element, 13... Synchronization pulse, 14... Defect indication pulse, 15... Illumination system. +1 yen+20 130 12' 弗40 2

Claims (1)

【特許請求の範囲】[Claims] (1)  感光性フィルムの被検査面よシの反射光また
は透過光による赤外光を検出レンズを介して検出部によ
り受光せしめると共に、前記検出部をアレイ状固体撮像
素子によって形成せしめ、このアレイ状固体撮像素子か
ら得九ビデオ信号を表示機構によって表示するよう構成
したことを特徴とする感光性フィルムの表面検査装置。
(1) Infrared light reflected or transmitted from the surface to be inspected of the photosensitive film is received by a detection section through a detection lens, and the detection section is formed by an array of solid-state image sensors, and the array 1. An apparatus for inspecting the surface of a photosensitive film, characterized in that it is configured to display a video signal obtained from a solid-state image pickup device using a display mechanism.
JP16645081A 1981-10-20 1981-10-20 Tester for surface of photosensitive film Pending JPS5868651A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16645081A JPS5868651A (en) 1981-10-20 1981-10-20 Tester for surface of photosensitive film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16645081A JPS5868651A (en) 1981-10-20 1981-10-20 Tester for surface of photosensitive film

Publications (1)

Publication Number Publication Date
JPS5868651A true JPS5868651A (en) 1983-04-23

Family

ID=15831627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16645081A Pending JPS5868651A (en) 1981-10-20 1981-10-20 Tester for surface of photosensitive film

Country Status (1)

Country Link
JP (1) JPS5868651A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2613075A1 (en) * 1987-03-23 1988-09-30 Sick Optik Elektronik Erwin DEVICE FOR OPTICALLY CONTROLLING A RIBBON
NL9500151A (en) * 1995-01-27 1996-09-02 Stork Contiweb Method and apparatus for inspecting a web of material for defects, using the method in preparing a magazine reel in a reel changer, and reel changer provided with such an apparatus
US6323967B1 (en) 1997-05-16 2001-11-27 Nikon Corporation Illumination device and image reading apparatus
US6775419B2 (en) 1997-07-24 2004-08-10 Nikon Corporation Image processing method, image processing apparatus, and storage medium for storing control process

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5114039A (en) * 1974-07-25 1976-02-04 Sanyo Electric Co Hyojipaneruno ekishofunyuhoho
JPS5312377A (en) * 1976-07-20 1978-02-03 Nippon Steel Corp Inspecting apparatus for surface
JPS55147336A (en) * 1979-05-08 1980-11-17 Nippon Seiko Kk Appearance inspecting apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5114039A (en) * 1974-07-25 1976-02-04 Sanyo Electric Co Hyojipaneruno ekishofunyuhoho
JPS5312377A (en) * 1976-07-20 1978-02-03 Nippon Steel Corp Inspecting apparatus for surface
JPS55147336A (en) * 1979-05-08 1980-11-17 Nippon Seiko Kk Appearance inspecting apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2613075A1 (en) * 1987-03-23 1988-09-30 Sick Optik Elektronik Erwin DEVICE FOR OPTICALLY CONTROLLING A RIBBON
NL9500151A (en) * 1995-01-27 1996-09-02 Stork Contiweb Method and apparatus for inspecting a web of material for defects, using the method in preparing a magazine reel in a reel changer, and reel changer provided with such an apparatus
US6323967B1 (en) 1997-05-16 2001-11-27 Nikon Corporation Illumination device and image reading apparatus
US6532085B2 (en) * 1997-05-16 2003-03-11 Nikon Corporation Illumination device and image reading apparatus
US6775419B2 (en) 1997-07-24 2004-08-10 Nikon Corporation Image processing method, image processing apparatus, and storage medium for storing control process

Similar Documents

Publication Publication Date Title
US4223346A (en) Automatic defect detecting inspection apparatus
US2719235A (en) Continuous inspection by optical scanning
JP4224863B2 (en) Inspection apparatus, inspection method, and pattern substrate manufacturing method
US5118195A (en) Area scan camera system for detecting streaks and scratches
US20100220185A1 (en) Object Inspection System
JPH0333645A (en) Surface state inspecting apparatus
KR20190097929A (en) Apparatus and method for inspecting a glass sheet
JPS5868651A (en) Tester for surface of photosensitive film
JPS6319855B2 (en)
JPH11248643A (en) Detection device for foreign matter in transparent film
JPS61176838A (en) Inspection of defect of transparent or semi-transparent plate-shaped body
JP2007003332A (en) Method and detector for detecting defect on planar body side face
JPH08304052A (en) Lens inspection method and device
JPS5927859B2 (en) Glass bottle body defect inspection device
JP3155301B2 (en) Surface inspection equipment
JP2683248B2 (en) Inspection method of colored periodic pattern
JP3336392B2 (en) Foreign matter inspection apparatus and method
JP2801916B2 (en) Defect inspection equipment
JPH01259244A (en) Foreign matter detection system
JPH0735703A (en) Image processing method
JP3788651B2 (en) Defect inspection method and apparatus
JPH06258233A (en) Defect detecting device
JPH09145339A (en) Surface flaw inspection method
JP2001034743A (en) Method and device for comparison and checking
JP3091825B2 (en) Wafer foreign matter detection method