JPS5826656U - Sample device in multi-element simultaneous analysis device - Google Patents

Sample device in multi-element simultaneous analysis device

Info

Publication number
JPS5826656U
JPS5826656U JP11951581U JP11951581U JPS5826656U JP S5826656 U JPS5826656 U JP S5826656U JP 11951581 U JP11951581 U JP 11951581U JP 11951581 U JP11951581 U JP 11951581U JP S5826656 U JPS5826656 U JP S5826656U
Authority
JP
Japan
Prior art keywords
sample
simultaneous analysis
pallet
element simultaneous
analysis device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11951581U
Other languages
Japanese (ja)
Inventor
渡辺 忠悟
Original Assignee
セイコーインスツルメンツ株式会社
新日本製「鉄」株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコーインスツルメンツ株式会社, 新日本製「鉄」株式会社 filed Critical セイコーインスツルメンツ株式会社
Priority to JP11951581U priority Critical patent/JPS5826656U/en
Publication of JPS5826656U publication Critical patent/JPS5826656U/en
Pending legal-status Critical Current

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  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来用いられていた試料装置を示すための斜面
図、第2図は本考案による試料装置を示すための斜面図
、第3図は要部を示す断面図、第4図は多元素同時分析
装置を示す断面図である。 10・・・XYステージ、11・・・試料、12・・・
パレット、15・・・ホルダ、16・・・標準サンプル
、16A・・・試料室、17・・・シャッタ、1B・・
・予備試料室、19・・・開口部、20・・・電子銃、
21.22・・・分光器、23・・・試料交換部材、2
4・・・蓋部である。
Fig. 1 is a perspective view showing a conventional sample device, Fig. 2 is a perspective view showing a sample device according to the present invention, Fig. 3 is a sectional view showing the main parts, and Fig. 4 is a perspective view showing a sample device according to the present invention. FIG. 1 is a cross-sectional view showing a simultaneous elemental analysis device. 10...XY stage, 11...sample, 12...
Pallet, 15...Holder, 16...Standard sample, 16A...Sample chamber, 17...Shutter, 1B...
・Preliminary sample chamber, 19...opening, 20...electron gun,
21.22... Spectrometer, 23... Sample exchange member, 2
4... Lid part.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 電子銃から照射された電子線を試料に照射し、この試料
からの螢光X線を検出するものにおいて、断面がほぼU
字型をなすパレット内に設けられた゛  鉄部と、この
パレット内に設けられ複数の標準サンプルを有するホル
ダとを備え、パレットの移動のみで試料と標準サンプル
を同時に交換可能な構成にしたことを特徴とする多元素
同時分析装置。
A device that irradiates a sample with an electron beam from an electron gun and detects fluorescent X-rays from the sample, and the cross section is approximately U.
It is equipped with a metal part installed inside a letter-shaped pallet and a holder installed inside the pallet that holds multiple standard samples, making it possible to exchange samples and standard samples at the same time simply by moving the pallet. Features: Multi-element simultaneous analysis device.
JP11951581U 1981-08-12 1981-08-12 Sample device in multi-element simultaneous analysis device Pending JPS5826656U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11951581U JPS5826656U (en) 1981-08-12 1981-08-12 Sample device in multi-element simultaneous analysis device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11951581U JPS5826656U (en) 1981-08-12 1981-08-12 Sample device in multi-element simultaneous analysis device

Publications (1)

Publication Number Publication Date
JPS5826656U true JPS5826656U (en) 1983-02-21

Family

ID=29913574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11951581U Pending JPS5826656U (en) 1981-08-12 1981-08-12 Sample device in multi-element simultaneous analysis device

Country Status (1)

Country Link
JP (1) JPS5826656U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04120365U (en) * 1991-04-15 1992-10-28 理学電機工業株式会社 Calibration device for X-ray analysis

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04120365U (en) * 1991-04-15 1992-10-28 理学電機工業株式会社 Calibration device for X-ray analysis

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