JPS58200144A - X-ray photoelectron spectrometer - Google Patents

Abstract

PURPOSE:To obtain local information such as density distribution of elements on the surface of a sample with a high resolution of position by forming an electron incident slit in a pore. CONSTITUTION:X-ray from an X-ray tube 7 irradiates the surface of a sample 6 and a photoelectron beam forms an image for the X-ray irradiation area in the surface of the sample 6 on the surface of a pore-shaped slit 2 with a triple-pole cylindrical electrostatic electron lens 4. The electron beam is deflected in the directions X and Y with an electrode 5. The electron beam passing the pore- shaped slit 2 is detected with a detector 3 through a double spherical type electron energy spectrometer 1 and the output thereof indicates a concentration signal of a specific element on the surface of a sample on a CRT as brightness signal. Thus, local information can be obtained on the density distribution of the specific element with a high resolution of position.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an X-ray photoelectron spectrometer capable of local analysis of a sample surface.

Conventional X-ray photoelectron spectrometers analyze the energy of X-ray photoelectrons emitted from the X-ray irradiated area on the sample surface almost equally, so only average information about the X-ray irradiated area on the sample surface can be obtained. Ta. The present invention improves the weaknesses of the conventional X-ray photoelectron spectrometer, and provides an X-ray photoelectron spectrometer with high positional resolution that can obtain local information on the sample surface, such as the distribution state of various elements on the sample surface and the concentration distribution of specific elements. The aim was to obtain a line photoelectron spectrometer. In accordance with this objective, the present invention provides a small-hole-shaped entrance slit on the electron incidence surface of an electron energy spectrometer, and the slit surface
An X-ray photoelectron spectroscopy device is provided which forms an image using line photoelectrons and can appropriately move this image in both x and y directions. The present invention will be explained below with reference to Examples.

FIG. 1 shows an embodiment of the invention. In this embodiment, the single/double hemispherical electron energy spectrometer is an IBO (deflection type). 2 is an electron entrance slit of this electron energy spectrometer, which is a small hole-shaped opening.

In the conventional energy spectrometer of this type, the entrance slit was an arcuate gap extending perpendicular to the plane of the drawing, but the feature of the present invention is that the entrance slit is shaped like a small circular hole. There is one. 3 is an electron detector, and in this embodiment, a channel type electron multiplier 11J is used. Reference numeral 6 denotes a sample, which is irradiated with X-rays emitted from a side XW tube 7. Reference numeral 4 denotes a triode cylindrical electrostatic electron beam that forms an image of the X-ray irradiated area on the surface of the sample 6 on the surface of the slit 2 by photoelectrons emitted from the surface of the sample 6. 5 is an X-ray photoelectron image of the sample formed on the surface of the slit 2 by applying an appropriate voltage between the opposing electrodes. The position of the slit can be arbitrarily shifted on the same slit surface, thereby allowing X-ray photoelectrons emitted from any point in the X-ray irradiation area of the sample surface to be selectively passed through the slit 2 to the electron energy spectrometer 1. It can be made incident.

In the above embodiment, a double hemisphere 180° deflection type is used as the electron energy spectrometer;
It goes without saying that the spectrometer is not limited to a polarization type, and may be a blocking electric field type spectrometer. In addition, by moving the X-ray photoelectron image of the sample surface in the X and y directions on the entrance slit surface of the spectrometer, the image surface is relatively scanned in the x and y directions by the small hole 2 of the entrance slit, and the electrons are detected. It is also possible to display the concentration distribution of a specific element on the sample surface as an image on a CRT using the output of the device 3 as a luminance signal.

The X-ray photoelectron spectrometer of the present invention has the above-described configuration, and the low surface resolution, which is a weak point of conventional X-ray photoelectron spectroscopy, is improved, resulting in a significant improvement in surface resolution.

[Brief explanation of drawings]

FIG. 1 is a side view of an apparatus according to an embodiment of the present invention, No. 211f1
g is a plan view showing the arrangement of electron beam deflection electrodes in the same example; l...double spherical electron energy spectrometer, 2...
Small hole-shaped entrance slit, 3...electron detector, 4...
Electron lens, 5... Electron beam deflection electrode, 6... Sample,
7...X heald tube. Agent Patent Attorney Kosuke 1

Claims (1)

[Claims] 1. An X-ray source device for irradiating the sample with X-rays, an electron optical system that forms an image of the sample surface using X-ray photoelectrons, an electron energy spectrometer having a small hole-shaped entrance slit in the image plane, and a sample An X-ray photoelectron spectrometer comprising an X-direction and Y-direction electron beam deflection device disposed at an appropriate position between the input slit and the entrance slit of the electron energy spectrometer.