JPS5846443U - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPS5846443U
JPS5846443U JP14076481U JP14076481U JPS5846443U JP S5846443 U JPS5846443 U JP S5846443U JP 14076481 U JP14076481 U JP 14076481U JP 14076481 U JP14076481 U JP 14076481U JP S5846443 U JPS5846443 U JP S5846443U
Authority
JP
Japan
Prior art keywords
wafer
susceptor
guide groove
gas
semiconductor manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14076481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6240431Y2 (cg-RX-API-DMAC7.html
Inventor
田中　克道
Original Assignee
日本電気ホームエレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気ホームエレクトロニクス株式会社 filed Critical 日本電気ホームエレクトロニクス株式会社
Priority to JP14076481U priority Critical patent/JPS5846443U/ja
Publication of JPS5846443U publication Critical patent/JPS5846443U/ja
Application granted granted Critical
Publication of JPS6240431Y2 publication Critical patent/JPS6240431Y2/ja
Granted legal-status Critical Current

Links

JP14076481U 1981-09-22 1981-09-22 半導体製造装置 Granted JPS5846443U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14076481U JPS5846443U (ja) 1981-09-22 1981-09-22 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14076481U JPS5846443U (ja) 1981-09-22 1981-09-22 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS5846443U true JPS5846443U (ja) 1983-03-29
JPS6240431Y2 JPS6240431Y2 (cg-RX-API-DMAC7.html) 1987-10-16

Family

ID=29933909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14076481U Granted JPS5846443U (ja) 1981-09-22 1981-09-22 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS5846443U (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0475328A (ja) * 1990-07-18 1992-03-10 Toshiba Corp 半導体の処理方法およびその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0475328A (ja) * 1990-07-18 1992-03-10 Toshiba Corp 半導体の処理方法およびその装置

Also Published As

Publication number Publication date
JPS6240431Y2 (cg-RX-API-DMAC7.html) 1987-10-16

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