JPS58196836U - Resist liquid coating device - Google Patents

Resist liquid coating device

Info

Publication number
JPS58196836U
JPS58196836U JP9456182U JP9456182U JPS58196836U JP S58196836 U JPS58196836 U JP S58196836U JP 9456182 U JP9456182 U JP 9456182U JP 9456182 U JP9456182 U JP 9456182U JP S58196836 U JPS58196836 U JP S58196836U
Authority
JP
Japan
Prior art keywords
liquid coating
coating device
resist liquid
board
surface area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9456182U
Other languages
Japanese (ja)
Inventor
誠 中島
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP9456182U priority Critical patent/JPS58196836U/en
Publication of JPS58196836U publication Critical patent/JPS58196836U/en
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来のレジスト液の塗布装置の断面図、第２図
は本考案に係るレジスト液の塗布装置の断面図である。 図において１．１１は基板設置台、２．１３はＳｉ基板
、３，１４はレジスト液、４．１５は排気室、５，１６
は排気孔、１２は鍔状部材を示す。FIG. 1 is a sectional view of a conventional resist liquid coating apparatus, and FIG. 2 is a sectional view of a resist liquid coating apparatus according to the present invention. In the figure, 1.11 is a substrate installation stand, 2.13 is a Si substrate, 3 and 14 are resist liquid, 4.15 is an exhaust chamber, and 5 and 16 are
1 is an exhaust hole, and 12 is a flange-like member.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 基板を吸引設置する排気手段を有し、かつ回転する基板
設置台と該設置台の周囲を囲んで排気する排気室とから
なる構成において、前記基板設置台の下部に少な（とも
前記基板設置台に設置される基板の表面積より大きい鍔
状部材を設けたことを特徴とするレジスト液の塗布装置
。In a configuration including an exhaust means for suctioning and installing a board, and comprising a rotating board setting table and an exhaust chamber surrounding the board and exhausting the air, there is a 1. A resist liquid coating device comprising a flange-like member having a surface area larger than the surface area of a substrate installed on the resist liquid coating device.
JP9456182U 1982-06-23 1982-06-23 Resist liquid coating device Pending JPS58196836U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9456182U JPS58196836U (en) 1982-06-23 1982-06-23 Resist liquid coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9456182U JPS58196836U (en) 1982-06-23 1982-06-23 Resist liquid coating device

Publications (1)

Publication Number Publication Date
JPS58196836U true JPS58196836U (en) 1983-12-27

Family

ID=30226295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9456182U Pending JPS58196836U (en) 1982-06-23 1982-06-23 Resist liquid coating device

Country Status (1)

Country Link
JP (1) JPS58196836U (en)

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