JPS5828711Y2 - Vacuum diffusion welding equipment - Google Patents

Description

[Detailed description of the invention] This invention is an apparatus for performing so-called vacuum diffusion welding, in which objects to be welded are joined in a vacuum by applying pressure while maintaining a high temperature. While introducing a means to perform ion bombardment treatment to purify the joint surface of the welded object, a pretreatment chamber,
The present invention relates to an apparatus having a structure in which a welding chamber and a passage between the pretreatment chamber and the welding chamber are maintained in a vacuum state.

The purpose of this invention is to perform ion bombardment treatment as a pretreatment of the welding surface in order to stabilize the welding surface of the object to be welded and perform a reliable welding process in the above-mentioned apparatus.
In addition, the present invention provides a vacuum diffusion welding apparatus in which the pretreatment process and the welding process are all processed in a vacuum chamber that is shut off from vacuum. Basically, each process is connected to a vacuum exhaust line. a pretreatment chamber and a welding chamber, the pretreatment chamber and the welding chamber are connected to each other so as to be airtightly isolated by a communication passage provided with an airtight isolation mechanism;
In the pretreatment chamber, a pair of objects to be welded to be welded are each fixedly supported so as to be electrically connected, and a pair of support means each connected to a power source are provided, and the objects to be welded supported by each of the support means are connected to each other. The vacuum diffusion welding apparatus is provided with an elevating means for moving the object close to and away from the welding chamber, and a conveying means for transporting the object to be welded between the pretreatment chamber and the welding chamber.

Hereinafter, the vacuum diffusion welding apparatus of this invention will be explained in detail based on an embodiment shown in the drawings.

In the figure, 1 is a pre-processing chamber, 2 is a welding chamber, and 3 is a communication passageway connecting the processing chamber 1 and the welding chamber 2, each of which is connected to a vacuum exhaust line 4 so that the inside of each chamber can be maintained in a vacuum state. It has become.

Reference numeral 5 denotes an airtight shutoff mechanism provided in the communication passage 3, which is used to airtightly shut off the pretreatment chamber 1 and the welding chamber 2.

In the airtight blocking mechanism, 6 is a blocking plate, 7 is a guide rail,
Reference numeral 8 denotes a roller, and the blocking plate 6 is assembled so as to be movable up and down along the guide rail 7.

A trolley guide rail 29 is provided for transporting objects to be welded from the pretreatment chamber to the welding chamber through the pretreatment chamber 1, the communication path 3, and the welding chamber 2.

Next, the configuration of the pretreatment chamber will be explained.

This pretreatment chamber 1 is normally provided with a delivery port 9 in its upper part, which is opened when storing a pair of welded objects W1 and W2 to be welded.

In the upper part of the pretreatment chamber 1, there is an upper welding object support 10 for supporting the upper welding object Wl, and in the lower part of the room, there is a lower welding object support for supporting the lower welding object W2. A stand 11 is provided respectively.

These support stands IQ, 11 are a pair, and are constituted by, for example, a magnetic chuck.

This upper and lower support stand 10.11 supports the pair of objects to be welded W1. ．． They are formed so as to be able to support W2 in an electrically connected state, and are connected to the power source 12, respectively.

With this configuration, the upper and lower support bases 10
．． 11, the objects to be welded Wl and W2 function as a pair of discharge electrodes.

On the other hand, 13 is a welding object lifting means, and a lifting table 14
The lower support stand 11 is controlled to move up and down, for example, by a hydraulic cylinder 15 so as to take two positions, one close to and one away from the upper support stand 10.

The upper support table 10 and the processing chamber wall surface 16 and the lower support table 11 and the elevator table 14 are insulated by insulating members, respectively.

17 is a filter for capturing fine dust, and 18 is a compressor.

Reference numeral 19 denotes a means for transporting objects to be welded, which includes a substantially U-shaped transport cart 20 driven by a hydraulic cylinder or other reciprocating drive mechanism (not shown);
The welding chamber 2 is composed of a pretreatment chamber 1 that guides the welding chamber 1, a communication path 3, and a guide rail 29 for a truck that passes through the welding chamber 2.

21 is a roller provided on the truck.

Next, the configuration of the welding chamber 2 will be explained.

This welding chamber 2 is a chamber for welding the upper and lower objects to be welded, which have been brought into the pretreatment chamber 1, in a heated and pressurized state, and is equipped with a heating mechanism and a pressurizing mechanism. including.

22 is a top and bottom heating body, 23 is a circumferential side heating body, and 24 is a proficiency plate.

On the other hand, the heating element is held by a heating element frame 25 and is formed to be movable up and down along a heating element frame elevating shaft 26.

27 is a pressurizing shaft, and 28 is a press guide column.

In the apparatus of this invention having the above structure, the dynamic use thereof will be explained in sequence.

First, a pair of welded objects Wl and W2 to be welded are placed on the lower support base 11 with their welding surfaces joined.

In this state, the hydraulic cylinder 15 is operated to transport the upper welding object Wl to a position where it contacts the upper support base 10.

Upper welding object W carried to a position in contact with upper support stand 10
1, for example, by the action of the magnetic force of the upper support base 10,
It is securely fixed to the upper support base 10 and supported in an electrically conductive state.

Next, by releasing the input pressure of the hydraulic cylinder 150, the upper welded object W1 remains on the upper support 10 and the lower support 11 and the lower g4 welded object W2 are returned to their original positions.

In this state, the opposing welding surfaces of the upper and lower welded objects are subjected to surface cleaning treatment.

That is, in this invention, ion bombardment treatment is applied as the cleaning treatment, and the treatment method is performed according to the following procedure.

A high voltage of 3 KV is applied to the upper welding object Wl and the lower welding object W2, which are separated from each other by a predetermined distance and held insulated from the apparatus structure.

In this case, the pressure in the pretreatment chamber where the welding object is placed is set in advance to the glow discharge generation pressure, for example, 10-2.
By maintaining the temperature at ~10-3 Torr, glow discharge occurs between both welded objects.

As is well known, glow discharge is caused by the bombardment of cations.
It is a type of self-sustaining discharge that is sustained by the emission of secondary electrons from the cathode.

Thus, by suitably changing the direction of the potential, the surface of any welding object can be cleaned by bombardment with positive ions.

(Regarding the direction of the potential, the processing chamber wall surface, the upper welding object,
It is sufficient that at least the upper and lower welding objects among the lower welding objects have time to become cathodes with respect to the other three objects.

) After the ion bombardment surface treatment, the evacuation is interrupted and the inert gas is sprayed by the compressor 18 through the gas injection nozzle (the injection port is directed towards the treated surface of the welded object, upper and lower) onto the treated surface of the welded object. At the same time, gas is recycled and used from a part of the pretreatment chamber 1 through a duct connected to the suction side of the compressor via a filter 17 or a trap.

Fine dust on the surface of the welding object and in the processing chamber is filtered through filter 1.
Captured on 7th.

When the surface treatment of the welded object in the pretreatment chamber is completed, the lifting platform 1
4 is raised, and the treated surface of the upper welded object W1 and the treated surface of the lower welded object are overlapped.

In this state, the lifting table is lowered and both welded objects are placed on the transfer carriage.

The upper and lower welded objects brought onto the conveyance path are placed on a trolley 20 and transported toward the welding room.

Of course, during the transfer period, the hermetic shutoff mechanism 5 is in operation and the communication path 3 is open.

After the cart 20 conveys the welding object W to the center of the welding room, it leaves the welding object in the welding room and leaves.

Next, the welding object in the welding chamber is pressurized and heated to perform the desired welding process.

When the welding process is completed, the cart 20 enters the welding chamber again and transfers the welded object to the pretreatment chamber together with the welded object.

The vacuum diffusion welding device of this invention with the above configuration can ensure a clean welding surface free of impurities by applying ion bombardment treatment to the welding surface of the object to be welded, and can also perform pre-treatment. The welding chamber, the welding chamber, the communication path between the pretreatment chamber and the welding chamber are connected by vacuum exhaust lines, and the entire process can be performed in the vacuum chamber, and the vacuum diffusion welding device performs highly reliable welding. Can be done.

In addition, by introducing ion bombardment treatment as a pretreatment, it is easy to maintain the pretreatment chamber and welding chamber in a vacuum at all times, resulting in less heat loss and the use conditions of heat-resistant parts being constant. As a whole, the device can be constructed at low cost.

[Brief explanation of drawings]

FIG. 1 is a plan sectional view of a vacuum diffusion welding apparatus according to this invention, and FIG. 2 is a side sectional view. 1...Pretreatment chamber, 2...Welding room, 3.
...Communication path, 4...Vacuum exhaust line, 5
... Airtight shutoff mechanism, 10°11 ... Welded object support stand, 13 ... Lifting means, 19 ...
...Transportation means, 20...Dolly for transporting the object to be welded, Wl, W2...Object to be welded.

Claims (1)

[Scope of utility model registration request] A pretreatment chamber and a welding chamber are each connected to a vacuum exhaust line, and the pretreatment chamber and the welding chamber are connected to each other in an airtight manner by a communication passage provided with an airtight isolation mechanism, and the In the pretreatment chamber, a pair of objects to be welded to be welded are each fixedly supported so as to be electrically connected, and a pair of supporting means each connected to a power source are provided, and the objects to be welded supported by each of the supporting means are connected to each other. A vacuum diffusion welding apparatus, further comprising: elevating means for moving the object close to and away from the welding chamber; and a conveying means for transporting the object to be welded between the pretreatment chamber and the welding chamber.