JPS5855358U - 高真空装置用試料出入機構 - Google Patents

高真空装置用試料出入機構

Info

Publication number
JPS5855358U
JPS5855358U JP15169981U JP15169981U JPS5855358U JP S5855358 U JPS5855358 U JP S5855358U JP 15169981 U JP15169981 U JP 15169981U JP 15169981 U JP15169981 U JP 15169981U JP S5855358 U JPS5855358 U JP S5855358U
Authority
JP
Japan
Prior art keywords
high vacuum
plates
unloading mechanism
sample loading
vacuum equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15169981U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6237327Y2 (OSRAM
Inventor
良治 高沢
Original Assignee
日電アネルバ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電アネルバ株式会社 filed Critical 日電アネルバ株式会社
Priority to JP15169981U priority Critical patent/JPS5855358U/ja
Publication of JPS5855358U publication Critical patent/JPS5855358U/ja
Application granted granted Critical
Publication of JPS6237327Y2 publication Critical patent/JPS6237327Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP15169981U 1981-10-13 1981-10-13 高真空装置用試料出入機構 Granted JPS5855358U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15169981U JPS5855358U (ja) 1981-10-13 1981-10-13 高真空装置用試料出入機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15169981U JPS5855358U (ja) 1981-10-13 1981-10-13 高真空装置用試料出入機構

Publications (2)

Publication Number Publication Date
JPS5855358U true JPS5855358U (ja) 1983-04-14
JPS6237327Y2 JPS6237327Y2 (OSRAM) 1987-09-24

Family

ID=29944383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15169981U Granted JPS5855358U (ja) 1981-10-13 1981-10-13 高真空装置用試料出入機構

Country Status (1)

Country Link
JP (1) JPS5855358U (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258853U (OSRAM) * 1985-10-02 1987-04-11
JPH01170900U (OSRAM) * 1988-05-19 1989-12-04

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258853U (OSRAM) * 1985-10-02 1987-04-11
JPH01170900U (OSRAM) * 1988-05-19 1989-12-04

Also Published As

Publication number Publication date
JPS6237327Y2 (OSRAM) 1987-09-24

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