JPS5825071A - Electrodeless discharge lamp for microwave discharge - Google Patents
Electrodeless discharge lamp for microwave dischargeInfo
- Publication number
- JPS5825071A JPS5825071A JP12262281A JP12262281A JPS5825071A JP S5825071 A JPS5825071 A JP S5825071A JP 12262281 A JP12262281 A JP 12262281A JP 12262281 A JP12262281 A JP 12262281A JP S5825071 A JPS5825071 A JP S5825071A
- Authority
- JP
- Japan
- Prior art keywords
- neon
- argon
- lamp
- mercury
- discharge lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 30
- 239000007789 gas Substances 0.000 claims abstract description 20
- 229910052786 argon Inorganic materials 0.000 claims abstract description 15
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052753 mercury Inorganic materials 0.000 claims abstract description 12
- 229910052754 neon Inorganic materials 0.000 claims abstract description 9
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims abstract description 9
- 230000005672 electromagnetic field Effects 0.000 claims abstract description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910001507 metal halide Inorganic materials 0.000 claims abstract description 5
- 150000005309 metal halides Chemical class 0.000 claims abstract description 5
- JXBFBSYDINUVRE-UHFFFAOYSA-N [Ne].[Ar] Chemical compound [Ne].[Ar] JXBFBSYDINUVRE-UHFFFAOYSA-N 0.000 claims description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 12
- 229910052742 iron Inorganic materials 0.000 abstract description 7
- NGYIMTKLQULBOO-UHFFFAOYSA-L mercury dibromide Chemical compound Br[Hg]Br NGYIMTKLQULBOO-UHFFFAOYSA-L 0.000 abstract description 3
- QKEOZZYXWAIQFO-UHFFFAOYSA-M mercury(1+);iodide Chemical compound [Hg]I QKEOZZYXWAIQFO-UHFFFAOYSA-M 0.000 abstract description 3
- 238000007789 sealing Methods 0.000 abstract 1
- 238000001816 cooling Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000000295 emission spectrum Methods 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- IXMPXTJYLZVFBW-UHFFFAOYSA-N argon neon Chemical compound [Ne].[Ne].[Ar] IXMPXTJYLZVFBW-UHFFFAOYSA-N 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- -1 iron halides Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/044—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit
Abstract
Description
【発明の詳細な説明】
この発明はマイクロ波放電光源装置に使用される無電極
放電灯に関するもので、特に点灯性を改良したものであ
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electrodeless discharge lamp used in a microwave discharge light source device, and in particular has improved lighting performance.
最近、写真製版用版材の焼付用紫外線光源装置としてマ
イクロ波放電光源装置が使用されつつある。写真製版の
版材の焼付けは電光時間が１分間程度で露光準備作業に
最低２０秒間程度を要し、この焼付は用光源装置として
は露光時間のみ光を照射すればよいので瞬時点灯および
瞬時安定型の光源装置が望ましい。マイクロ波放電光源
装置は放電灯が点灯してから光出力が安定するまでの時
間が８秒程度であり、また放電灯を冷却することにより
３００秒程で再点灯が可能であるため上記写真製版用版
材の焼付は光源等の点灯・消灯の頻度の激しい光源装置
として使用するは好ましい。Recently, microwave discharge light source devices are being used as ultraviolet light source devices for printing plate materials for photolithography. Baking of photolithography plate materials requires about 1 minute of lightning time and at least 20 seconds for exposure preparation.For this printing, the light source device only needs to irradiate light for the exposure time, so it is instantaneous and stable. type light source device is desirable. The microwave discharge light source device takes about 8 seconds from when the discharge lamp is turned on until the light output stabilizes, and can be relit in about 300 seconds by cooling the discharge lamp. The printing plate material is preferably used as a light source device that frequently turns on and off, such as a light source.
このマイクロ波光源装置に使用されていた無電極放電灯
は従来透光性石英ガラス製管球内に所望の水銀および必
要に応じてハロゲン化金属を封入するとともに始動用希
ガスとしてアルゴンガスが十数〜数十（ｔｏｒｒ）
封入されていた。The electrodeless discharge lamp used in this microwave light source device conventionally has a transparent quartz glass bulb filled with the desired mercury and, if necessary, a metal halide, as well as sufficient argon gas as a starting rare gas. Several to several tens (torr)
It was enclosed.
しかしこのように構成されていた従来のランプはランプ
の点灯性という面でかならずしも十分なものでなかった
。すなわち、従来の無電極放電灯においては無電極放電
灯が常温２５℃以下に冷えた状態で点灯させた場合、電
源を封入してから点灯を開始するまで１〜％Ｏ秒間の遅
れを生じ、露光時間が短かくなるため２膳光後の版材の
仕上りの品質に支障を来たすとい５欠点があった。However, the conventional lamps constructed in this manner were not always sufficient in terms of lighting performance. In other words, in conventional electrodeless discharge lamps, when the electrodeless discharge lamp is turned on when it has cooled down to a room temperature of 25°C or lower, there is a delay of 1 to %O seconds from the time the power supply is sealed until the lamp starts lighting. There were five drawbacks: the shorter exposure time affected the finished quality of the plate material after two exposures.
この発明はこのような点灯開始の遅れ時間をなくしたマ
イクロ波放電用無電極放電灯を提供するものである。The present invention provides an electrodeless discharge lamp for microwave discharge that eliminates such a delay time in starting lighting.
すなわち、この発明はマイクロ波電磁界内で点灯され、
透光性石英ガラス管球からなる無電極放電灯において、
管球内に所定量の水銀および金属ハロゲン化物に加えて
、１１〜１゜０％アルゴンと８９．９〜９００ ％のネ
オンからなる９９．９〜！ＩＯ，０％のネオン−アルゴ
ン混合ガスを３０〜３００ｔｏｒｒ封入したことを特徴
とする無電極放電灯セーある。That is, the invention is lit within a microwave electromagnetic field,
In an electrodeless discharge lamp made of a translucent quartz glass tube,
In addition to a predetermined amount of mercury and metal halide in the bulb, 99.9~!, consisting of 11~1°0% argon and 89.9~900% neon! There is an electrodeless discharge lamp characterized by filling a neon-argon mixed gas of 30 to 300 torr with 0% IO.
このように構成した本発明によれば無電極放電灯が常温
度２５℃以下にまで冷えた状態において、電源を投入し
てから点灯を開始するまでの時間が１秒未満になり９点
灯性の良好なマイクロ波放電用無電極放電灯を提供する
ことができるものである。According to the present invention configured in this manner, when the electrodeless discharge lamp has cooled down to a room temperature of 25°C or less, the time from turning on the power to starting lighting is less than 1 second, resulting in 9 lighting characteristics. A good electrodeless discharge lamp for microwave discharge can be provided.
以下に、この発明の一実施例を図示に基づいで説明する
と、第１図はこの発明に係る無ｉｉ１極放電灯の断面図
、第２図はこの放電灯を用いたマイクロ波放電光源装置
の構成を示す断面図で。An embodiment of the present invention will be described below with reference to the drawings. Fig. 1 is a sectional view of a single poleless discharge lamp according to the invention, and Fig. 2 is a sectional view of a microwave discharge light source device using this discharge lamp. In a cross-sectional view showing the configuration.
図に於いて（１）はマイクロ波発振周波数２４５０ Ｍ
Ｈｚマイクロ波人力１◎ＯＷのマグネトロン、（２）は
マグネトロンアンテナ、（３）は導波管、（４）はほぼ
半球形に形成されたマイクロ波空胴、（５１は空胴（４
）と導波管接合部に設けられたマイクロ波給電口。In the figure (1) is the microwave oscillation frequency of 2450 M
Hz microwave hand-powered 1◎OW magnetron, (2) is a magnetron antenna, (3) is a waveguide, (4) is a microwave cavity formed in an almost hemispherical shape, (51 is a cavity (4)
) and the microwave feed port provided at the waveguide junction.
（６）は無電極放電灯で、内径３０φ、内厚Ｑ、５１の
球形の透明石英製管球＠２内に１００■の水銀。(6) is an electrodeless discharge lamp, with an inner diameter of 30φ, an inner thickness of Q, and a spherical transparent quartz tube with a diameter of 51 mm and 100 square meters of mercury inside the tube.
１、５１９の鉄、２Ｎの沃化水銀、１冨９の臭化水銀１
、およびＯ，Ｓ ％のアルゴンを含むネオン−アルゴン
混合ガスが１２０ｔｏｒｒ封入されているものである。1,519 iron, 2N mercury iodide, 1 to 9 mercury bromide 1
, and a neon-argon mixed gas containing O, S% argon at 120 torr.
（７）はマグネトロン（１）と無電極放電灯（６１を冷
却するための冷却ファン、（８）は冷却ファン（７）の
冷却風をマグネトロン（１１を介して導波管（３）内に
導（ための送風管、（９）は送風管（８）内の冷却風を
導波管（３）内に入れるために導波管＋３１にあけられ
た通風口、 Ｑｌは空胴（４）の前面に設けられたメツ
シュ板、αυはマグネトロン（１）、導波管（３１゜空
胴（４）等を櫟う箱体、（＋３は上記管球α２から棒状
に突出して設けられたランプ支持部である。(7) is a cooling fan for cooling the magnetron (1) and the electrodeless discharge lamp (61), and (8) is a cooling fan for cooling the cooling fan (7) into the waveguide (3) via the magnetron (11). (9) is the ventilation hole drilled in the waveguide +31 to introduce the cooling air in the air pipe (8) into the waveguide (3), and Ql is the cavity (4). The mesh plate provided in front of the It is a support part.
この様に構成されたマイクロ波放電光源装置において、
その動作は、マグネト筒ン（１１によって発生されたマ
イクロ波はマグネトロンアンテナ（２）を通して導波管
（３）内に放射される。このマイクロ波は導波管１３）
を伝播し給電口ｉ５）を通して空胴（４）中に放射され
、空胴（４）中にマイクロ波電磁界を形成する。このマ
イクロ波電磁界によりまず、ランプ（６）内に封入され
た始動補助用希ガスであるネオン−アルゴン混合ガスが
放電し。In the microwave discharge light source device configured in this way,
Its operation is as follows: Microwaves generated by a magnetron tube (11) are radiated into a waveguide (3) through a magnetron antenna (2).
is propagated and radiated into the cavity (4) through the feed port i5), forming a microwave electromagnetic field in the cavity (4). This microwave electromagnetic field first causes the neon-argon mixed gas, which is a rare gas for starting assistance, sealed in the lamp (6) to discharge.
ランプ壁が熱せられ、それまでランプ壁に付着していた
他の封入金属、つまり水銀、鉄も蒸発し、放電は金属蒸
気放電を主体とした放電となる。つまり、始動補助放電
が開始されると、水銀の発光と併せて、封入された鉄と
沃化水銀および臭化水銀から放電により解離されたハロ
ゲンとでハロゲン化鉄が生成され、その結果、鉄の発光
をも呈するものである。The lamp wall is heated, and other enclosed metals that had been attached to the lamp wall, such as mercury and iron, also evaporate, and the discharge becomes a discharge mainly consisting of metal vapor discharge. In other words, when the starting auxiliary discharge is started, along with the light emission of mercury, iron halides are generated from the enclosed iron and the halogens dissociated from mercury iodide and mercury bromide by the discharge, and as a result, iron halides are produced. It also emits light.
この時封入金属である鉄特有の発光スペクトルと水銀の
発光スペクトルを併せ持った発光。At this time, light emission combines the emission spectrum unique to iron, which is the encapsulated metal, and the emission spectrum of mercury.
特に３５０〜４５０■に強い発光スペクトルを有した発
光を生じるのでこれを光源として用いる。In particular, it produces light with a strong emission spectrum in the range of 350 to 450 cm, and is therefore used as a light source.
このランプ（６）からの光を有効に利用するため空胴（
４）の後面を反射板として用い、前面はマイクロ波は透
過しないが光は透過する金属メツシュ板ａＯで構成して
光を前方のみに放射させる。この放射光により写真製版
用版材の焼付けを行な・うものである。In order to effectively utilize the light from this lamp (6), the cavity (
4) The rear surface is used as a reflector, and the front surface is made of a metal mesh plate aO that does not transmit microwaves but transmits light, so that light is emitted only forward. This synchrotron radiation is used to print the photolithographic plate material.
次に、この無電極放電灯（６）を１０本製作し。Next, 10 of these electrodeless discharge lamps (6) were manufactured.
マイクロ波放電光源装置に組み込んで点灯試験を常温（
２５℃）で行なったところ、１０本金工が瞬時に又は１
秒未満で点灯開始でき、始動補助用希ガスとしてアルゴ
ンのみを封入したものに比し９点灯性すなわち電源を投
入してから点灯開始するまでの遅れ時間のバラツキが少
なく、シかも非常に短縮できたものであった。Built into a microwave discharge light source device, lighting tests were carried out at room temperature (
25℃), 10 pieces of metal work instantly or 1
It can start lighting in less than a second, and compared to a device filled with only argon as a starting aid rare gas, there is less variation in the lighting performance, that is, there is less variation in the delay time from turning on the power to starting lighting, and the delay time can be greatly shortened. It was something like that.
このことは、始動補助用希ガスとしてアルゴンのみを用
いたものが、水銀とアルゴンとの間のペニング効果を利
用するめで放電灯の管壁温度によって水銀の蒸気圧が大
幅に変化することおよび常温程度にお、ける蒸気圧が低
いことから電気的に陰性となるハロゲンやハロゲン化物
の蒸気の影響を受けやすく、これら蒸気が放電の開始を
妨害するので１点灯性が悪くなるのに対し、始動補助用
希ガスとしてネオン−アルゴンの混合ガスを用いたもの
が、この混合ガスによるペニング効果、つまり放電開始
電圧を下げる効果により、ハロゲンやハロゲン化物の蒸
気の影響が受けにくくなるため、アルゴンのみのものに
比し大幅に点灯性が改善されたものと考えられる。This means that when using only argon as a starting gas, the vapor pressure of mercury changes significantly depending on the temperature of the tube wall of the discharge lamp, and because it takes advantage of the Penning effect between mercury and argon. Due to its low vapor pressure, it is susceptible to electrically negative halogen and halide vapors, and these vapors interfere with the initiation of discharge, resulting in poor lighting performance. A mixture of neon and argon is used as the auxiliary rare gas, but the Penning effect of this gas mixture, that is, the effect of lowering the discharge starting voltage, makes it less susceptible to the effects of halogen and halide vapor. It is thought that the lighting performance has been significantly improved compared to the original.
次に、始動補助用希ガスとしてのアルゴン−ネオン混合
ガスの封入量を変えて種々製作した結果、アルゴン−ネ
オン混合ガスの封入圧力は３０〜３００ ｔｏｒｒの範
囲が良いものであった。つまり３０ ｔｏｒｒ未満であ
ると点灯性は良いがグロー放電のような薄い発光の放電
になってしまい安定点灯状態に移行しない場合が生じ、
また。Next, as a result of manufacturing various products by changing the amount of the argon-neon mixed gas sealed as a rare gas for starting aid, it was found that the pressure of the argon-neon mixed gas in the range of 30 to 300 torr was good. In other words, if it is less than 30 torr, the lighting performance is good, but the discharge becomes a thin light emitting discharge like a glow discharge, and the stable lighting state may not be achieved.
Also.
３００ ｔｏｒｒを越えると点灯しなくなるものであつ
た。When the temperature exceeded 300 torr, the light would no longer turn on.
また、ネオン−アルゴン混合ガスの混合割合は、アルゴ
ンが０．１〜１．０ ％に対しネオンを９９．９〜９０
．０ ％の範囲のものが点灯性が良かった。In addition, the mixing ratio of neon-argon mixed gas is 0.1-1.0% argon and 99.9-90% neon.
．． Lighting performance was good in the range of 0%.
この発明は以上述べたように、マイクロ波電磁界内で点
灯される無電極放電灯において、管球内に水銀、金属ハ
ロゲン化物に加えて、０１〜１．０ ９６のアルゴンと
９９．９〜９０．０％のネオンからなるネオン−アルゴ
ン混合ガスを３゛０〜３００ｔｏｒｒ封入したので９点
灯性が向上するという効果を有するものである。As described above, this invention provides an electrodeless discharge lamp that is operated in a microwave electromagnetic field, in which in addition to mercury and metal halides, argon of 01 to 1.096 and argon of 99.9 to 1.096 are contained in the bulb. Since the neon-argon mixed gas consisting of 90.0% neon is sealed at 300 to 300 torr, it has the effect of improving lighting performance.
したがって、写Ｘ製版用版材の焼付は光源装置等の短か
い時間のみ放電灯を点灯させ結党するようなものに使用
する光源装置に使用できる実用的価値の高いマイクロ波
放電用無電極放電灯が得られるものである。Therefore, the printing of the printing plate material for Shashi is obtained.
第１図はこの発明の一実施例を示すマイクロ波放電用無
電極放電灯の断面図、第２図は第１図に示す無電極放電
灯を装着し点灯させるためのマイクロ波放電光源装置を
示す概略図である。
図において、（１）はマグネトロン、＋６Ｈま無電極放
電灯である。
代理人 葛 野 信 −
第１図Fig. 1 is a sectional view of an electrodeless discharge lamp for microwave discharge showing an embodiment of the present invention, and Fig. 2 shows a microwave discharge light source device for mounting and lighting the electrodeless discharge lamp shown in Fig. 1. FIG. In the figure, (1) is a magnetron and a +6H electrodeless discharge lamp. Agent Shin Kuzuno - Figure 1
Claims (1)
からなる無電極放電灯において、上記管球内に所定量の
水銀および発光元素の金属ハロゲン化物に加えて、０，
１〜１０ ％のアルゴンとＳ Ｓ、Ｓ〜ｓｔｅｗのネオ
ンからなるネオン−アルゴン混合ガスを３０〜３００
ｔｏｒｒを封入したことを特徴とするマイクロ波放電用
無電極放電灯。In an electrodeless discharge lamp that is lit in a microwave electromagnetic field and consists of a translucent quartz glass tube, in addition to a predetermined amount of mercury and a metal halide as a light-emitting element, 0,
Neon-argon mixed gas consisting of 1-10% argon and SS, S-stew neon at 30-300%
An electrodeless discharge lamp for microwave discharge characterized by enclosing torr.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12262281A JPS5825071A (en) | 1981-08-05 | 1981-08-05 | Electrodeless discharge lamp for microwave discharge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12262281A JPS5825071A (en) | 1981-08-05 | 1981-08-05 | Electrodeless discharge lamp for microwave discharge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5825071A true JPS5825071A (en) | 1983-02-15 |
Family
ID=14840514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12262281A Pending JPS5825071A (en) | 1981-08-05 | 1981-08-05 | Electrodeless discharge lamp for microwave discharge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5825071A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6033250A (en) * | 1983-07-28 | 1985-02-20 | 株式会社興人 | Manufacture of ceramic formed body |
| JPH05193690A (en) * | 1992-01-16 | 1993-08-03 | Sanyo Electric Co Ltd | Packing device |
| EP1353359A2 (en) * | 2002-04-10 | 2003-10-15 | Lg Electronics Inc. | Lamp bulb and electrodeless lamp therewith |
| US7161303B2 (en) | 2003-09-08 | 2007-01-09 | Lg Electronics, Inc. | Plasma lighting system and bulb therefor |
-
1981
- 1981-08-05 JP JP12262281A patent/JPS5825071A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6033250A (en) * | 1983-07-28 | 1985-02-20 | 株式会社興人 | Manufacture of ceramic formed body |
| JPH0362663B2 (en) * | 1983-07-28 | 1991-09-26 | Kojin Kk | |
| JPH05193690A (en) * | 1992-01-16 | 1993-08-03 | Sanyo Electric Co Ltd | Packing device |
| EP1353359A2 (en) * | 2002-04-10 | 2003-10-15 | Lg Electronics Inc. | Lamp bulb and electrodeless lamp therewith |
| EP1353359A3 (en) * | 2002-04-10 | 2004-10-13 | Lg Electronics Inc. | Lamp bulb and electrodeless lamp therewith |
| US7161303B2 (en) | 2003-09-08 | 2007-01-09 | Lg Electronics, Inc. | Plasma lighting system and bulb therefor |
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