JPS58197780A - 半導体圧力変換器 - Google Patents

半導体圧力変換器

Info

Publication number
JPS58197780A
JPS58197780A JP57079867A JP7986782A JPS58197780A JP S58197780 A JPS58197780 A JP S58197780A JP 57079867 A JP57079867 A JP 57079867A JP 7986782 A JP7986782 A JP 7986782A JP S58197780 A JPS58197780 A JP S58197780A
Authority
JP
Japan
Prior art keywords
film
resistance element
pressure transducer
strain gauge
semiconductor pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57079867A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0258789B2 (enExample
Inventor
Yukio Takahashi
幸夫 高橋
Michitaka Shimazoe
島添　道隆
Yoshitaka Matsuoka
松岡　祥隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57079867A priority Critical patent/JPS58197780A/ja
Priority to US06/494,075 priority patent/US4618844A/en
Publication of JPS58197780A publication Critical patent/JPS58197780A/ja
Publication of JPH0258789B2 publication Critical patent/JPH0258789B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP57079867A 1982-05-14 1982-05-14 半導体圧力変換器 Granted JPS58197780A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP57079867A JPS58197780A (ja) 1982-05-14 1982-05-14 半導体圧力変換器
US06/494,075 US4618844A (en) 1982-05-14 1983-05-12 Semiconductor pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57079867A JPS58197780A (ja) 1982-05-14 1982-05-14 半導体圧力変換器

Publications (2)

Publication Number Publication Date
JPS58197780A true JPS58197780A (ja) 1983-11-17
JPH0258789B2 JPH0258789B2 (enExample) 1990-12-10

Family

ID=13702153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57079867A Granted JPS58197780A (ja) 1982-05-14 1982-05-14 半導体圧力変換器

Country Status (2)

Country Link
US (1) US4618844A (enExample)
JP (1) JPS58197780A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6089851A (ja) * 1983-10-21 1985-05-20 Mitsubishi Electric Corp 磁気記録再生装置
US20190110747A1 (en) * 2017-10-13 2019-04-18 Case Western Reserve University Sensor apparatus and method of making same

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4974596A (en) * 1987-12-14 1990-12-04 Medex, Inc. Transducer with conductive polymer bridge
US4852581A (en) * 1987-12-14 1989-08-01 Medex, Inc. Pressure transducer with conductive polymer bridge
EP0608418B1 (en) 1992-05-20 1998-11-04 Seiko Epson Corporation Cartridge for electronic apparatus
WO1997032320A1 (en) * 1996-02-28 1997-09-04 Sigma-Netics, Inc. Improved strain gauge and method of manufacture
US5812047A (en) * 1997-02-18 1998-09-22 Exar Corporation Offset-free resistor geometry for use in piezo-resistive pressure sensor
AU2032300A (en) 1998-11-25 2000-06-19 Ball Semiconductor Inc. Miniature spherical semiconductor transducer
AU2032400A (en) 1998-11-25 2000-06-19 Ball Semiconductor Inc. Monitor for interventional procedures
WO2000038570A1 (en) 1998-12-31 2000-07-06 Ball Semiconductor, Inc. Miniature implanted orthopedic sensors
US6324904B1 (en) 1999-08-19 2001-12-04 Ball Semiconductor, Inc. Miniature pump-through sensor modules
DE602005014954D1 (de) * 2004-04-13 2009-07-30 Graco Childrens Prod Inc Kinder-sportwagen mit becherhalter
US7430920B2 (en) * 2005-12-16 2008-10-07 Hitachi, Ltd. Apparatus for measuring a mechanical quantity
US6968744B1 (en) * 2004-10-18 2005-11-29 Silverbrook Research Pty Ltd Capacitative pressure sensor with close electrodes
US9246486B2 (en) * 2011-12-16 2016-01-26 Apple Inc. Electronic device with noise-cancelling force sensor

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3456226A (en) * 1967-10-27 1969-07-15 Conrac Corp Strain gage configuration
GB1208382A (en) * 1968-03-23 1970-10-14 Ferranti Ltd Improvements relating to semiconductor strain transducers
US3961358A (en) * 1973-02-21 1976-06-01 Rca Corporation Leakage current prevention in semiconductor integrated circuit devices
US4125820A (en) * 1975-10-06 1978-11-14 Honeywell Inc. Stress sensor apparatus
JPS52127257A (en) * 1976-04-19 1977-10-25 Hitachi Ltd Displacement converter
US4173900A (en) * 1977-03-07 1979-11-13 Hitachi, Ltd. Semiconductor pressure transducer
AU503379B1 (en) * 1978-08-28 1979-08-30 Babcock & Wilcox Co., The Pressure transducer
JPS5687196A (en) * 1979-12-19 1981-07-15 Hitachi Ltd Differential pressure transmitter
US4317126A (en) * 1980-04-14 1982-02-23 Motorola, Inc. Silicon pressure sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6089851A (ja) * 1983-10-21 1985-05-20 Mitsubishi Electric Corp 磁気記録再生装置
US20190110747A1 (en) * 2017-10-13 2019-04-18 Case Western Reserve University Sensor apparatus and method of making same
US10694999B2 (en) * 2017-10-13 2020-06-30 Case Western Reserve University Conductive layer formed strain gauge and method of making same

Also Published As

Publication number Publication date
JPH0258789B2 (enExample) 1990-12-10
US4618844A (en) 1986-10-21

Similar Documents

Publication Publication Date Title
JPS58197780A (ja) 半導体圧力変換器
EP0943923B1 (en) Method of manufacturing a semiconductor acceleration sensor
JPS62213280A (ja) 半導体加速度センサ
US4612599A (en) Capacitive pressure sensor
JPS5855732A (ja) 静電容量型圧力センサ
US8414187B2 (en) Pyroelectric temperature sensor and a method for measuring a temperature with the pyroelectric temperature sensor
CN209894749U (zh) 一种双电容式温湿度传感器
US3787764A (en) Solid dielectric capacitance gauge for measuring fluid pressure having temperature compensation and guard electrode
US4459855A (en) Semiconductor pressure sensor
JPS6154266B2 (enExample)
GB1194071A (en) Piezoelectric Transducer with Acceleration Compensation
JP2715738B2 (ja) 半導体応力検出装置
JPH0420130B2 (enExample)
KR101662714B1 (ko) 열전박막의 수평 및 수직방향 제백계수 측정 센서 유닛
JPH0420131B2 (enExample)
JPS5844303A (ja) 半導体ストレンゲ−ジ
JPS63263426A (ja) センサ素子
JPS58221135A (ja) シリコンダイアフラム形圧力センサ
SU433694A3 (enExample)
JP2669216B2 (ja) 半導体応力検出装置
JPH07151609A (ja) 赤外線センサ
JPH0226723B2 (enExample)
SU607117A1 (ru) Датчик температуры
JP2018132433A (ja) 圧力変化測定装置、高度測定装置、及び圧力変化測定方法
JPH0234971A (ja) 半導体圧力センサ