JPS5820414A - Molding method for resin - Google Patents

Molding method for resin

Info

Publication number
JPS5820414A
JPS5820414A JP11986181A JP11986181A JPS5820414A JP S5820414 A JPS5820414 A JP S5820414A JP 11986181 A JP11986181 A JP 11986181A JP 11986181 A JP11986181 A JP 11986181A JP S5820414 A JPS5820414 A JP S5820414A
Authority
JP
Japan
Prior art keywords
resin
light
photo
mask
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11986181A
Other languages
Japanese (ja)
Inventor
Masayuki Yamamoto
正之 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP11986181A priority Critical patent/JPS5820414A/en
Publication of JPS5820414A publication Critical patent/JPS5820414A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/38Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3842Manufacturing moulds, e.g. shaping the mould surface by machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0888Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using transparant moulds
    • B29C35/0894Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using transparant moulds provided with masks or diaphragms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0833Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using actinic light
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/38Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/40Plastics, e.g. foam or rubber
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00Other particular articles
    • B29L2031/757Moulds, cores, dies

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Toxicology (AREA)
  • Physics & Mathematics (AREA)
  • Oral & Maxillofacial Surgery (AREA)
  • Thermal Sciences (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

PURPOSE:To obtain a resin molded article with high accuracy, by a method wherein a photosensitive resin in a thick plate form is exposed to light through a photo-mask placed in close contact with the resin or by projecting light thereon, is subjected to etching development, and the thus shaped article is used as a mold in which a predetermined resin is molded. CONSTITUTION:Numeral 1 denotes a photosensitive resin, and numeral 2 denotes the photo-mask, the parts of which faced to the part 3 to be left after etching is light-transmitting, while the other part 4 is opaque. The resin 1 is supported on a base plate 5. The resin is exposed to light through the photo-mask 2 placed in close contact with the resin 1 or by projecting light thereon. In this case, the light entering the resin 1 through the light-transmitting part 3 is gradually diffused in the interior of the resin 1 as indicated by broken lines. Then, development is conducted by etching away the resin part faced to the opaque part 4 of the photo-mask 2. A resin 7 is poured into the etched part 6 and is hardened. Accordingly, since the exposure through the photo-mask 2 and the development are highly accurate, it is possible to obtain a molded article with high accuracy.

Description

【発明の詳細な説明】 この発明は樹脂成形法に関すふ。[Detailed description of the invention] This invention relates to a resin molding method.

近時°重置機器にお層て電信的に絶縁性の秀れた加工品
力14(使用されており、蜜僚機器の種類によってけ徽
細なIJtl隔を首すて多数の溝を並設置、た11工品
たとえば薄状の電極の多数を並設支持する電極ホルダー
力(使用されてl八る。従来ではこのよらな電極ホルダ
ーを製作すAのに、高絶縁性の材料たとえば、ガラス、
石英板、セラミック板の表面をダイヤモンドカッター或
いはワイヤソーなどを使用1.て05〜2mm 深さま
で機械的に溝切り11工を行ガつでいる力に、これによ
るとたとえば十−−−−mm稈度の靜t(6度加工が可
能であるにに] 0^ てイ1、溝間隔力(0,1mm  程1臭に狭171場
合には溝と7111′1)−の聞の部分力;、加工の際
ともすれば徨)れて1−まらこと力;あり、1.た雀っ
てこれによる加工法でけ歩溜り力1極めて豊(ハ。■溝
を一条ずつ加工1.て【/−1ぐので、 −)X+工に
要する時間≠X侵≠E<な為と1八つだ欠点≠にある。
Recently, a processed product with excellent insulating properties (14) has been used in stacked equipment, and depending on the type of telegraph equipment, a large number of grooves can be lined up to eliminate narrow IJTL intervals. For example, an electrode holder force is used to support a large number of thin electrodes in parallel. Conventionally, this thin electrode holder was manufactured using highly insulating materials such as glass,
1. Cut the surface of the quartz plate or ceramic plate using a diamond cutter or wire saw. According to the force required to mechanically cut 11 grooves to a depth of 05 to 2 mm, for example, a depth of 10 mm (6 degrees of machining is possible) 0^ 1.Groove spacing force (0.1mm In the case of 171, the partial force between the groove and 7111'1);; Yes, 1. Tajaku's machining method uses this method, and the accumulated force is extremely high (c. ■ Machining the groove one by one [/-1], so -) X + time required for machining ≠ X invasion ≠ E < There are 18 disadvantages≠.

亮絶縁性材料、LLで樹脂を使用する場合には成形型を
使用1.て成形加工+ること≠;考り−られる力(、こ
こに使用すふ成7rt 2111 ′ft−製作すみ場
合で本機械加丁にたよらざろを得す、この)−きけ11
[述1.たと同じ坤由により歩溜り、加工jWp間等の
点で問題ガある。
When using resin as a light insulating material or LL, use a mold 1. The force that can be considered (the force used here is 7rt 2111'ft) - the force used here is 7rt 2111' ft - in the case of the production process, the cutting process of this machine will yield a roughness, this) - Kike 11
[Statement 1. Due to the same reason as above, there are problems in terms of yield, processing time, etc.

この発明けl1li杉型を便用1て樹脂成形することに
よって成形加工品を得ふ方法の改良に関17、特に面精
Ifに成形型を製作することによって、亮精度の樹脂h
ン影品を4ふことを目的左すふ。
This invention relates to the improvement of a method for obtaining molded products by resin molding using a convenient cedar mold.17 In particular, by manufacturing a mold with a surface precision If, resin h with high precision can be obtained.
The purpose is to collect 4 videos.

この究明は成flia型を感光性樹脂によって製作1゜
よらとする本ので、これを所要のパターンどおりのホト
マスクを使用して露弊1−現像すふこhにょつて前記パ
ターンどおりの溝をあけるようにし、これを成形型と1
−で樹脂成形することを特徴とする。
This research is based on a book in which a mold is fabricated using a photosensitive resin with a 1° deviation, and this is exposed and developed using a photomask according to the required pattern to make a groove according to the pattern described above. and put this into the mold and 1
- It is characterized by resin molding.

ホトマスクを使用して露光現像すると森はホトマスクの
パターンに対して士□mm 以上ノ;暫00 精度力よ可能とな峠、又1r程度の間隔のパターンの製
作も可能であふことづ工知られて−る。したカーって感
光性樹脂をホトマスクを使用1.て露光現像すれば前記
L*と同程度の微細かつ高精度の成形型が得られるよう
になふ。
When exposed and developed using a photomask, Mori can produce a photomask pattern with an accuracy of □mm or more; it is possible to achieve a precision of 0.0000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000000, Teru. 1. Using a photomask with a photosensitive resin. If exposed and developed, a mold as fine and highly accurate as L* can be obtained.

なお前記のように感光性樹脂をホトマスクを使用して露
光現像すれば微細かつ昼精度の加工づ;で会ふとするな
らば、このように加工1.た感光性樹脂加工品を成形型
に使用すること々〈、そのま渣完成1−た成形品と1〜
で使用することが考えられる。
If you expose and develop photosensitive resin using a photomask as described above, you will be able to perform microscopic and daytime-accurate processing. The photosensitive resin processed product is used in the mold.
It is possible to use it in

1、かし、得ようとする112形品が極めて薄−場合に
はあオリ問題とならない75X、α5mm程度以トの厚
みのものになると次のような不都合ガ生ずる。
1. However, if the 112-shaped product to be obtained is extremely thin, this will not be a problem, but if the thickness is less than about 75X, α5 mm, the following disadvantages will occur.

すなわちホトマスクを使用1.て露光するとき、光雀感
光性樹脂内にその厚み方向に進むに1−でも、その進行
につれて周囲に光が散乱1.て因〈ため、マ 露光部分 人力;り状に広がってbぐようになる。
That is, using a photomask 1. When exposing the photosensitive resin to light, as it progresses in the thickness direction of the photosensitive resin, light scatters around it as it progresses. As a result, the exposed area will spread out and become distorted.

そのため非露光部分をエツチング1−で現像1−でも、
得られた溝の幅は底部に向ら稈狭ぐなる。これではこの
溝内に電極を挿入1.よらと1.でも、溝間隔力5得ら
れずその支持f4に困難とfx為。1.たがって感光性
樹脂をもって直接成形品とするのけ実際の使用にd゛供
l得がい。
Therefore, even if the unexposed area is etched 1- and developed 1-,
The width of the resulting groove becomes narrower towards the bottom. Insert the electrode into this groove 1. Yorato 1. However, the groove spacing force 5 cannot be obtained and it is difficult to support f4 and fx. 1. Therefore, it is advantageous for actual use to directly mold products using photosensitive resin.

この点この発明に12かづ(って上述のよりに4因感光
性樹脂をホトマスクを使用1−で露光17.現像するこ
とによって得たものを成形型と1−で樹脂by形すれば
、得られ21成形品に形成される溝は、開ロ面カ玉広く
、底部に自らに1.たガってI隔が狭オくなるようにな
ふので、ここに電極を挿入し7て4i実に溝間隔が得ら
れ為ようになる。
In this respect, the present invention has 12 points (according to the above-mentioned method), if the 4-factor photosensitive resin is exposed to light using a photomask and developed, the resulting resin is formed into a resin by form using a mold and 1-. The groove formed in the 21 molded product has a wide open surface and a groove that hangs against itself at the bottom and narrows the I distance. The groove spacing can actually be obtained.

この発明の実施例を図を参照1−で説明する。lは感光
性樹脂(′ftとえは厚さ1mm程度)で、ここではネ
ガ型のもの−A(使用される。2はホトマスクで1次の
工程てエツチングしよ6とする部分に向かい合う部分3
け透光性とされ、他の部分4け不透′#:I4..L−
されている。5は感光性樹脂lを支持1、て17する基
板であA0目ill己1.たホトマスク2を使用1−で
これを感光性樹脂lに密着1.て露光又は投影全露光す
る。このJ−^透光1生の部分3から入った光はその進
行につれて内部拡散11、第1図中屯線で示すよりに末
広ガり状に人力5つてい(ことは前述1.たとおりであ
る。
An embodiment of the invention will be described with reference to the drawings 1-. 1 is a photosensitive resin ('ft is about 1 mm thick), and here a negative type A is used. 2 is the part facing the part 6 to be etched in the first step with a photomask. 3
One part is translucent, and the other part is opaque'#: I4. .. L-
has been done. 5 is a substrate that supports the photosensitive resin 1 and 17; Using a photomask 2, adhere it to the photosensitive resin 1. Full exposure or projection exposure. As the light enters from the part 3 of the J-^ translucent 1, as it progresses, it is internally diffused 11, and as shown by the line in Fig. It is.

このよらに露光;またのち、非感光部分すなわち非透光
住の部分4に向かい合う部分を、所豊のエツチング液で
エツチングして現像する。この現像の終了時点での伏態
宥・示1.たの力;第2図である。
Then, the non-exposed area, that is, the area facing the non-light-transmitting area 4, is etched and developed using an etching solution manufactured by Tokoro. At the end of this development, the lying position is 1. power; Figure 2.

この図からも理解されみように非エツチング部分1′ 翫は底部に向から稈幅力5広くなることは当然である。As can be understood from this figure, the non-etched part 1' It is natural that the culm width of the rod becomes wider by 5 from the bottom.

第2図に示すように加工された膚形品を成形型ト12、
エツチングされた部分6に、樹脂を7fl−こんで硬化
させる。硬化した樹脂7に基板8′、2設けてひつ(り
返L*−もの−zM 第7r図である。これからも理解
されるよりに非エツチング部分5に対応スる部分−71
に溝9と1.て1jly形されたことになり、この溝9
は開ロ幅μ広l/−1カ5底部に面からに1−た力くっ
て次第に狭まくなるように成形されることになる。
As shown in FIG. 2, the processed skin shape is placed in a mold 12
7 fl of resin is poured into the etched portion 6 and hardened. A substrate 8', 2 is provided on the cured resin 7 (see Figure 7r).As will be understood from now on, a portion 71 corresponding to the non-etched portion 5 is formed.
grooves 9 and 1. This means that this groove 9
is formed so that the opening width μ is 1/-1 and the bottom is gradually narrowed by 1-1 force from the surface.

1、たがって底部の幅に合致+ふ厚みの市、極を溝9内
に挿入すれば、その電極は確実に溝9の底部擾で挿入さ
れると)一本に、底部附近の側壁に確実に挾まれて支持
されふようになる。
1. Therefore, if the electrode is inserted into the groove 9 with a width that matches the width of the bottom + thickness, the electrode will be inserted with the bottom width of the groove 9). You will definitely be held in and supported.

この場合、溝9の底部の幅は、第1図におけるホトマス
ク2の透光性の部分30幅に合致するづミ、既述のよら
にホトマスクによみ露光、現像の精度〕 け士□mm以トの諸精度づ;可能であるから、00 Ij?−hfつて溝7の底部の幅7′1i高柚度に維持
されてb7.形されることになふ。又同様に前記1−か
露光。
In this case, the width of the bottom of the groove 9 matches the width of the translucent portion 30 of the photomask 2 in FIG. Since the various precisions of G are possible, 00 Ij? -hf and the width of the bottom of the groove 7 7'1i is maintained at a high degree of clarity b7. I don't want to be shaped. Similarly, the above 1- or exposure.

現像による。L−缶は数μの微細々パターンについても
′j!施fき為ので、溝9の幅、溝間隔本同程度に微細
に成、形することカーできるようになふ。
By development. L-can also has fine patterns of several microns! For the purpose of application, the width of the groove 9 and the interval between the grooves can be formed and shaped to the same degree as that of the groove.

なおここに使用すみ注型用の樹脂フシしては収縮車力5
瞳めで小ざい本のを使用するの雀望1.く、父、爾恢的
に詳絶縁性のカー要求される吐きは、置絶縁性の本のを
使用する必姿作ある。これらの装本全満足するものと1
.ではエポキシ圏脂、シリコンtAfllL ポリエス
テル樹脂、アクリル−脂、スチレン樹脂およびこれらの
樹脂強化物等φKfψ用でざる。又基板8とj、ではこ
れ雀市愉的に絶縁性のもの≠5要求さね、るJ−きけ、
ガラス、フェノール樹脂。
In addition, the resin frame used here is shrinkage force 5.
Using a small book with Hitomi 1. Finally, my father will need a detailed insulating car, so it is a must to use an insulating book. I am completely satisfied with these bindings and 1
.. Then, epoxy resin, silicone tAflllL polyester resin, acrylic resin, styrene resin, and reinforced products of these resins are not suitable for φKfψ. Also, for the board 8 and j, this requires an insulating material ≠ 5, right?
Glass, phenolic resin.

ポリイミド樹脂、エポキシ樹脂、七ラミック等が好適で
ある。
Polyimide resin, epoxy resin, hexaramic, etc. are suitable.

この発明に使用する1感光性次脂シしてはポジ型の本の
に限られず、ネガ型の本の本使用でき、これにともなっ
てホ+マスクと1.ても図のホトマスクを反転させたも
のも使用で★るとふけIAつまでもない。
The photosensitive secondary resin used in this invention is not limited to positive type books, but can also be used for negative type books. However, if you use an inverted version of the photomask shown in the figure, you won't get dandruff IA.

第4図にこの発明によって得られた成形品の使用例を示
す。ここでけbv影品づZ′#!を極ホルダー10であ
り、その2個を互すに向力h1.Q合せて配置1−2溝
9に′#晰11の端部を挿入j2て保持すふ。この場合
溝9内に適当な樹脂を流しこんで固着すLよらにすると
よ(八。
FIG. 4 shows an example of the use of the molded product obtained by this invention. Kodeke bv Kageshinzu Z'#! is a pole holder 10, and the two of them are mutually subjected to a directional force h1. Insert the end of the 11 into the 1-2 groove 9 and hold it. In this case, pour a suitable resin into the groove 9 to make it stick to the L side (8.

以ト詳述L′71rようにこの発明によれば高精度かつ
做紺1な樹脂膜1し品を而φに1.かも確実に製作で責
る効果を妻子る。
As described in detail below, according to the present invention, a product with a high-precision and deep-blue resin film 1 can be manufactured at φ. Maybe the wife and child will definitely be responsible for the production.

【図面の簡単な説明】[Brief explanation of the drawing]

デュ図乃至第3図はこの発明の実施例にかかわる工程を
示す断面図、第4図は成形品の使用例を示す断面図であ
る。 1・・・・・感光性樹脂、2・・・・・ホトマスク、 
5・・・・・非エツチング部分、6・・・・・エツチン
グ部分、7・・・・・成形樹脂、9・・・・・溝特許出
願人 株式会社島津製作帳− 代理人中沢謹之伸□、[
FIG. 3 is a cross-sectional view showing steps related to an embodiment of the present invention, and FIG. 4 is a cross-sectional view showing an example of how a molded product is used. 1...Photosensitive resin, 2...Photomask,
5...Non-etched part, 6...Etched part, 7...Molded resin, 9...Groove Patent applicant: Shimadzu Manufacturing Co., Ltd. Agent: Yoshinori Nakazawa □, [

Claims (1)

【特許請求の範囲】[Claims] 厚みを有すふ感光性樹脂にホトマスクを密着1゜て総光
又は投影露光1−てかちエツチング現像j7、この成形
品を成形[IJJ−l−で所定の樹脂を注型成形すみこ
とを特徴とすふ樹11tj成形法。
A photomask is closely attached to a thick photosensitive resin at 1°, total light or projection exposure is performed, and the molded product is molded. Tosufuki 11tj molding method.
JP11986181A 1981-07-29 1981-07-29 Molding method for resin Pending JPS5820414A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11986181A JPS5820414A (en) 1981-07-29 1981-07-29 Molding method for resin

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11986181A JPS5820414A (en) 1981-07-29 1981-07-29 Molding method for resin

Publications (1)

Publication Number Publication Date
JPS5820414A true JPS5820414A (en) 1983-02-05

Family

ID=14772079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11986181A Pending JPS5820414A (en) 1981-07-29 1981-07-29 Molding method for resin

Country Status (1)

Country Link
JP (1) JPS5820414A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59214623A (en) * 1983-05-20 1984-12-04 Nippon Kogaku Kk <Nikon> Mold for molding fine pattern of plastic
JPH01247580A (en) * 1988-03-30 1989-10-03 Toyo Ink Mfg Co Ltd Production of multistage relief by photosensitive resin, formation of multistage relief or embossment, and production of die

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59214623A (en) * 1983-05-20 1984-12-04 Nippon Kogaku Kk <Nikon> Mold for molding fine pattern of plastic
JPH0361565B2 (en) * 1983-05-20 1991-09-20 Nippon Kogaku Kk
JPH01247580A (en) * 1988-03-30 1989-10-03 Toyo Ink Mfg Co Ltd Production of multistage relief by photosensitive resin, formation of multistage relief or embossment, and production of die

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