JPS6032757U - X-ray microanalyzer - Google Patents
X-ray microanalyzerInfo
- Publication number
- JPS6032757U JPS6032757U JP12400383U JP12400383U JPS6032757U JP S6032757 U JPS6032757 U JP S6032757U JP 12400383 U JP12400383 U JP 12400383U JP 12400383 U JP12400383 U JP 12400383U JP S6032757 U JPS6032757 U JP S6032757U
- Authority
- JP
- Japan
- Prior art keywords
- ray microanalyzer
- ray
- sample
- microanalyzer
- sample chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のＸ線マイクロアナライザの試料室の断面
図、第２図はこの考案の一実施例のＸ線マイクロアナラ
イザの試料室の断面図である。図中１は試料室、２は電
子銃、３は試料、４は電子線、５はＷ線、６はＸ線検出
器、７はＸ線検出器移動装置、８はシャッタ、９は金網
、１０は窓である。なお、図中、同一あるいは相当部分
には同一符号を付して示しである。FIG. 1 is a sectional view of a sample chamber of a conventional X-ray microanalyzer, and FIG. 2 is a sectional view of a sample chamber of an X-ray microanalyzer according to an embodiment of the present invention. In the figure, 1 is a sample chamber, 2 is an electron gun, 3 is a sample, 4 is an electron beam, 5 is a W ray, 6 is an X-ray detector, 7 is an X-ray detector moving device, 8 is a shutter, 9 is a wire mesh, 10 is a window. In the drawings, the same or corresponding parts are designated by the same reference numerals.
Claims (1)
を内蔵する試料室の壁に、真空を保持し、かつ金属性シ
ャッタ及び金網を備えた内部確認用窓を設けたことを特
徴とするＸ線マイクロアナライザ。An X-ray microanalyzer, characterized in that the wall of the sample chamber containing the sample and the X-ray detector is provided with an internal confirmation window that maintains a vacuum and is equipped with a metal shutter and a wire mesh. analyzer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12400383U JPS6032757U (en) | 1983-08-10 | 1983-08-10 | X-ray microanalyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12400383U JPS6032757U (en) | 1983-08-10 | 1983-08-10 | X-ray microanalyzer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6032757U true JPS6032757U (en) | 1985-03-06 |
Family
ID=30282840
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12400383U Pending JPS6032757U (en) | 1983-08-10 | 1983-08-10 | X-ray microanalyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6032757U (en) |
-
1983
- 1983-08-10 JP JP12400383U patent/JPS6032757U/en active Pending
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