JPS5835898A - マイクロ波放電光源装置 - Google Patents
マイクロ波放電光源装置Info
- Publication number
- JPS5835898A JPS5835898A JP13388481A JP13388481A JPS5835898A JP S5835898 A JPS5835898 A JP S5835898A JP 13388481 A JP13388481 A JP 13388481A JP 13388481 A JP13388481 A JP 13388481A JP S5835898 A JPS5835898 A JP S5835898A
- Authority
- JP
- Japan
- Prior art keywords
- microwave
- discharge lamp
- detection level
- metal mesh
- mesh plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims description 39
- 239000002184 metal Substances 0.000 claims description 39
- 238000001514 detection method Methods 0.000 claims description 29
- 239000007789 gas Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000004804 winding Methods 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 238000009730 filament winding Methods 0.000 description 2
- 230000009931 harmful effect Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 231100000989 no adverse effect Toxicity 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- -1 mercury and iron Chemical compound 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- ONIBWKKTOPOVIA-UHFFFAOYSA-M prolinate Chemical compound [O-]C(=O)C1CCCN1 ONIBWKKTOPOVIA-UHFFFAOYSA-M 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Circuit Arrangements For Discharge Lamps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13388481A JPS5835898A (ja) | 1981-08-26 | 1981-08-26 | マイクロ波放電光源装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13388481A JPS5835898A (ja) | 1981-08-26 | 1981-08-26 | マイクロ波放電光源装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5835898A true JPS5835898A (ja) | 1983-03-02 |
| JPS6233718B2 JPS6233718B2 (enrdf_load_stackoverflow) | 1987-07-22 |
Family
ID=15115334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13388481A Granted JPS5835898A (ja) | 1981-08-26 | 1981-08-26 | マイクロ波放電光源装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5835898A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60235398A (ja) * | 1984-05-08 | 1985-11-22 | 三菱電機株式会社 | マイクロ波放電光源装置 |
| JPS6430770U (enrdf_load_stackoverflow) * | 1987-08-19 | 1989-02-27 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51145643U (enrdf_load_stackoverflow) * | 1975-05-16 | 1976-11-22 | ||
| JPS551393U (enrdf_load_stackoverflow) * | 1979-07-03 | 1980-01-07 |
-
1981
- 1981-08-26 JP JP13388481A patent/JPS5835898A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51145643U (enrdf_load_stackoverflow) * | 1975-05-16 | 1976-11-22 | ||
| JPS551393U (enrdf_load_stackoverflow) * | 1979-07-03 | 1980-01-07 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60235398A (ja) * | 1984-05-08 | 1985-11-22 | 三菱電機株式会社 | マイクロ波放電光源装置 |
| JPS6430770U (enrdf_load_stackoverflow) * | 1987-08-19 | 1989-02-27 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6233718B2 (enrdf_load_stackoverflow) | 1987-07-22 |
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