JPS5866242A - 移動式プラズマ電子ビ−ム発生装置 - Google Patents
移動式プラズマ電子ビ−ム発生装置Info
- Publication number
- JPS5866242A JPS5866242A JP56163417A JP16341781A JPS5866242A JP S5866242 A JPS5866242 A JP S5866242A JP 56163417 A JP56163417 A JP 56163417A JP 16341781 A JP16341781 A JP 16341781A JP S5866242 A JPS5866242 A JP S5866242A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- plasma electron
- plasma
- power source
- beam generator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 27
- 239000007789 gas Substances 0.000 description 10
- 239000000498 cooling water Substances 0.000 description 6
- 230000002159 abnormal effect Effects 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 238000010292 electrical insulation Methods 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229920001342 Bakelite® Polymers 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000004021 metal welding Methods 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56163417A JPS5866242A (ja) | 1981-10-15 | 1981-10-15 | 移動式プラズマ電子ビ−ム発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56163417A JPS5866242A (ja) | 1981-10-15 | 1981-10-15 | 移動式プラズマ電子ビ−ム発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5866242A true JPS5866242A (ja) | 1983-04-20 |
| JPH0211975B2 JPH0211975B2 (enExample) | 1990-03-16 |
Family
ID=15773496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56163417A Granted JPS5866242A (ja) | 1981-10-15 | 1981-10-15 | 移動式プラズマ電子ビ−ム発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5866242A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011503801A (ja) * | 2007-11-06 | 2011-01-27 | アクセリス テクノロジーズ， インコーポレイテッド | イオンビーム注入装置用のプラズマ電子フラッドシステム |
| JP2023105381A (ja) * | 2022-01-19 | 2023-07-31 | 住友重機械工業株式会社 | イオン源 |
-
1981
- 1981-10-15 JP JP56163417A patent/JPS5866242A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011503801A (ja) * | 2007-11-06 | 2011-01-27 | アクセリス テクノロジーズ， インコーポレイテッド | イオンビーム注入装置用のプラズマ電子フラッドシステム |
| JP2023105381A (ja) * | 2022-01-19 | 2023-07-31 | 住友重機械工業株式会社 | イオン源 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0211975B2 (enExample) | 1990-03-16 |
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