JPS58219786A - レ−ザ−発振周波数制御装置 - Google Patents

レ−ザ−発振周波数制御装置

Info

Publication number
JPS58219786A
JPS58219786A JP57103215A JP10321582A JPS58219786A JP S58219786 A JPS58219786 A JP S58219786A JP 57103215 A JP57103215 A JP 57103215A JP 10321582 A JP10321582 A JP 10321582A JP S58219786 A JPS58219786 A JP S58219786A
Authority
JP
Japan
Prior art keywords
refractive index
oscillation frequency
control device
laser
frequency control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57103215A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6364914B2 (enrdf_load_stackoverflow
Inventor
Hidemi Takahashi
秀実 高橋
Makoto Hasegawa
誠 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57103215A priority Critical patent/JPS58219786A/ja
Publication of JPS58219786A publication Critical patent/JPS58219786A/ja
Publication of JPS6364914B2 publication Critical patent/JPS6364914B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
JP57103215A 1982-06-15 1982-06-15 レ−ザ−発振周波数制御装置 Granted JPS58219786A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57103215A JPS58219786A (ja) 1982-06-15 1982-06-15 レ−ザ−発振周波数制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57103215A JPS58219786A (ja) 1982-06-15 1982-06-15 レ−ザ−発振周波数制御装置

Publications (2)

Publication Number Publication Date
JPS58219786A true JPS58219786A (ja) 1983-12-21
JPS6364914B2 JPS6364914B2 (enrdf_load_stackoverflow) 1988-12-14

Family

ID=14348275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57103215A Granted JPS58219786A (ja) 1982-06-15 1982-06-15 レ−ザ−発振周波数制御装置

Country Status (1)

Country Link
JP (1) JPS58219786A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111596529A (zh) * 2020-05-29 2020-08-28 成都天马微电子有限公司 曝光装置及其使用方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55138287A (en) * 1979-04-11 1980-10-28 Nec Corp Linear-polarization type gas laser tube

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55138287A (en) * 1979-04-11 1980-10-28 Nec Corp Linear-polarization type gas laser tube

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111596529A (zh) * 2020-05-29 2020-08-28 成都天马微电子有限公司 曝光装置及其使用方法
CN111596529B (zh) * 2020-05-29 2023-12-29 成都天马微电子有限公司 曝光装置及其使用方法

Also Published As

Publication number Publication date
JPS6364914B2 (enrdf_load_stackoverflow) 1988-12-14

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