JPS5862002A - Manufacture of ceramic member - Google Patents
Manufacture of ceramic memberInfo
- Publication number
- JPS5862002A JPS5862002A JP56161815A JP16181581A JPS5862002A JP S5862002 A JPS5862002 A JP S5862002A JP 56161815 A JP56161815 A JP 56161815A JP 16181581 A JP16181581 A JP 16181581A JP S5862002 A JPS5862002 A JP S5862002A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- plastic
- ceramic member
- vapor deposition
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims description 25
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 238000000034 method Methods 0.000 claims description 13
- 238000005229 chemical vapour deposition Methods 0.000 claims description 4
- 238000005240 physical vapour deposition Methods 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000004663 powder metallurgy Methods 0.000 description 2
- 238000005524 ceramic coating Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Producing Shaped Articles From Materials (AREA)
- Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
- Ceramic Products (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
ＡＩ Ｏ、Ｓｉ Ｎ 、 ８．１０等のセ°ラミッ
クで複２ ３ ３ ４
雑な形状を有するものを構造部品として使用する要求が
近時多くなりつつある。■）しこれらセラミックは硬い
ために加工が困難であることから、限られた形状のもの
しか造られていない０Ａ７２０３等では、高温で溶解す
ることによって複雑な形状のものを造る場合もあるが１
結晶粒が粗大となり強度の低いセラミックとなるばかり
でなく、製造費も極めて嵩いものとなる。また通常のセ
ラミック部品は粉末冶金法で作られるが、゛製法上から
その形状に自ら制約がある。DETAILED DESCRIPTION OF THE INVENTION Recently, there has been an increasing demand for the use of ceramics such as AIO, SiN, 8.10, etc., which have complex shapes, as structural parts. ■) However, since these ceramics are hard and difficult to process, products such as 0A7203, which are only made in limited shapes, can be made into complex shapes by melting at high temperatures.
Not only will the crystal grains become coarse and the strength of the ceramic will be low, but the manufacturing cost will also be extremely high. Furthermore, although ordinary ceramic parts are made using powder metallurgy, there are restrictions on their shape due to the manufacturing process.
本発明はセラミック部材を形状的な制約なく製造しうる
方法を供するものであるら
本発明は、プラスチックの表面を所望形状に形成し、所
望形状に形成した該表面に、物理蒸着法もしくは化学蒸
着法によってセラミックを蒸着し、該プラスチックを蒸
着したセラミックと分離することにより所望形状のセラ
ミック部材をうるものである。The present invention provides a method for manufacturing a ceramic member without any shape restrictions, and the present invention provides a method for forming a plastic surface into a desired shape, and applying a physical vapor deposition method or a chemical vapor deposition method to the surface formed into the desired shape. A ceramic member having a desired shape is obtained by depositing ceramic by a method and separating the plastic from the deposited ceramic.
従来、物理蒸着法や化学蒸着法によるセラミックの被覆
は層厚の成長速度が遅く経済的でないとされてきた。し
かし近年の技術改良によって／龍／ｈｒの成長は既に可
能となっており、本発明の経済的な実用も可能である。Conventionally, ceramic coatings using physical vapor deposition or chemical vapor deposition have been considered uneconomical due to the slow growth rate of the layer thickness. However, due to recent technological improvements, the growth of /ryu/hr has already become possible, and the present invention can also be economically put to practical use.
本発明を図について説明すると、例えば第り図に示すよ
うな円柱体をセラミックによって得たい場合、第４図に
示す円柱状の四部コを表面に有するプラスチック型ｌを
造る。そゝしてこのプラスチックの表面に、プラスチッ
クが熱分解しない温度で第２図に示すようにセラミック
３を物理蒸着法あるいは化学蒸着法によって蒸着する。The present invention will be explained with reference to the drawings. For example, when it is desired to obtain a cylindrical body as shown in Fig. 4 using ceramic, a plastic mold 1 having four cylindrical parts on its surface as shown in Fig. 4 is made. Ceramic 3 is then deposited on the surface of this plastic by physical vapor deposition or chemical vapor deposition at a temperature at which the plastic does not decompose thermally, as shown in FIG.
そして真空中で高温に加熱分解したり、溶解したりして
プラスチック型ｌをセラミック３から分離して第３図に
示すように分離し、第３図Ｂ−Ｂｍまで平削等の加工を
行なって第９図に示す円柱状のセラミック部材弘を得る
か、第２図のようにプラスチック型／をつけた状態で第
コ図Ａ−ＡＭまで切削加工を行ない、そしてプラスチッ
ク型ｌを分離して第９図に示す円柱状のプラスチック部
材を得るようにしたものである。上記は円柱体をうる目
的の場合を例にとって説明したが、同様にして外周部を
とれば円筒体を得ることもでき、その他種々の形状のも
のも容易に製造できる。Then, the plastic mold 1 is separated from the ceramic 3 by thermal decomposition or melting at a high temperature in a vacuum, as shown in Figure 3, and processing such as planing is performed until it reaches B-Bm in Figure 3. Then, obtain the cylindrical ceramic member shown in Fig. 9, or cut it to Fig. A-AM with the plastic mold attached as shown in Fig. 2, and then separate the plastic mold l. A cylindrical plastic member shown in FIG. 9 is obtained. The above description has been made using an example in which the purpose is to obtain a cylindrical body, but a cylindrical body can also be obtained by removing the outer peripheral portion in the same manner, and other shapes of various shapes can also be easily manufactured.
本発明法の実施には、低温でしかも蒸着されたセラミッ
クの性質を制御できるイオンプレー才イい。Ion spray technology is useful for carrying out the method of the invention at low temperatures and at the same time controlling the properties of the deposited ceramic.
実施例
熱硬化性プラスチックの表面に外径３Ｑｍ、深さｌＱｗ
の歯車形の四部を形成し、このプラスチックの表面にイ
オンプレ′−ティング法にてアルミナをｌ／Ｈの厚さに
蒸着した。蒸着面をプラスチックの四部周囲の表面が露
出するまでダイヤモンド砥石で平面研削を行ない、プラ
スチックの表面に歯車形を露出させた。次いでこれを真
空中でｇθＯＣに加熱してプラスチックを分解してアル
ミナと分離しアルミナの歯車を得た。Example: The surface of thermosetting plastic has an outer diameter of 3Qm and a depth of 1Qw.
Four gear-shaped parts were formed, and alumina was deposited on the surface of this plastic to a thickness of 1/H by ion plating. The vapor-deposited surface was ground with a diamond grindstone until the surface around the four parts of the plastic was exposed, and a gear shape was exposed on the surface of the plastic. Next, this was heated to gθOC in a vacuum to decompose the plastic and separate it from the alumina to obtain an alumina gear.
このアルミナは背０ｇ％の密度比を持ち、寸法精度モ＋
−ｏ、ｏｓｍ以内で、粉末冶金法で製作した場わ
合の精度：Ｑ、、１３ｍをうわもっていた。This alumina has a density ratio of 0g% and has a dimensional accuracy of +
-o,osm or less, and the accuracy when manufactured by powder metallurgy method: Q, 13m.
図は本発明法の説明図で第１図はセラミックを蒸着する
プラスチックの断面図、第２図は第１図のプラスチック
にセラミックを蒸着した状態の断面図、第３図は第２図
からプラスチックを分離してセラミックのみとした状態
の断面図、第４図は第２図及び第３図からセラミックの
分離、平面研削等により得婉セラ主ツク部材の斜視図で
ある。
出願人 住友電気工業株式会社
−一□１The figure is an explanatory diagram of the method of the present invention. Figure 1 is a cross-sectional view of the plastic on which ceramic is deposited. Figure 2 is a cross-sectional view of the plastic in Figure 1 with ceramic deposited on it. Figure 3 is the plastic shown in Figure 2. FIG. 4 is a perspective view of the ceramic main member obtained by separating the ceramic from FIGS. 2 and 3, surface grinding, etc. Applicant: Sumitomo Electric Industries, Ltd.-1□1
Claims (2)
望形状に形成した該表面に、物理蒸着法もしくは化学蒸
着法によってセラミックを蒸着し、該プラスチックをセ
ラミックと分離することを特徴とするセラミック部材の
製造法。(1) A ceramic member characterized in that the surface of a plastic is formed into a desired shape, a ceramic is deposited on the surface formed into the desired shape by a physical vapor deposition method or a chemical vapor deposition method, and the plastic is separated from the ceramic. Manufacturing method.
する特許請求の範囲（１）項記載のセラミック部材の製
造法。 （圀 イオンブレーティング法によってセラミックを蒸
着する特許請求の範囲（４項又は（−項記載のセラミッ
ク部材の製造法ｏ７(2) A method for manufacturing a ceramic member according to claim (1), wherein the ceramic is separated by thermally decomposing the plastic. (Claims for depositing ceramics by ion blating method (Claim 4 or (-) method of manufacturing a ceramic member o7)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56161815A JPS5862002A (en) | 1981-10-09 | 1981-10-09 | Manufacture of ceramic member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56161815A JPS5862002A (en) | 1981-10-09 | 1981-10-09 | Manufacture of ceramic member |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5862002A true JPS5862002A (en) | 1983-04-13 |
Family
ID=15742430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56161815A Pending JPS5862002A (en) | 1981-10-09 | 1981-10-09 | Manufacture of ceramic member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5862002A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61106206A (en) * | 1984-10-30 | 1986-05-24 | 東海ゴム工業株式会社 | Manufacture of ceramic sheet |
| JPS649710U (en) * | 1987-07-07 | 1989-01-19 | ||
| CN110936494A (en) * | 2019-11-25 | 2020-03-31 | 董青春 | A kind of brick preparation equipment for engineering |
-
1981
- 1981-10-09 JP JP56161815A patent/JPS5862002A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61106206A (en) * | 1984-10-30 | 1986-05-24 | 東海ゴム工業株式会社 | Manufacture of ceramic sheet |
| JPS649710U (en) * | 1987-07-07 | 1989-01-19 | ||
| CN110936494A (en) * | 2019-11-25 | 2020-03-31 | 董青春 | A kind of brick preparation equipment for engineering |
| CN110936494B (en) * | 2019-11-25 | 2021-04-23 | 安徽煌宇建设有限公司 | A kind of brick preparation equipment for engineering |
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