JPS5852282Y2 - Vacuum deposition equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION This invention relates to a vacuum evaporation apparatus, and particularly to a vacuum evaporation apparatus that is capable of completely performing evaporation on the curved surface when a part of the member to be evaporated has a curved surface.

Conventionally, a member to be evaporated (hereinafter referred to as a wark) has been used.

) An apparatus as shown in FIG. 1 is used to deposit a desired deposition substance on the substrate.

The illustrated device is, for example, an apparatus for performing aluminum vapor deposition in a wafer processing process, and a wafer 2 is set on an umbrella-shaped wafer holding plate 1 having a large number of stepped circular holes equally spaced on a concentric circumference. The three holding plates 1 on which the wafers are set are brought into contact with the annular guide at their respective outer peripheries, and the support shaft of the holding plate 1 is supported by the upper annular rail 3 via a small wheel attached thereto. It is loaded into the vacuum chamber 4 so that it is placed vertically on the regular tetrahedron.

Then, when the vacuum chamber 4 is brought into a vacuum state and the annular guide is rotated in the direction of the arrow, each of the holding plates 1 revolves around itself while rotating in the direction of the arrow. It is uniformly deposited on the back side of the evaporator.

In this case, the reason why aluminum is uniformly deposited is that the shape of the wark 2 is a flat plate, and therefore, the incident angle of the deposited metal fine particles with respect to the surface to be deposited does not become larger than 45 to 50 degrees.

By the way, Wark 2 is above, for example. In the case of a parabolic reflector with a fairly large cut at the bottom, when aluminum is deposited on the left and right parabolic concave surfaces, it is held by a rotating disk 6 rotating in a vacuum chamber 4, as shown in FIG. When attempting to evaporate aluminum evaporated from the evaporation source 5 onto the concave surface of the wark 2 by attaching the warks 2 at equal intervals through tools (not shown) and rotating the rotating disk 6 in the direction of the arrow, In a considerable part of the wark 2 except for the bottom, the incident angle with respect to the surface to be deposited is 50° or more, so oblique deposition is performed as seen in the enlarged cross section of the deposited film in Figure 3. However, since the deposited metal grows directionally, the surface of the deposited film becomes cloudy, and the optical reflection characteristics are significantly reduced, making it impossible to obtain an excellent reflective mirror.

This idea is based on the conventional vacuum evaporation equipment in which the walk rotates, revolves, or only revolves around the evaporation source of the deposited metal.
This was done in order to solve the above-mentioned disadvantage that vapor deposition is difficult to be performed completely on this curved surface,
A vacuum chamber is provided with an evaporation source for a deposition substance provided in the center thereof, a holder for holding a member to be evaporated on a surface corresponding to the evaporation source, and this holder is installed and rotated from the outside, A rotating disk for revolving a member to be deposited around the evaporation source, and an apparatus for depositing the vapor deposition substance on the surface of the member to be vapor-deposited, wherein the device is installed on the rotating disk and a holding surface of the member to be vapor-deposited is A rocking mechanism that operates the holder to rock with respect to the evaporation source, and an interlocking mechanism between the rocking mechanism and the rotating disk, and the rotation of the rotating disk causes the vapor deposition target member to move. The vacuum evaporation apparatus is characterized in that the orbital motion with respect to the evaporation source and the vertical motion due to the rocking are simultaneously performed.

Hereinafter, an embodiment of the device according to the invention will be described with reference to the drawings.

Fig. 4 is a partial side view of the vacuum chamber used in this device, Fig. 5 is a partial plan view thereof, Fig. 6 is a plan view of the warc holding device attached to the vacuum chamber, and Fig. 7 is a side view of its external appearance. FIG. 8 is a plan view of the bottom surface viewed from below.

The vacuum chamber 4 is divided into parts for convenient insertion and removal of the wark 2, and flanges 7° and 7', which serve as joint parts, are connected to each other by hinges 8, and a seal backing 9 is fitted into one flange 7. When the respective divided chambers are joined together as an integral chamber, a vacuum is maintained within the chamber 4.

The upper part of the vacuum chamber 4 is integrally connected with casings 11 and 12 that house a variable speed motor 10 for externally driving a wake holding device 30 (to be described later), a deceleration mechanism, a sealing mechanism for its output shaft, and the like. It is fixed slightly offset from the center, and is configured to rotate a drive disk 13 located at the center of the internal ceiling of the vacuum chamber 4 via a pair of gears that mesh with each other.

A circular substrate 14 is fixed and protruded from the floor of the chamber 4, and four electrode rods 15 are implanted in the center of the substrate through an insulating member. A plurality of tungsten wires 16 are suspended in a three-dimensionally intersecting manner and constitute a main part of an evaporation source 17 to be described later.

On the outer edge of the substrate 14, a support stand 19 is provided with guide rollers 18 and 18' that freely rotate in the horizontal and vertical planes, and the support stand 19 is arranged on the same circumference at an angular interval of 120°, and the ring gear 20 is rotated around the center. The match has been fixed.

Note that 21 is a vacuum exhaust duct, and 22 is an electrode rod 1.
This is a terminal box that supplies power to 5.

The wark holding device 30 has an independent structure that can be easily set in the vacuum chamber 4, and as shown in FIG. 7, the wark is attached to the frame 31. A top plate 32 and a rotating disk 6 to which members that rotatably support it are respectively fixed.
, connection struts 33 equally spaced at 120° intervals, which also serve as support legs for connecting these two, and a wark mounting provided on the back surface of the rotating disk 6 are connected to the swing mechanism 34 of the frame 31,
It is comprised of an interlocking mechanism 35 that interlocks this mechanism with the rotational movement of the rotary disk 6.

In the wark installation, the frame 31 is rotatably supported by supporting shafts 36 and 37 fixed to the center sides of the upper frame and lower frame, respectively, to bearings 38 and 39 fixed to the top plate 329 and the rotating disk 6, respectively. By supporting the top plate 322 as described above,
It is rotatably attached to the rotary disk 6, and in this embodiment, the six warcs are attached so that the frame bodies 31 are arranged on the rotary disk 6 at equal angular intervals with respect to the center thereof. There is.

A crank arm 40 is fixed to each of the lower support shafts 37 of the frame 31 extending to the lower surface of the rotating disk 6.
A connecting plate 41 is connected to 0 by a pin.

The connecting plate 41 has a long hole 4 perpendicular to its longitudinal direction.
2 are provided with their centers aligned.

Furthermore, a gear 43 is rotatably provided on the lower surface of the rotating disk 6.
have their rotation centers substantially coincident with the center of the connecting plate 41, and are mounted on the same circumference at a distance of 120 degrees from each other, so that they can mesh simultaneously with the annular gear 20 fixed to the base plate 14 described above. has been done.

The gear 43 has tap holes drilled on one diameter at positions l and m away from the center of rotation on both sides, respectively, and in FIG.
A drive pin 44 having a roller that engages with 2 is screwed in and fixed.

Further, a driven piece 45 is fixed to the upper surface of the top plate 32, and a driving pin 46 is fixed to the aforementioned driving disc 13 so as to be engaged with this driven piece 45.

Now, the wark holding device 30 configured as described above is set in the vacuum chamber 4. To do this, the drive disk 13 is removed and the semicircular This wark holding device 30 is brought into the vacuum chamber 4 by passing the electrode rod 15 diagonally through the notch, and the rotating disk 6 is placed on the guide roller 18, 18' of the support base 19 by the fourth As shown in the figure, at the same time as they are brought into contact, the rotary disk 6 may be slightly swung left and right so that both the gears 43 mesh properly with the annular gear 20.

Next, cut a piece of high-purity aluminum to an appropriate length and attach it to the tungsten wire 16 of the electrode rod 15.
Evaporation source 17 is created by hanging a large number of objects bent into a letter shape at equal intervals.
shall be.

Reattach the removed drive disk 13.

On the other hand, for example, the wark 2 that is to be finished into a parabolic concave mirror with large cuts on the top and bottom is installed on the frame body 3 through a jig plate after the surface to be deposited is cleaned.
1, so that the surface to be evaporated faces the evaporation source 17.

Next, the operation of this device will be explained.

First, the flanges 7 and 7' of the vacuum chamber 4 are joined, locked to form a sealed container, and an exhaust system (not shown) is operated.
The inside of the vacuum chamber 4 is evacuated through the exhaust duct 21 to bring the vacuum chamber 4 into a vacuum state of about 10-5 to 10' Torr.

Next, the motor 10 is operated to rotate the drive disk 13 in a clockwise direction when viewed from above via the speed reduction mechanism and the pair of gears.

When the drive disk 13 rotates as described above, the drive pin 46
engages with the driven piece 45, the top plate 32 and the rotating disk 6 connected thereto via the connecting support 33 are connected to the top plate 32 and the rotating disk 6.
Since it is rotatably supported by the guide rollers 18, 18' of the support base 19, it also rotates clockwise.

Therefore, the warc attachment is held on the frame 31.

The warc 2 revolves around the evaporation source 17 in the same direction.

By the way, since the gear 20 is fixed to the board 14,
The gears 43 meshed with the gear 20 operate as planetary gears, and are rotated in the same direction while rotating clockwise when viewed from above.

The direction of rotation is the opposite direction in all cases in FIG. 8 when the rotary disk 6 is viewed from the back side, that is, the counterclockwise direction shown by the arrow.

By the way, a drive pin 44 eccentric by l is connected to the elongated hole 4 of the connecting plate 41 via a roller fitted into the drive pin 44 of the gear 43.
2, the rotation of the gear 43 in the counterclockwise direction causes the crank arms 34, which are connected by pins to both ends of the connecting plate 41, to first swing clockwise and then counterclockwise. let

This rocking motion of the crank arm 34 is repeated every rotation of the gear 43.

In this embodiment, the crank arm 34 swings clockwise and counterclockwise at a swing angle of 45° from the position shown in FIG. When fixed in position, the swing angle is 30
'It is meant to be.

Therefore, since the wark 2 is mounted so that the crank arm 40 is fixed to the support shaft 37 of the frame 31, the wark 2 is attached to the evaporation source 17 together with the frame 31.
Viewed from above from the state shown in Figure 6, which is directly facing the
While oscillating 45 degrees counterclockwise and then clockwise, the robot revolves in the clockwise direction indicated by the arrow.

In this way, the wark 2 is made to swing and revolve with respect to the evaporation source 17, and the electrode rod 15 is
V, about 600 Amp is supplied from the terminal box 22, and a current of 120 Amp is applied to each of the tungsten wires 16 suspended in five stages, for example, to resistance heat them, and heat and evaporate the aluminum piece hooked thereon. As a result, aluminum molecules are scattered from the evaporation source 17 due to thermal movement performed in the high vacuum space, and are deposited on the surface of the wark 2 to be evaporated, forming a thin film.

In this case, the angle of incidence of the aluminum fine particles on the parabolic concave surface of the wark 2 is 50' because the wark 2 repeatedly swings left and right by 45 degrees from the direction directly facing the evaporation source 17. without exceeding
Although the evaporation source 17 has a short linear shape, the wark 2 revolves around it, so that oblique evaporation is suppressed and a evaporated film surface with uniform optical reflection characteristics is formed.

If the shape of the wark 2 has a curved surface with a large radius of curvature, the left and right swing angle may be reduced to, for example, 30 degrees by changing the fixed position of the drive pin 44 relative to the gear 43 as described above.

As is clear from the above explanation, in the vacuum evaporation apparatus according to this invention, the member to be evaporated is made to revolve around the evaporation source of the evaporation material, and at the same time to perform swinging motion from side to side. Since the swing angle of the holder can be adjusted, even if the part to be deposited has a curved surface, it can be attached to the holder appropriately, and also By adjusting the left and right swing angles, the angle of incidence of the deposited fine particles on the surface to be deposited can be kept to a constant value.
Prevents cloudiness caused by oblique evaporation on the surface of the evaporated film,
Vapor deposition can be easily and reliably performed so that the surface of the vapor-deposited film has, for example, excellent optical reflection characteristics.

[Brief explanation of the drawing]

Figure 1 shows a member to be vapor-deposited that revolves around the evaporation source of the vapor-deposited substance.
A schematic explanatory diagram of a conventional device that performs rotational motion, FIG. 2 is a schematic explanatory diagram of a conventional device that performs only orbital motion, and FIG. 3 is a vapor deposited film formed by oblique vapor deposition. FIG. 4 is a partial side view of the vacuum chamber used in the embodiment device of this invention;
Fig. 5 is a partial plan view thereof, Fig. 6 is a plan view of the warc holding device installed in the vacuum chamber, Fig. 7 is a side view of its external appearance, and Fig. 8 is a plan view of its bottom looking up from below. be. 2... Member to be evaporated (warc), 4...
・Vacuum chamber, 6...Rotating disk, 10...
...Motor, 17... Evaporation source, 31...
・Holder (frame body for warc installation), 34...
Swing mechanism, 35... Interlocking mechanism.

Claims (1)

[Scope of utility model registration request] A vacuum chamber is provided with an evaporation source for a deposition substance provided in the center thereof, a holder for holding a member to be evaporated on a surface corresponding to the evaporation source, and a holder that is rotatably driven from the outside to evaporate the material. An apparatus for depositing the evaporation substance on the surface of the evaporation target member, comprising a rotating disk that revolves the evaporation target member around an evaporation source, wherein the holding surface of the evaporation target member that is installed on the rotation disk is connected to the evaporator. A rocking mechanism that operates the holder to rock with respect to the source, and an interlocking mechanism between the rocking mechanism and the rotating disk, and the rotation of the rotating disk causes the member to be evaporated to A vacuum evaporation apparatus characterized in that the orbital motion with respect to the evaporation source and the oscillating motion due to the rocking are performed simultaneously.