JPS58221413A - 流体配管系の流量制御方法 - Google Patents

流体配管系の流量制御方法

Info

Publication number
JPS58221413A
JPS58221413A JP10374782A JP10374782A JPS58221413A JP S58221413 A JPS58221413 A JP S58221413A JP 10374782 A JP10374782 A JP 10374782A JP 10374782 A JP10374782 A JP 10374782A JP S58221413 A JPS58221413 A JP S58221413A
Authority
JP
Japan
Prior art keywords
flow rate
fluid
control
control mechanism
rate control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10374782A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0157806B2 (enExample
Inventor
Takao Takeuchi
崇雄 竹内
Akira Usui
宇須井　彰
Hideki Kondo
英樹 近藤
Makoto Morikawa
森川　真
Yoshio Matsuo
良夫 松尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Ebara Densan Ltd
Original Assignee
Ebara Corp
Ebara Densan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Ebara Densan Ltd filed Critical Ebara Corp
Priority to JP10374782A priority Critical patent/JPS58221413A/ja
Publication of JPS58221413A publication Critical patent/JPS58221413A/ja
Publication of JPH0157806B2 publication Critical patent/JPH0157806B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
JP10374782A 1982-06-18 1982-06-18 流体配管系の流量制御方法 Granted JPS58221413A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10374782A JPS58221413A (ja) 1982-06-18 1982-06-18 流体配管系の流量制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10374782A JPS58221413A (ja) 1982-06-18 1982-06-18 流体配管系の流量制御方法

Publications (2)

Publication Number Publication Date
JPS58221413A true JPS58221413A (ja) 1983-12-23
JPH0157806B2 JPH0157806B2 (enExample) 1989-12-07

Family

ID=14362174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10374782A Granted JPS58221413A (ja) 1982-06-18 1982-06-18 流体配管系の流量制御方法

Country Status (1)

Country Link
JP (1) JPS58221413A (enExample)

Also Published As

Publication number Publication date
JPH0157806B2 (enExample) 1989-12-07

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