JPS5830140Y2 - 冷却トラップ装置 - Google Patents

冷却トラップ装置

Info

Publication number
JPS5830140Y2
JPS5830140Y2 JP1976009165U JP916576U JPS5830140Y2 JP S5830140 Y2 JPS5830140 Y2 JP S5830140Y2 JP 1976009165 U JP1976009165 U JP 1976009165U JP 916576 U JP916576 U JP 916576U JP S5830140 Y2 JPS5830140 Y2 JP S5830140Y2
Authority
JP
Japan
Prior art keywords
passage
tank
vacuum
trap body
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976009165U
Other languages
English (en)
Japanese (ja)
Other versions
JPS52102014U (enrdf_load_html_response
Inventor
時重 木下
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP1976009165U priority Critical patent/JPS5830140Y2/ja
Publication of JPS52102014U publication Critical patent/JPS52102014U/ja
Application granted granted Critical
Publication of JPS5830140Y2 publication Critical patent/JPS5830140Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1976009165U 1976-01-31 1976-01-31 冷却トラップ装置 Expired JPS5830140Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976009165U JPS5830140Y2 (ja) 1976-01-31 1976-01-31 冷却トラップ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976009165U JPS5830140Y2 (ja) 1976-01-31 1976-01-31 冷却トラップ装置

Publications (2)

Publication Number Publication Date
JPS52102014U JPS52102014U (enrdf_load_html_response) 1977-08-03
JPS5830140Y2 true JPS5830140Y2 (ja) 1983-07-02

Family

ID=28469594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976009165U Expired JPS5830140Y2 (ja) 1976-01-31 1976-01-31 冷却トラップ装置

Country Status (1)

Country Link
JP (1) JPS5830140Y2 (enrdf_load_html_response)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4527484Y1 (enrdf_load_html_response) * 1969-12-19 1970-10-23

Also Published As

Publication number Publication date
JPS52102014U (enrdf_load_html_response) 1977-08-03

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