JPS5853140A - イオン発生装置 - Google Patents

イオン発生装置

Info

Publication number
JPS5853140A
JPS5853140A JP56151389A JP15138981A JPS5853140A JP S5853140 A JPS5853140 A JP S5853140A JP 56151389 A JP56151389 A JP 56151389A JP 15138981 A JP15138981 A JP 15138981A JP S5853140 A JPS5853140 A JP S5853140A
Authority
JP
Japan
Prior art keywords
cathode
anode
ion
hollow part
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56151389A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0255897B2 (cs
Inventor
Katsuhiro Kageyama
影山　賀都鴻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56151389A priority Critical patent/JPS5853140A/ja
Publication of JPS5853140A publication Critical patent/JPS5853140A/ja
Publication of JPH0255897B2 publication Critical patent/JPH0255897B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP56151389A 1981-09-26 1981-09-26 イオン発生装置 Granted JPS5853140A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56151389A JPS5853140A (ja) 1981-09-26 1981-09-26 イオン発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56151389A JPS5853140A (ja) 1981-09-26 1981-09-26 イオン発生装置

Publications (2)

Publication Number Publication Date
JPS5853140A true JPS5853140A (ja) 1983-03-29
JPH0255897B2 JPH0255897B2 (cs) 1990-11-28

Family

ID=15517509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56151389A Granted JPS5853140A (ja) 1981-09-26 1981-09-26 イオン発生装置

Country Status (1)

Country Link
JP (1) JPS5853140A (cs)

Also Published As

Publication number Publication date
JPH0255897B2 (cs) 1990-11-28

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