JPS5819808Y2 - Filament power supply for electron beam equipment - Google Patents
Filament power supply for electron beam equipmentInfo
- Publication number
- JPS5819808Y2 JPS5819808Y2 JP1977019306U JP1930677U JPS5819808Y2 JP S5819808 Y2 JPS5819808 Y2 JP S5819808Y2 JP 1977019306 U JP1977019306 U JP 1977019306U JP 1930677 U JP1930677 U JP 1930677U JP S5819808 Y2 JPS5819808 Y2 JP S5819808Y2
- Authority
- JP
- Japan
- Prior art keywords
- filament
- voltage
- transformer
- output
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
【考案の詳細な説明】
本考案は電子線を用いる装置の電子銃におけるフィラメ
ントの通電装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device for energizing a filament in an electron gun of an apparatus using an electron beam.
電子銃のフィラメントは使用中に次第に細くなって来て
一定電圧で通電しているとフィラメントの寿命が短かく
なる。The filament of an electron gun gradually becomes thinner during use, and if it is energized at a constant voltage, the filament's lifespan will be shortened.
従って使用時間に応じて手動的に次第に印加電圧を下げ
て行けば寿命は長くなる筈であるが、フィラメント電圧
を調整して最適電圧を探すため電圧を上下するとかえっ
て寿命を短かくすることがある。Therefore, if you manually lower the applied voltage gradually depending on the usage time, the lifespan should be extended, but adjusting the filament voltage and increasing or lowering the voltage to find the optimal voltage may actually shorten the lifespan. .
しかも−々手動的に最適電圧を探すのは大へん面倒であ
る。Moreover, it is extremely troublesome to manually search for the optimum voltage.
本考案はフィラメント印加電圧を自動的に最適電圧に調
整してフィラメント寿命を延長し、かつ手動調整の繁を
除くことを目的としたものである。The purpose of the present invention is to extend the life of the filament by automatically adjusting the voltage applied to the filament to the optimum voltage, and to eliminate the need for frequent manual adjustments.
本考案はフィラメントの抵抗値を検出し、その抵抗値が
高くなるにつれて次第に印加電圧を変化させるものであ
る。The present invention detects the resistance value of the filament and gradually changes the applied voltage as the resistance value increases.
以下実施例によって本考案を説明する。The present invention will be explained below with reference to Examples.
図は走査型電子顕微鏡を示し、１はフィラメント、２は
加速電極、３，４は電子レンズ、５は試料で６は電子線
ビームである。The figure shows a scanning electron microscope, where 1 is a filament, 2 is an accelerating electrode, 3 and 4 are electron lenses, 5 is a sample, and 6 is an electron beam.
７はフィラメント電源のトランスで９は電子加速電源で
ある。7 is a filament power supply transformer, and 9 is an electron acceleration power supply.
８はトランスＩの一次側における電圧加減装置で具体的
には可変電圧トランスであり、ｒはトランス７の一次巻
線と直列の抵抗であり、その両端電圧が検出器１０で検
出され、これによってフィラメント電流（トランス７の
一次側入力電流）が測定され、またトランスＩの一次側
の入力電圧が同じく検出器１０で検出され、演算回路１
０ａで上記検出された電流と電圧とからフィラメント抵
抗（相対値）が算出され、その演算出力が関数回路１１
の入力に印加され、関数回路１１の出力によって可変電
圧トランス８が操作される。8 is a voltage adjusting device on the primary side of the transformer I, specifically a variable voltage transformer, r is a resistor in series with the primary winding of the transformer 7, and the voltage across it is detected by the detector 10. The filament current (the primary side input current of the transformer 7) is measured, and the primary side input voltage of the transformer I is also detected by the detector 10, and the arithmetic circuit 1
The filament resistance (relative value) is calculated from the current and voltage detected above at 0a, and the calculated output is sent to the function circuit 11.
The variable voltage transformer 8 is operated by the output of the function circuit 11.
フィラメント抵抗の相対値Ｒと印加電圧Ｖとの関係は実
験的に定められるもので例えば
Ｖ＝ａ＋（ｂ／Ｒ）
のような形で与えられる。The relationship between the relative value R of the filament resistance and the applied voltage V is determined experimentally and is given in the form, for example, V=a+(b/R).
関数回路はアナログなものでもよいが、Ｒの値を数段階
に分け、各段階毎に電圧を定めてかいて、レベル検出器
で入力のＲが伺れの段階に属するかを検知し、可変電圧
トランスは出力側に多数のタップを出し、切換接点で倒
れかのタップを選択するようになしものとし、Ｒの所属
する段階によってタップを切換えるようにしてもよい。The function circuit may be an analog one, but it is possible to divide the value of R into several stages, set a voltage for each stage, and use a level detector to detect whether the input R belongs to a certain stage. The voltage transformer may be provided with a large number of taps on the output side, and a switching contact may be used to select which tap falls, and the taps may be switched depending on the stage to which R belongs.
本考案フィラメント通電装置は上述したような構成で、
フィラメント印加電圧がその抵抗値の変化に応じて予め
定めた最適電圧に自動的に調整されるから、フィラメン
ト寿命が延長されるだけでなく、−々手動的に調整する
手数も省けて、電子顕微鏡を長時間連続運転（特に無人
で）する場合等にはきわめて有益なものである。The filament energizing device of the present invention has the above-mentioned configuration,
The voltage applied to the filament is automatically adjusted to a predetermined optimum voltage according to changes in its resistance value, which not only extends the filament's lifespan, but also eliminates the need for manual adjustment, making it easier to use with electron microscopes. This is extremely useful when operating continuously for long periods of time (especially unmanned).
図面は本考案の一実施例の回路図である。
１・・・・・・フィラメント、Ｉ・・・・・・フィラメ
ント電源トランス、１０・・・・・・電圧、電流検出装
置、１０ａ・・・・・・演算回路、１１・・・・・・関
数回路、８・・・・・・電圧可変トランス。The drawing is a circuit diagram of an embodiment of the present invention. 1... Filament, I... Filament power transformer, 10... Voltage, current detection device, 10a... Arithmetic circuit, 11... Function circuit, 8...Voltage variable transformer.
Claims (1)
入力電圧及び電流を検出する装置、同装置の出力よりフ
ィラメント抵抗Ｒの相対値を算出する演算装置、同演算
装置の出力をフィラメント印加電圧Ｖ＝ａ＋（ｂ／Ｒ）
の関係となるよう上記トランス−次側入力電圧制御□□
出力に変換する関数回路及び同回路の出力により上記ト
ランスの入力電圧を変化させる可変電圧トランスよりな
る電子線装置のフィラメント電源装置。A device that detects the input voltage and current on the primary side of the power transformer of the filament of the electron gun, an arithmetic device that calculates the relative value of the filament resistance R from the output of the device, and an output of the arithmetic device that calculates the filament applied voltage V=a+( b/R)
The input voltage on the next side of the transformer is controlled so that the relationship is as follows.
A filament power supply device for an electron beam device, comprising a function circuit that converts into an output, and a variable voltage transformer that changes the input voltage of the transformer based on the output of the circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977019306U JPS5819808Y2 (en) | 1977-02-18 | 1977-02-18 | Filament power supply for electron beam equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977019306U JPS5819808Y2 (en) | 1977-02-18 | 1977-02-18 | Filament power supply for electron beam equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53114959U JPS53114959U (en) | 1978-09-12 |
| JPS5819808Y2 true JPS5819808Y2 (en) | 1983-04-23 |
Family
ID=28848159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977019306U Expired JPS5819808Y2 (en) | 1977-02-18 | 1977-02-18 | Filament power supply for electron beam equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5819808Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4518328B2 (en) * | 2005-07-15 | 2010-08-04 | シャープ株式会社 | Filament control device, filament control method, and thermoelectron processing device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5150652A (en) * | 1974-10-30 | 1976-05-04 | Nippon Electron Optics Lab | DENSHIJU |
-
1977
- 1977-02-18 JP JP1977019306U patent/JPS5819808Y2/en not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5150652A (en) * | 1974-10-30 | 1976-05-04 | Nippon Electron Optics Lab | DENSHIJU |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53114959U (en) | 1978-09-12 |
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