JPS5835898A - マイクロ波放電光源装置 - Google Patents

マイクロ波放電光源装置

Info

Publication number
JPS5835898A
JPS5835898A JP13388481A JP13388481A JPS5835898A JP S5835898 A JPS5835898 A JP S5835898A JP 13388481 A JP13388481 A JP 13388481A JP 13388481 A JP13388481 A JP 13388481A JP S5835898 A JPS5835898 A JP S5835898A
Authority
JP
Japan
Prior art keywords
microwave
discharge lamp
detection level
metal mesh
mesh plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13388481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6233718B2 (cs
Inventor
憲治 吉沢
勲 正田
児玉　仁史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13388481A priority Critical patent/JPS5835898A/ja
Publication of JPS5835898A publication Critical patent/JPS5835898A/ja
Publication of JPS6233718B2 publication Critical patent/JPS6233718B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Circuit Arrangements For Discharge Lamps (AREA)
JP13388481A 1981-08-26 1981-08-26 マイクロ波放電光源装置 Granted JPS5835898A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13388481A JPS5835898A (ja) 1981-08-26 1981-08-26 マイクロ波放電光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13388481A JPS5835898A (ja) 1981-08-26 1981-08-26 マイクロ波放電光源装置

Publications (2)

Publication Number Publication Date
JPS5835898A true JPS5835898A (ja) 1983-03-02
JPS6233718B2 JPS6233718B2 (cs) 1987-07-22

Family

ID=15115334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13388481A Granted JPS5835898A (ja) 1981-08-26 1981-08-26 マイクロ波放電光源装置

Country Status (1)

Country Link
JP (1) JPS5835898A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60235398A (ja) * 1984-05-08 1985-11-22 三菱電機株式会社 マイクロ波放電光源装置
JPS6430770U (cs) * 1987-08-19 1989-02-27

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145643U (cs) * 1975-05-16 1976-11-22
JPS551393U (cs) * 1979-07-03 1980-01-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145643U (cs) * 1975-05-16 1976-11-22
JPS551393U (cs) * 1979-07-03 1980-01-07

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60235398A (ja) * 1984-05-08 1985-11-22 三菱電機株式会社 マイクロ波放電光源装置
JPS6430770U (cs) * 1987-08-19 1989-02-27

Also Published As

Publication number Publication date
JPS6233718B2 (cs) 1987-07-22

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