JPS5851441U - Sample exchange device for electron beam lithography equipment - Google Patents
Sample exchange device for electron beam lithography equipmentInfo
- Publication number
- JPS5851441U JPS5851441U JP14406781U JP14406781U JPS5851441U JP S5851441 U JPS5851441 U JP S5851441U JP 14406781 U JP14406781 U JP 14406781U JP 14406781 U JP14406781 U JP 14406781U JP S5851441 U JPS5851441 U JP S5851441U
- Authority
- JP
- Japan
- Prior art keywords
- exchange device
- electron beam
- beam lithography
- sample
- sample exchange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は試料交換装置の概略図、第２図は本考案の一実
施例を示す図である。
１・・・試料、２・・・試料収納箱、６・・・モータ、
７・・・リフト、１１・・・試料位置マーク、１２・・
・ネジ、１３・・・モータ動作信号、１４・・・微分回
路、１５・・・レベル検出回路、１６・・・位置マーク
信号＋、２０・・・円盤、２１・・・回転信号、２２・
・・位置信号、２３・・・速度制御、２４・・・受光素
子、２５・・・ゲート、２６・・・位置修正信号、２７
・・・比較回路、２８・・・スリット。FIG. 1 is a schematic diagram of a sample exchange device, and FIG. 2 is a diagram showing an embodiment of the present invention. 1... Sample, 2... Sample storage box, 6... Motor,
7...Lift, 11...Sample position mark, 12...
・Screw, 13... Motor operation signal, 14... Differential circuit, 15... Level detection circuit, 16... Position mark signal +, 20... Disc, 21... Rotation signal, 22...
...Position signal, 23...Speed control, 24...Light receiving element, 25...Gate, 26...Position correction signal, 27
...Comparison circuit, 28...slit.
Claims (1)
動を示すマークと、マークを検出する受発光素子より成
る試料交換装置において、試料収納箱の停止位置マーク
の幅に相当する移動マーク数の検出を行い、停止位置マ
ーク端検出時より移動マーク数により停止位置マークの
中心に停止させることを特徴とした電子線描画装置の試
料交換装置。In a sample exchange device consisting of a mark indicating the storage position of the sample storage box, a mark indicating the movement of the sample storage box, and a light emitting/receiving element that detects the mark, the number of moving marks corresponding to the width of the stop position mark of the sample storage box. A sample exchange device for an electron beam lithography apparatus, characterized in that the specimen is stopped at the center of the stop position mark according to the number of moving marks from when the end of the stop position mark is detected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14406781U JPS5851441U (en) | 1981-09-30 | 1981-09-30 | Sample exchange device for electron beam lithography equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14406781U JPS5851441U (en) | 1981-09-30 | 1981-09-30 | Sample exchange device for electron beam lithography equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5851441U true JPS5851441U (en) | 1983-04-07 |
Family
ID=29937034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14406781U Pending JPS5851441U (en) | 1981-09-30 | 1981-09-30 | Sample exchange device for electron beam lithography equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5851441U (en) |
-
1981
- 1981-09-30 JP JP14406781U patent/JPS5851441U/en active Pending
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