JPS5825041U - 露光装置 - Google Patents

露光装置

Info

Publication number
JPS5825041U
JPS5825041U JP11988281U JP11988281U JPS5825041U JP S5825041 U JPS5825041 U JP S5825041U JP 11988281 U JP11988281 U JP 11988281U JP 11988281 U JP11988281 U JP 11988281U JP S5825041 U JPS5825041 U JP S5825041U
Authority
JP
Japan
Prior art keywords
exposure equipment
abstract
ultra
high pressure
exposure apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11988281U
Other languages
English (en)
Other versions
JPS6214685Y2 (ja
Inventor
明 森重
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP11988281U priority Critical patent/JPS5825041U/ja
Publication of JPS5825041U publication Critical patent/JPS5825041U/ja
Application granted granted Critical
Publication of JPS6214685Y2 publication Critical patent/JPS6214685Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図は露光装置の概要図、第２図は本考案にかする露
光装置の超高圧水銀ランプの断面図、第３図は反射鏡の
一実施例図である。 図中、１０は超高圧水銀ランプ、１１は収納管、１２は
ファン、１３Ｕ、１３Ｌは反射鏡、１４Ｕ。 １４Ｌは口金、１５は発光球、１６は照射窓を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 発光球とその両側の電極との間に、管外壁に接して半球
    型の反射鏡を有する超高圧水銀ランプを設けたことを特
    徴とする露光装置。
JP11988281U 1981-08-11 1981-08-11 露光装置 Granted JPS5825041U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11988281U JPS5825041U (ja) 1981-08-11 1981-08-11 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11988281U JPS5825041U (ja) 1981-08-11 1981-08-11 露光装置

Publications (2)

Publication Number Publication Date
JPS5825041U true JPS5825041U (ja) 1983-02-17
JPS6214685Y2 JPS6214685Y2 (ja) 1987-04-15

Family

ID=29913927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11988281U Granted JPS5825041U (ja) 1981-08-11 1981-08-11 露光装置

Country Status (1)

Country Link
JP (1) JPS5825041U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02139223U (ja) * 1989-04-26 1990-11-21

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4886389A (ja) * 1972-02-16 1973-11-14
JPS5074185U (ja) * 1973-11-07 1975-06-28
JPS5468082A (en) * 1977-11-11 1979-05-31 Hitachi Ltd Xenon light source
JPS5560134U (ja) * 1979-10-19 1980-04-24

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4886389A (ja) * 1972-02-16 1973-11-14
JPS5074185U (ja) * 1973-11-07 1975-06-28
JPS5468082A (en) * 1977-11-11 1979-05-31 Hitachi Ltd Xenon light source
JPS5560134U (ja) * 1979-10-19 1980-04-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02139223U (ja) * 1989-04-26 1990-11-21

Also Published As

Publication number Publication date
JPS6214685Y2 (ja) 1987-04-15

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