JPS5859559A - Paste made positive pole plate of lead storage battery - Google Patents

Paste made positive pole plate of lead storage battery

Info

Publication number
JPS5859559A
JPS5859559A JP56157930A JP15793081A JPS5859559A JP S5859559 A JPS5859559 A JP S5859559A JP 56157930 A JP56157930 A JP 56157930A JP 15793081 A JP15793081 A JP 15793081A JP S5859559 A JPS5859559 A JP S5859559A
Authority
JP
Japan
Prior art keywords
electrode plate
positive electrode
paste
active material
grid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56157930A
Other languages
Japanese (ja)
Inventor
Hiroto Nakajima
博人 中島
Hiroshi Uramoto
浦本 弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yuasa Corp
Original Assignee
Yuasa Corp
Yuasa Battery Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yuasa Corp, Yuasa Battery Corp filed Critical Yuasa Corp
Priority to JP56157930A priority Critical patent/JPS5859559A/en
Publication of JPS5859559A publication Critical patent/JPS5859559A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/14Electrodes for lead-acid accumulators
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Battery Electrode And Active Subsutance (AREA)

Abstract

PURPOSE:To prevent shortcircuit at the upper part of the group of electrodes as well as separation of active substance and thereby prolonging the cycle life by using as a retainer for said active substance a waved porous plate made of plastics such as polyorefin in addition to the grid made of lead alloy and by packaging said material with fine glass mat consisting mainly of unwoven cloth or glass fiber. CONSTITUTION:A grid 2 with tab 1 made of lead alloy with 2.5wt% antimony in the size of 100X108mm. divided into 16 sections each dimensioned as 25X23mm. is pinched by nets 3 made of polypropylene with 1.5X1.5mm. mesh, and they are pinched by polypropylene waved porous sheets 4, in the same mesh as the grid 2, of 1mm. wide and 0.5mm. thick and 0.8mm. in the height of waving in such a way that their intersections are adjusted to the center of mesh of the grid 2, whereafter these porous sheets 4 are ultrasonically welded at their intersections. An unpacked pole plate not yet chemically formed is now obtained by pasting an active substance 5 to thus prepared composite base and subjecting to preliminary drying, and the surfaces of this pole plate are pinched by polyester unwoven cloth 6 of 0.5mm. thick and their three open sides of periphery are sewed up with a thread 7 of polyester.

Description

【発明の詳細な説明】 本発明は鉛蓄電池用ペースト式正極板 (−スト式正極板という〕の改良に関するものであり、
その目的とするところ4よ活物質の脱落と極群Lgでの
シ覆−計とを防止して、そのサイクル寿命を改叢するこ
とにある。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to improvements in paste-type positive electrode plates (referred to as -st type positive electrode plates) for lead-acid batteries,
The purpose of this is to improve the cycle life of the active material by preventing it from falling off and covering the pole group Lg.

現在、鉛畜′−池は小形密閉電池から自動車用電池、動
力車用電池あるいは据鍮゛IIt池に至るまで機種や用
途が豊竺で、二次電池のなかでは最大の需要を示してい
る。鉛蓄゛題池の寿命は正極板により制限を受けること
が多く、また正極板の寿命は格子体の腐食および活物質
の軟化・脱落に起因することがほとんどである。特に電
気自動車やフォーク・−リフトなどの1池動力車用電池
のとと(放電深度ル(深い状況で使用されるものでは正
極活物質のd4により寿命となるケースが多い。
Currently, there are a wide variety of models and applications for lead batteries, ranging from small sealed batteries to automobile batteries, power vehicle batteries, and stationary brass batteries, and they are in the highest demand among secondary batteries. . The life of a lead storage battery is often limited by the positive electrode plate, and the life of the positive electrode plate is mostly due to corrosion of the grid and softening and falling off of the active material. In particular, batteries for single-cell power vehicles such as electric cars and forklifts (used in deep discharge conditions) often reach the end of their lifespan due to the d4 of the positive electrode active material.

この檜の脱落を防止する方法として現在、機械的手段が
用いられており、クラッド式電池のごとくガラスチュー
ブや有機ファイバーチューブなどで正極活物質を完全に
被包したクラッド式正極板の構造としたり、あるいはペ
ースト式電池においてもガラスマットによりそのペース
ト式正極板の活物質を押圧する耐振構造が採用されたり
している。
Mechanical means are currently being used to prevent this cypress from falling off, such as by creating a clad positive electrode plate structure in which the positive electrode active material is completely encapsulated in a glass tube or organic fiber tube, as in a clad battery. Alternatively, even in paste-type batteries, a vibration-resistant structure is adopted in which the active material of the paste-type positive electrode plate is pressed by a glass mat.

これらのうちクラッド式正極板はその活物質の脱落を抑
えるのに仔効でありペースト式正極板より長寿命である
が、容置の点でペースト式正極板に劣り、薄形の極板を
作りにくいことや製法が複雑なことなどの欠点もある。
Among these, the clad type positive electrode plate is effective in suppressing the falling off of the active material and has a longer life than the paste type positive electrode plate, but it is inferior to the paste type positive electrode plate in terms of storage, and a thin electrode plate is used. It also has drawbacks such as being difficult to make and the manufacturing method being complicated.

一方、ガラスマットを用いたペースト弐′−池のサイク
ル寿命はガラスマットを用いないものに比べてかなり改
善されるけれども、クラッド惑−池にははるかに及ばな
い。
On the other hand, although the cycle life of paste ponds using glass mats is considerably improved compared to those without glass mats, it is far less than that of clad metal ponds.

また特に近年においては電池の1iit効率を向トさせ
たいという要求が大きいか、ペースト式4池において格
子体のitの活物質と格子体とのitの合計に対する比
率が60%以Fになると、活物質と格子体との闇の密着
力が低下しペレット状の脱落が起こる欠点がある。
In addition, especially in recent years, there has been a strong demand to improve the 1iit efficiency of batteries, and when the ratio of the IT of the lattice body to the total IT of the active material and the lattice body becomes 60% or more in a paste-type 4-cell battery, There is a drawback that the adhesive strength between the active material and the lattice body decreases, resulting in pellet-like shedding.

本発明は以上の点に鑑みてなされたものであり、・ミー
スト式正極板に\いて活物質作持体として船δ遊よりな
る格子体に加えてボ・JオレフィンなどJ〕プラスチッ
ク製の波状多孔板を、更にこれらに加えて比佼的目の細
かいプラスチック製のネットを用いると共に、ポリエス
テ「しなどの不織布あるいは撒誰径1μ以丁のガラス繊
Cど主体とした微細カラスマントで完全に包装しニド4
成とすることにより、活物質の軟化・脱落をβ1るとと
もに改仮E部でのショートを防止しエ リサイクル寿命
・、?飛躍的に向上シせようとする。、のである。
The present invention has been made in view of the above points, and includes: - In addition to a lattice body made of boat δ as an active material supporting body in a Meast type positive electrode plate, a wavy plastic material such as olefin etc. In addition to the perforated plate, a plastic net with a relatively fine mesh is used, and a fine crow cloak made mainly of non-woven fabric such as polyester or glass fiber C with a diameter of 1 μm or more is completely used. Wrapping Nido 4
This reduces the softening and falling off of the active material, and also prevents short circuits in the modified E section and increases recycling life. Trying to improve dramatically. , is.

次に本発明をその一実施例を、\r第1・第2図に従っ
て説明する。すなわち該(′1面のペースト(C正極板
上の製造方法について説明rると、ま′4に3−2.6
wt%アンチモン合金よりなり、大きさがILIL)X
11J8圏で、23X25m+の目が16個形成さ4t
でおり、耳1を備えた格子体2を線径が0.2鴎、1、
Jの大きさがLsxi、5smのポリプロピレンよりt
ぶるイツト5で挾んだのち、さらに幅が1■4みか0.
 !xi tll、うねりの高さが0.8鰭であり、ま
た目の大きさが格子体2と同じポリプロピレン製の波状
多孔板4でその目の交差点が格子体2の目の中心に米る
ごとく挾み、該二枚の波状多孔板4をその交差点におい
て超音波溶着した。(のようにして作製した複合基体に
活物質5をベニストして予備乾燥をして未化成の未包装
極板を得、該極板の表面を岸みo、 b 、、のポリエ
ステル製の不織布6の闇に挾み、開いた三周をポリエス
テルの糸7で1合した。
Next, one embodiment of the present invention will be described with reference to FIGS. 1 and 2. That is, when explaining the manufacturing method for the paste on the first side (C on the positive electrode plate), 3-2.6
Made of wt% antimony alloy, size is ILIL)X
In 11J8 area, 16 eyes of 23X25m+ are formed 4t
The grid body 2 with the ears 1 has a wire diameter of 0.2, 1,
J size is Lsxi, t than 5sm polypropylene
After pinching with Bruitz 5, the width is 1 x 4 or 0.
! xi tll, the height of the undulations is 0.8 fins, and the eye size is the same as that of the grid body 2 with a corrugated porous plate 4 made of polypropylene, so that the intersection of the eyes is exactly in the center of the eyes of the grid body 2. The two corrugated perforated plates 4 were sandwiched together and ultrasonically welded at their intersections. The active material 5 is sprayed onto the composite substrate prepared as above and pre-dried to obtain an unformed and unwrapped electrode plate, and the surface of the electrode plate is coated with a polyester non-woven fabric of I sandwiched it in the darkness of No. 6 and tied the three open circles with polyester thread No. 7.

今、上記のごときペースト式正極板で活物質外地(初売
゛一時における活物質外地)が通常用いられている6、
45のものと、普通よりがなり高い4.L]のものとの
2種類を作製した。また波状多孔板やネットを用いず、
活物質外地が6.45のものと4.L)のものとを使用
した従来のペースト式正極板を作製した。なおこれらの
ペースト式極板はいずれも98pの活物質と7′5Fの
格子体を備えるものであった。これらのペースト式正極
板と負極板とを組み合わせて(12V−ssAH,)の
電池を試作して、サイクルサービス用鉛畜嘔池の試験規
格であるbBh5015−1974に基つく寿命試験に
供した。
Nowadays, active material outer layer (active material outer layer at first sale) is commonly used in paste-type positive electrode plates such as those mentioned above6.
4. 45, which is much higher than normal. Two types were made: one with L] and one with L. Also, without using corrugated perforated plates or nets,
4. The active material outer layer is 6.45. A conventional paste-type positive electrode plate was produced using the material of L). All of these paste-type electrode plates were equipped with a 98p active material and a 7'5F lattice. A (12V-ssAH,) battery was prototyped by combining these paste-type positive electrode plates and negative electrode plates, and was subjected to a life test based on bBh5015-1974, which is a test standard for lead storage ponds for cycle service.

すなわち本寿命試験は8.75Aで6時間放電、6.5
Aで5時間充電を1サイクルとして容置が定格の80 
’j6の28 AMに低rした時点を寿命とするもので
ある。
In other words, this life test was performed at 8.75 A for 6 hours, and at 6.5
The capacity is rated at 80, assuming that charging for 5 hours at A is one cycle.
The life is defined as the time when r drops to 28 AM on 'j6.

この寿命試験の結果を第6図6/、示す。なお活物貞外
比が4.0および6.45で本発明に基(ぺ一ント式正
橋板を用いた電池をそれ1′°れA−1おJ rA−2
、また活物質外地が4.0iよび6.4コー(・ちる従
来のペースト式極板を用いプ:4池をそれぞれB−1お
よびB−2とする。
The results of this life test are shown in FIG. It should be noted that batteries using a paint-type front bridge plate based on the present invention with a living matter ratio of 4.0 and 6.45 were used as batteries A-1 and J rA-2.
In addition, using conventional paste-type electrode plates with active material outer layers of 4.0i and 6.4cm, the 4-cell electrodes are designated as B-1 and B-2, respectively.

第う図より本発明に基く電池、〕)ナイクル寿命が従来
の上池よりはるかに優れCい乙こと、特に活吻簀外比が
4.0のものが6.45のものに比べ、更に擾れている
ことがわかる。すなわち活物質外地か4.0の従来のペ
ースト式正極板を用いた゛重油ではせいぜい450サイ
クルくらいの寿命しか得ら4Lないのに対して、本発明
に基くペースト式正極戊を用いた市池は1.500サイ
クル近い寿命を有する。
As shown in Figure 1, the life of the battery according to the present invention is far superior to that of the conventional Kamiike battery, and in particular, the life span of the battery according to the present invention is far superior to that of the conventional upper battery. I can see that it's messed up. In other words, with heavy oil using a conventional paste-type positive electrode plate with an active material of 4.0, the lifespan is only about 450 cycles at most, which is 4L, whereas the lifespan of the paste-type positive electrode plate based on the present invention is 4L. 1. Has a lifespan of nearly 500 cycles.

前置が672のエキスバンドグリッドからなる格子体を
用い、さらに活物質の重置が9Byで波状多孔板とネッ
トとを加えたプラスチック部分の、I!盪が12f!で
あり、その他については′電池A−2と同一の、本発明
に基くペースト式正極板を用いた電池A−3を試作した
。また他は同一構造で、・皮状多孔板およびネットを配
していない点だけが異なる本発明に基かないペースト式
正極板を用いた電池B−3を試作した。すなわちこれら
の4池A−5,B−5ではそのペースト式正極板の活物
質と格子体との重量の合計に対する格子体の重量の比率
が約27.4%である。これらの電池A=5、B−6に
ついて5BA5013−1974に基く寿命試験を行な
った。このときの結果を弔4図に示す。
Using a grid body consisting of an expanded grid with a preposition of 672, the active material is superimposed by 9 By, and a plastic part with a corrugated perforated plate and a net is used. 2 is 12f! A prototype battery A-3 was manufactured using a paste-type positive electrode plate based on the present invention, which was otherwise the same as battery A-2. In addition, a battery B-3 was prototyped using a paste-type positive electrode plate that was not based on the present invention and had the same structure except that no porous skin plate or net was provided. That is, in these four ponds A-5 and B-5, the ratio of the weight of the lattice body to the total weight of the active material and the lattice body of the paste type positive electrode plate was about 27.4%. A life test was conducted on these batteries A=5 and B-6 based on 5BA5013-1974. The results at this time are shown in Figure 4.

第4図より本発明に基くペースト式正極板を用いた電池
の性貸に与える効果は、ペースト式正極板の活物質と格
子体とのJliiの合計に対する格子体の重量の比率が
25%程度になるとさらに顕著になることがわかる。す
なわちこの比率が25%以丁になると従来構造のペース
ト式正極板では鉛a金よりなる格子体の活物質保持能力
が低ドし、一般にサイクル寿命は短くなる。一方、本発
明に廣くペースト式正極板を用いた電池はこの比率が2
5%になってもサイクル寿命は通常の格子体のit比率
を1する正極板を用いた電池とほとんど変わらない。な
おこの比率が15%以下になると格子体の腐食により寿
命に悪影響を与えやすいので、この比率は15%以上、
60%以下にするのが望ましい。
Figure 4 shows that the effect on the performance of the battery using the paste type positive electrode plate based on the present invention is that the ratio of the weight of the lattice body to the total Jlii of the active material of the paste type positive electrode plate and the lattice body is about 25%. It can be seen that it becomes even more noticeable. That is, when this ratio becomes 25% or more, in a paste-type positive electrode plate having a conventional structure, the ability of the lattice body made of lead-alpha gold to retain the active material decreases, and the cycle life generally becomes short. On the other hand, in the battery using the paste-type positive electrode plate according to the present invention, this ratio is 2.
Even if the ratio is 5%, the cycle life is almost the same as a battery using a positive electrode plate with an ordinary grid with an IT ratio of 1. If this ratio is less than 15%, corrosion of the lattice body tends to have a negative effect on the lifespan, so this ratio should be more than 15%,
It is desirable to keep it below 60%.

以と、本発明によれば活物質の脱落の極めて少fiいペ
ースト式藏池を得ることができる。なお本拍明において
は未包装極板をマットにて覆いその全周を封じる構成を
有している。これに対し従来1すL方のみ開放にした袋
状のセパレータで極板を包装する構成はすでに実用化さ
れているが、この構成では充放電サイクルの経過ととも
に微細化した正極活物質が充電時のガス発生により゛電
解液中に浮遊し、残った正極活物質の軟化を進行させる
とともに、負極板上部に析出してショートにより4池の
寿命を縮めることがあったっそこで本発明では極板上部
も封じることにより、活物質の移動を抑えるとともに極
群上部でのシミr防止をも図ることができる構成を採用
している。
In other words, according to the present invention, it is possible to obtain a paste-type kuraike with extremely low shedding of the active material. In this case, the unwrapped electrode plate is covered with a mat to seal its entire circumference. On the other hand, a conventional configuration in which the electrode plate is packaged with a bag-like separator with only the L side open has already been put into practical use, but in this configuration, the positive electrode active material, which becomes finer as the charge/discharge cycle progresses, is released during charging. Due to the generation of gas, it floats in the electrolyte, softens the remaining positive electrode active material, and deposits on the upper part of the negative electrode plate, shortening the life of the 4 cells due to short circuit.Therefore, in the present invention, the upper part of the electrode plate is By sealing the electrodes, a structure is adopted that can suppress the movement of the active material and also prevent stains on the upper part of the electrode group.

なお上記実施例では未包装極板を覆う材料としてポリエ
ステル製の不織布を用いたが、繊維径1声以下のガラス
繊維を主体とする微細ガラスマットを用い四周をエポキ
シ系樹脂で固めた場合も同様な効果が得られる。更に未
包装極板を化成したのち、マットにより覆う製造をも採
用できる。
In the above example, a polyester non-woven fabric was used as the material to cover the unwrapped electrode plate, but the same effect can be obtained if a fine glass mat made mainly of glass fibers with a fiber diameter of one tone or less is used and the four peripheries are hardened with epoxy resin. You can get the following effect. Furthermore, it is also possible to adopt a method in which an unwrapped electrode plate is chemically converted and then covered with a mat.

以上述べたように本発明に基くペースト式正極板を用い
た電池は、従来の゛電池に比較してサイクル寿命が飛躍
的に向丘し、特に電池動力車用電池の正極板として最適
と考えられ、その工業tの価値は甚だ大である。
As described above, the battery using the paste-type positive electrode plate based on the present invention has a dramatically improved cycle life compared to conventional batteries, and is considered to be particularly suitable as a positive electrode plate for batteries for battery-powered vehicles. , its industrial value is enormous.

【図面の簡単な説明】[Brief explanation of the drawing]

!s1、第2図は本発明によるペースト式正極板のそれ
ぞれ一部破断正面図と要部側断面図、第6図、第4図は
本発明によるペースト式正極板を用いた鉛蓄電池と従来
の鉛蓄電池との寿命特性の比較図である。 第 1 図 第2−4 第 34 500    1000    1500寸tイク゛し
;じt、−−1 第4図 サイクル数(−)
! s1 and 2 are a partially cutaway front view and a side sectional view of a main part of a paste-type positive electrode plate according to the present invention, and FIGS. 6 and 4 are a lead-acid battery using a paste-type positive electrode plate according to the present invention and a conventional one. It is a comparison diagram of life characteristics with a lead-acid battery. Fig. 1 Fig. 2-4 Fig. 34 500 1000 1500 inch t cycle;

Claims (1)

【特許請求の範囲】 1)プラスチック製の波状多孔板で鉛合金からなる格子
体を挾んだ複合基体に活物質をペーストした未包装極板
の表面を、不織布マットあるいは繊維径1μ以下のガラ
ス繊維を主体とする微細ガラスマットで覆い、該マット
の周囲を耐酸性の糸での縫合、熱溶着あるいはエポキシ
樹脂で接着により封じることを特徴とする鉛蓄電池用ペ
ースト式正極板。 2)線径が0.5■以下のプラスチック製のネットで格
子体を挾み、更に該格子体を波状多孔板で挾んだことを
特徴とする特許請求の範囲第1項に記載の鉛蓄電池用ペ
ースト式正極板。 6)活物質外比が4.0以上であることを特徴とする特
許請求の範囲第1項あるいは第2項に記載の鉛蓄電池用
ペースト式正極板。 4)活物質と格子体との重量の合計に対する格子体の重
量の比率が15〜50%であることを特徴とする特許請
求の範囲第1項ないし第6項のいずれかに記載の鉛蓄電
池用ペースト式正極板。
[Claims] 1) The surface of an unwrapped electrode plate, in which an active material is pasted on a composite substrate in which a lattice made of lead alloy is sandwiched between corrugated plastic porous plates, is covered with a non-woven mat or glass with a fiber diameter of 1 μm or less. A paste-type positive electrode plate for a lead-acid battery, characterized in that it is covered with a fine glass mat mainly composed of fibers, and the periphery of the mat is sealed by suturing with acid-resistant thread, heat welding, or adhesion with epoxy resin. 2) The lead according to claim 1, characterized in that the lattice body is sandwiched between plastic nets having a wire diameter of 0.5 mm or less, and the lattice body is further sandwiched between corrugated perforated plates. Paste type positive electrode plate for storage batteries. 6) The paste-type positive electrode plate for a lead-acid battery according to claim 1 or 2, wherein the active material external ratio is 4.0 or more. 4) The lead-acid battery according to any one of claims 1 to 6, wherein the ratio of the weight of the lattice body to the total weight of the active material and the lattice body is 15 to 50%. Paste type positive electrode plate.
JP56157930A 1981-10-02 1981-10-02 Paste made positive pole plate of lead storage battery Pending JPS5859559A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56157930A JPS5859559A (en) 1981-10-02 1981-10-02 Paste made positive pole plate of lead storage battery

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56157930A JPS5859559A (en) 1981-10-02 1981-10-02 Paste made positive pole plate of lead storage battery

Publications (1)

Publication Number Publication Date
JPS5859559A true JPS5859559A (en) 1983-04-08

Family

ID=15660575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56157930A Pending JPS5859559A (en) 1981-10-02 1981-10-02 Paste made positive pole plate of lead storage battery

Country Status (1)

Country Link
JP (1) JPS5859559A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5914053A (en) * 1995-11-27 1999-06-22 Shin-Etsu Handotai Co., Ltd. Apparatus and method for double-sided polishing semiconductor wafers
US8002610B2 (en) 1999-05-17 2011-08-23 Sumitomo Mitsubishi Silicon Corporation Double side polishing method and apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5914053A (en) * 1995-11-27 1999-06-22 Shin-Etsu Handotai Co., Ltd. Apparatus and method for double-sided polishing semiconductor wafers
US8002610B2 (en) 1999-05-17 2011-08-23 Sumitomo Mitsubishi Silicon Corporation Double side polishing method and apparatus

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